ISVT GMC1100, Инструкция по эксплуатации, Страница: 52 / 54

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<Pressure Set Command>
SPS - Set Pressure control Set-point
Return Value : OK or ?!
Parameter : 0 ~ range
EX)
<Host> 'SPS 100<CR>'
<GMC1100> 'OK<CR>'
Pressure control set-point set 100
SPR - Set Pressure control Range
Return Value : OK or ?!
Parameter : 0.01 ~ 50000
※ <Caution> ※
If Range is changed, Set-point is changed to Zero.
EX)
<Host> 'SPS 1<CR>'
<GMC1100> 'OK<CR>'
Pressure control CM range set 1 torr
If Range small less than 1 torr, Unit was set automatically
mTorr and displayed.
SPM - Set Pressure control Mode
Return Value : OK or ?!
Parameter : '0' or '1'
EX)
<Host> 'SPM 1<CR>'
<GMC1100> 'OK<CR>'
Pressure control Mode On