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Instruction    Manual 

               

         

             

 

 

 

 

 

 

 

 

 

GMC1100 

Flow & Pressure Controller 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Address : #302, 608-2, Bora-dong, Giheung-gu,   

Yongin-si, Kyeonggido, Korea 

Tel : +82-31-284-0791 

Fax : +82-31-284-0792 

Содержание GMC1100

Страница 1: ...Instruction Manual GMC1100 Flow Pressure Controller Address 302 608 2 Bora dong Giheung gu Yongin si Kyeonggido Korea Tel 82 31 284 0791 Fax 82 31 284 0792...

Страница 2: ...2 WARRANTY ISVT Flow Pressure Controller GMC1100 1 Interface Demo Program Internet Home Page...

Страница 3: ...3 GMC1100 Flow Pressure Controller Green Advanced Technology www gat co kr FLOW PRESSURE CONTROLLER GMC1100 FLOW ADJ ENT SET FLOW MENU ESC P CON MODE ALL ON FLOW OFF...

Страница 4: ...on Manual Connection Grounding Manual CAUTION GMC1100 Flow Pressure Controller 195 265VAC 50 60Hz 110VAC SAFETY WARNING Controller NOTE Manual Tel 031 284 0791 web site http www isvt co kr Fax 031 284...

Страница 5: ...5 Customer Support GMC1100 Flow Pressure Controller...

Страница 6: ...anel Components 13 Front Panel Display 14 Rear Panel 15 Rear Panel Components 15 Electrical Connections 16 Labels 20 CHAPTER Four System Setup Overview 21 Main Menu 22 Zeroing 23 Range Setup 24 System...

Страница 7: ...nel PCB MFC Capacitance Manometer Display Board Display Option Upstream Pressure Control Board Pressure Control Mode Channel MFC Channel Gas Control Display Pressure Control Channel Channel Flow Contr...

Страница 8: ...Electrical Input Power 195 265VAC 50 60 Hz 85VA max default 98 135VAC 50 60 Hz 85VA Optional Fuse rating 250 VAC 3 A Output Power 15VDC 5 2 7A Input Signal 0 5 000VDC for MFC 0 10 000VDC for Capacita...

Страница 9: ...9 Chapter Two Installation Unpack Unpacking Check List GMC1100 Control Unit Manual this book Manual CD Power Cable Optional Items...

Страница 10: ...10 Mounting Top View Front View Rear View Figure 1 Controller Dimensions 226 76 241 88 6 35 10 31 Slot Thru 208 87 190 208...

Страница 11: ...11 Cutting Size Figure 2 Cutting Size Dimension Installation Environment Operating Environmental Requirements 15 50 59 122 Chassis Grounding...

Страница 12: ...12 Control Applications Figure 3 Upstream Pressure Control GMC1100 Gas 1 Gas 2 Chamber PUMP Pressure Transducer Ch2 Ch3 Ch1 Computer Gas 3...

Страница 13: ...2 1000 3 1000 cc 4 1000 Green Advanced Technology www gat co kr 1000 cc ADJ ENT SET FLOW 2 1000 1 1000 FLOW PRESSURE CONTROLLER GMC1100 OFF FLOW 1000 1000 cc cc P CON FLOW MENU ESC MODE ALL ON Figure...

Страница 14: ...Flow On channel MENU ESC toggle key key Menu main Menu Sub menu Sub menu Scroll key Adjust knob Enter FLOW ON FLOW OFF FLOW SET key FLOW ON FLOW OFF FLOW SET key Cursor channel Scroll key channel cha...

Страница 15: ...ure Control Card Interface Card TTL Flow On Off RS232C Serial Interface D Type Connector 195 260VAC RS232C BLANK CH 8 CH 6 CH 4 CH 2 INTERFACE CM CH 7 CH 5 CH 3 CH 1 O I Figure 5 GMC1100 Rear Panel Co...

Страница 16: ...Assignment Cable Color 1 No Connection 2 Flow or Pressure Signal Red 3 15VDC Supply Green 4 Power Ground Grey 5 15VDC Supply White 6 Set point Command Signal MFC only Orange 7 Signal Ground Brown 8 Si...

Страница 17: ...Color 1 No Connection 2 Flow or Pressure Signal Red 3 15VDC Supply Green 4 Power Ground Grey 5 15VDC Supply White 6 No Connection 7 Signal Ground Brown 8 Signal Ground Black 9 No Connection 9 pin D s...

Страница 18: ...On 5 On Ch5 Low On 6 On Ch6 Low On 7 On Ch7 Low On 8 On Ch8 Low On 9 Digital Ground 10 No Connection 11 No Connection 12 No Connection 13 No Connection 14 No Connection 15 No Connection 15 pin 3 D su...

Страница 19: ...out Pin No Assignment 1 No Connection 2 Transmit data 3 Receive data 4 No Connection 5 Digital Ground 6 No Connection 7 No Connection 8 No Connection 9 No Connection 9 pin D sub Connector male Table 6...

Страница 20: ...XXX Y Z X Channel Card M MFC Control Card dual 2 channel B Pressure Display Card dual 2 channel O No Card Y Function card P Upstream Pressure Control Card O No Card Z Interface Card I TTL On Off Comma...

Страница 21: ...ale Range Gas Zeroing Control Ratio Accumulation Gas Pressure Control Automatic Upstream Pressure Control System Setup Main Menu Main Display Default Set point Flow MENU ESC key Menu Switch MENU ESC T...

Страница 22: ...Menu Up Down scroll key key Cursor Sub Menu Enter Jog Dial ADJ ENT key Main Menu Sub Menu List Zeroing Range Setup Ratio Accumulation Pressure Control System Setup Display Main Menu Zeroing Range Setu...

Страница 23: ...ro Shift Shift Zeroing ADJ ENT key Rear Panel Channel MFC Zeroing Success Sub Menu MFC Zeroing Channel MFC Zeroing ADJ ENT key Channel 1 ADJ ENT key All 1 2 3 4 5 6 7 8 Channel 2 ADJ ENT key 3 Success...

Страница 24: ...ADJ ENT key Range ADJ ENT key 3 Range Setup Sub Menu 2 Display ADJ ENT key Channel 1 MFC Range Unit Note Range 1000 Range Unit CH1 MFC 1000 SCCM CH2 MFC 1000 SCCM CH3 MFC 1000 SCCM CH4 MFC 1000 SCCM N...

Страница 25: ...500 1000 2000 5000 initial value 4 Range ADJ ENT key ADJ ENT key 5 Down scroll key key Cursor Unit ADJ ENT key SCCM SLM Range 139 sccm Range 100 sccm N2 Gas MFC Ar Gas Ar Gas Correction factor 1 39 1...

Страница 26: ...Panel control TTL TTL Signal Flow On Off RS232 PC Serial Interface control D Net 4 Control Mode Local 2 Sys BAUD Rate RS232C Serial Interface Baud rate 9600bps 19200bps 38400bps 57600bps 115200bps 5...

Страница 27: ...tion MFC Display Digit 4 Digit 5 Digit 2 Rate 4 Digit 5 Digit 4 Digit MFC Display Resolution 1000 4 Digit 4 Sys Initialize System System Menu User 5 LCD Brightness ADJ ENT key LCD Brightness DN UP ESC...

Страница 28: ...28 3 System Info System Information ISVT INC Model GMC1100 TEL 031 284 0791 FAX 031 284 0792 Home www isvt co kr Ver V4 11 05 06 10 ESC Cancel ENT Exit...

Страница 29: ...essure Controller Control Mode Local TTL RS232 3 Local mode Control Front Panel System Setup Main Menu System Setup Sys CTRL Mode Chapter Channel Display Flow Setting Flow On Off Channel Control Ratio...

Страница 30: ...el Board Check Channel Board 2 Channel 1 2 Channel Display 4 Channel 1 2 3 4 Channel Display 4 Channel 5 6 7 8 Channel Channel Display Cursor key Scroll 1 key 1 0000 0000 cc 2 0000 0000 cc 3 0000 0000...

Страница 31: ...31 2 5 0000 0000 cc 6 0000 0000 cc 7 0000 0000 cc 8 0000 0000 cc...

Страница 32: ...ure Controller key Cursor Channel Menu key Cursor Flow Setting 1 Flow Setting Channel key Cursor 2 FLOW SET key 3 ADJ ENT key Setting Enter Setting Cursor 2 Channel Setting 100 Range 1000 1 0000 0000...

Страница 33: ...y MFC On Gas Channel Channel Flow On 2 Channel Setting 100 Range 1000 Flow On 3 Channel Flow On Off ALL key FLOW ON FLOW OFF key ALL key 1 0000 0000 cc 2 0100 0100 cc 3 0000 0000 cc 4 0000 0000 cc 1 0...

Страница 34: ...er Channel MFC Slave MFC Master Channel Flow Slave Channel Control Ratio Setup Main Menu Ratio Setup Sub Menu Master Channel Slave Channel 3 Ratio mode ON Off User Ratio Setup Master CH 1 Slave CH Rat...

Страница 35: ...2 ADJ key Master Channel 2 ENT key 3 key Slave Channel 4 ADJ key 3 ENT key ADJ key 3 ENT key ENT key 3 ENT key 5 key Ratio Mode 6 ADJ key On Off Ratio Control Master Slave 7 key Exit ENT key Ratio Set...

Страница 36: ...Setting Slave Channel Full Scale Range 100 setting 1 MFC 3 Ratio Control MFC Full Scale Range Master 1000 sccm Slave 1 1000 sccm Slave 2 1000 sccm Slave 1 setting 500 sccm Slave 2 setting 250 sccm Mas...

Страница 37: ...ster 1000 sccm Slave 1 2000 sccm Slave 2 5000 sccm Slave 1 setting 1000 sccm Slave 2 setting 2500 sccm Master 1000 sccm Slave Ch MFC Master 500 sccm Slave 1 500 sccm Slave 2 1250 sccm 1 0000 0000 cc 2...

Страница 38: ...tion Sub Menu 2 ADJ key Off On ENT key Acc Time 3 Exit Cursor ENT key Channel MFC Flow On 4 Accumulation Mode Acc Time Line Flow 5 Acc Mode Cursor ADJ key Clear ENT key Flow 2 3 Accumulation Ctrl Acc...

Страница 39: ...ain Check Pressure Control Card Sub Menu Pressure Control Setup Main Menu Pressure Control Sub Menu Automatic Upstream Pressure Control Setup 1 Gain ADJ key Gain 1 200 Pressure Control Overshoot 2 Pha...

Страница 40: ...Cursor C CHs Display C CHs 1 Pressure Control MFC ENT key C CHs 1 1 ADJ key C CHs 2 1 ENT C CHs 2 12 Pressure Control MFC C CHs 1 1 ENT key C CHs 1 Channel Channel 4 Mode On Off Cursor Mode ADJ key Of...

Страница 41: ...00 500 1000 2000 5000 10000 20000 25000 Capacitance Manometer Range 100 mtorr Range 0 1 Display 100 00 mtorr 6 Zeroing Capacitance Manometer Zeroing MFC Shift Capacitance Manometer Display Resolution...

Страница 42: ...el Setup Menu Channel p p Channel MFC P CON MODE key Flow Mode 1 Pressure Setting ADJ key Pressure Setting ENT key 2 Flow On Off FLOW ON FLOW OFF key p Channel MFC On Off 3 Gain Phase Lead Control Cha...

Страница 43: ...cal Mode TTL I O Flow On Off RS232 Serial PC Interface Interface Option TTL Flow On Off Option 15 pin 3 Monitor Connector Connector Flow On Off Connector Pin Assignment page 18 Table 5 TTL On Off Comm...

Страница 44: ...32C Serial PC Interface Option 9 pin Connector RS232C Interface Connector Pin Assignment page 19 Table 6 RS232C Serial Interface Connector Pin out 1 MENU ESC Main Menu System Setup Sys CTRL Mode 2 RS2...

Страница 45: ...Y CR XXX Command YYYY Parameter CR Carriage Return Value INVALID Command is Wrong Check command Parameter is Wrong Check parameter Caution First Character R means READ and S means SET quotation mark i...

Страница 46: ...000 CR RA1 RA8 Read Flow All Return Value 7 56 1byte data EX Host RA1 CR GMC1100 1000 0 CR Host RA2 CR GMC1100 1000 0 1000 0 CR Host RA5 CR GMC1100 1000 0 1000 0 1000 0 1000 0 1000 0 CR RS1 RS8 Read...

Страница 47: ...turn Value 9byte data EX Host RMS CR GMC1100 11001011 CR Return Value means that LSB11001011MSB is MFC Flow ON OFF Status Each bit means each Channel MSB is 8Ch and LSB is 1Ch 1 means MFC Flow ON and...

Страница 48: ...hanged Set point is changed to Zero EX Host SR1 1000 CR GMC1100 OK CR CH1 Range set by 1000 SS1 SS8 Set Set point Return Value OK or Parameter Range Parameter means Set point Value Value is Range or l...

Страница 49: ...Flow OFF Host SFA 11001010 CR GMC1100 OK CR SZ1 SZ8 Set Zero Return Value OK or Parameter none EX Host SZ1 CR GMC1100 OK CR or FL CR OK means zero success FL means zero failed SU1 SU8 Set Unit Return...

Страница 50: ...0 1 CR Return Value means 0 1 RPS Read Pressure control Set point Return Value 8byte data EX Host RPS CR GMC1100 100 0 CR Return Value means 100 RPU Read Pressure control Unit Return Value 6byte data...

Страница 51: ...Each bit indicate each Channel MSB is 8Ch and LSB is 1Ch Bit 1 mean Pressure control ON and Bit 0 mean Pressure control OFF Therefore 0 means that Ch5 Ch6 pressure control On and the other channel is...

Страница 52: ...control Range Return Value OK or Parameter 0 01 50000 Caution If Range is changed Set point is changed to Zero EX Host SPS 1 CR GMC1100 OK CR Pressure control CM range set 1 torr If Range small less...

Страница 53: ...h Bit 1 mean Pressure control ON and Bit 0 mean Pressure control OFF Therefore 0 means that Ch5 Ch6 pressure control On and the other channel is not controlled SPG Set Pressure control Gain value Retu...

Страница 54: ...54 SPZ Set Pressure Zero Return Value OK or FL Faliure Parameter None EX Host SPZ CR GMC1100 OK CR...

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