Inficon PEG100 Скачать руководство пользователя страница 17 | Manualshive

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tina14e1-a (2017-12) PEG100.om

17

7 Wearing Parts and Original Spare Parts

When ordering spare parts, always indicate:

•

all information on the product nameplate

•

description and ordering number according to the spare parts list

Ordering

number

Replacement kit, consisting of:
Cathode plate of titanium (5 pcs.)
Ceramics disc (5 pcs)
Gauge

351-490

Anode complete with ignition plate

351-499

Sensor (DN 25 KF),
complete with magnet assembly (PEG050)

399-510

Accessories

Ordering

number

Connection cable with two FCC 68 plugs, screened

3 m

5

m

10

m

15

m

20

m

30

m

398-500
398-501
398-502
398-503
398-504
398-505

Pirani Standard Gauge

PSG500-S (DN 16 ISO-KF)

PSG500-S (DN 16 CF-R)

350-080
350-082

DN 20 / 25 KF clamping ring

211-002

DN 25 KF (Al) centering ring

211-061

Ordering

number

Ultra sealing disc (3 pcs.)

211-168

Clamping ring for ultra sealing discs

211-009

For overpressure operation and
degassing:

«
...
15
16
17
18
19
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Содержание PEG100

Страница 1: ...Operating Manual Incl EU Declaration of Conformity tina14e1 a 2017 12 1 Penning Gauge PEG100 ...

Страница 2: ...s well as the corresponding operating electronics They have been developed specifically for integration into vacuum systems and offer a measurement range from 1 10 9 to 1 10 2 mbar The gauge is connected directly to the vacuum system through its DN 25 KF or DN 40 CF flange The electrical connection is provided through a screened 8 pin FCC 68 connector Unpack the PEG100 immediately after delivery e...

Страница 3: ...harge in the Penning measurement system is ignited the oper ating voltage is raised to 2 8 kV After successful ignition this voltage then drops to 1 6 kV thereby increasing the useful service life of the Penning measurement system A status output indicates the two possible conditions of the Penning measurement system 1 not ignited including high tension OFF and 2 ignited and pressure 3 10 9 mbar A...

Страница 4: ... 4 Status Output 11 3 2 5 Identification 11 4 Operation 12 4 1 Operation 12 4 2 Measurement System Status Indication 13 4 3 Degassing 13 4 Maintenance 14 5 1 The Electronics Assembly 14 5 2 Cleaning the Sensor 14 5 2 1 Detaching the Electronics Assembly 14 5 2 2 Disassembly of the Sensor 15 5 2 3 Cleaning the Individual Parts 15 5 2 4 Assembly of the Sensor 15 5 2 5 Assembly of the Electronics Ass...

Страница 5: ...regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document Before beginning to work find out whether any vacuum components are conta minated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts Communicate the safety instructions to all other users INFICON assumes no liabili...

Страница 6: ...approx Materials in contact with the medium stainless steel CrNi AL2O3 ceramics NiFe Ni titanium Overpressure tolerance 10 bar abs The limits for the flange connections must be observed Operating voltage 1 6 kV current limited to 0 5 mA Ignition voltage 2 8 kV current limited to 0 5 mA Signal output 0 to 10 6 V Permissible load resistance Ra 10 kΩ Measurement signal 0 66 to 10 0 V logarithmic 1 33...

Страница 7: ...e 20 C to 70 C Climatic rating KWF to DIN 40040 Operating temperature range 10 C to 50 C Max rel humidity of the ambient air on 30 days per year non condensing 70 1 or 95 2 1 usable measurement range 10 2 to 10 9 mbar 2 usable measurement range 10 2 to 10 7 mbar Dimensions mm Weight Ambient Conditions ...

Страница 8: ...and a clamping ring The cathode plate 7 5 also acts as a baffle The supply voltage and the high voltage switching signal as well as the measure ment voltage signal are carried through the 8 way FCC 68 socket Fig 2 Connection socket The pinout is given in Fig 2 Pin Signal Designation on the rear Pin 1 Supply voltage 14 5 V to 36 V dc 24 V dc Pin 2 0 V supply used as the ground reference for the sup...

Страница 9: ...tina14e1 a 2017 12 PEG100 om 9 Two examples of how to connect the PEG100 are given in Annex B Fig 3 Block diagram ...

Страница 10: ...high voltage off when there is no contact with Pin 1 open input or a voltage of less than 7 V is present with reference to Pin 2 Operation of the PEG100 in the pressure range above 10 2 mbar will cause the accumulation of contaminations and will thus reduce service life For this reason the high tension should only be switched on or off when the pressure has dropped to the 10 2 to 10 3 mbar range T...

Страница 11: ...3 10 9 mbar High 13 5 32 V depending at p 3 10 9 mbar on the supply vol tage 50 mA max When the pressure drops below 3 10 9 mbar the status signal remains HIGH For the purpose of identifying the connected type of gauge and the pressure range the PEG100 is equipped with an identification resistor R 100 kΩ between Pin 4 and Pin 2 This resistor may be sensed by connected operating or control units so...

Страница 12: ...g nt signal 0 V voltage is pre ension has not nt signal 0 V voltage is pre ension has bee scharge has b re is over 3 1 nt signal 0 66 GER hich is danger G100 You mu before starting uge from the c tly coming in t ge to the PEG1 ia the high ten at a pressure on make measure g esent t been switche esent en switched on een started 0 9 mbar V rous when tou ust always sw g any work on connection flan to...

Страница 13: ...m the sensing cell The electronics assembly may be damaged when exceeding a temperature of 70 C Before baking out you must make sure that an ultra sealing disc PEG100 DN 25 KF or a copper seal PEG100 DN 40 CF is used as the flange seal The PEG100 is equipped with all metal sensing cells so that any outgassing caused by polymer seals is entirely avoided After having detached the electronics refer t...

Страница 14: ... in this area The electronics assembly of the PEG100 does not require any maintenance DANGER A high tension which is dangerous when touched is applied to the sensor in the PEG100 You must always switch off the supply voltage for the PEG100 before starting any work on the gauge even when removing the PEG100 from the connection flange so as to avoid injury when inadvertently coming in to contact wit...

Страница 15: ... 3 whic mbled in the r 5 2 2 node ring 7 4 wings of the i e that the anod athode plate 7 nt Therefore in housing the See Fig 7 he cathode pla node ring out from the curre ing surfaces o n the inside o ected to furthe d air or nitroge of the housing should be rep e ring 7 4 wit h protects the everse order a you must ma gnition aid 7 de ring is lying 7 5 into the h nsert slowly an anode ring 7 ate 7...

Страница 16: ...o LED is on Supply voltage is missing The POWER LED 6 1 is on the READY LED 6 2 is not on High tension has not been ac tivated Pressure has dropped below 3 10 9 mbar The gas discharge has not ignited Sensing cell not properly con nected to the electronics as sembly e g after mainte nance Missing anode ring e g after maintenance The measurement signal is always greater than 10 V even if the pressur...

Страница 17: ...ode complete with ignition plate 351 499 Sensor DN 25 KF complete with magnet assembly PEG050 399 510 Accessories Ordering number Connection cable with two FCC 68 plugs screened 3 m 5 m 10 m 15 m 20 m 30 m 398 500 398 501 398 502 398 503 398 504 398 505 Pirani Standard Gauge PSG500 S DN 16 ISO KF PSG500 S DN 16 CF R 350 080 350 082 DN 20 25 KF clamping ring 211 002 DN 25 KF Al centering ring 211 0...

Страница 18: ...minated parts Contaminated parts can be detrimental to health and environment Before beginning to work find out whether any parts are contami nated Adhere to the relevant regulations and take the necessary pre cautions when handling contaminated parts WARNING WARNING substances detrimental to the environment Products or parts thereof mechanical and electric components operating fluids etc can be d...

Страница 19: ... 6 8 3 98E 05 9 4 3 55E 03 1 7 5 96E 09 4 3 5 31E 07 6 9 4 73E 05 9 5 4 22E 03 1 8 7 08E 09 4 4 6 31E 07 7 5 62E 05 9 6 5 01E 03 1 9 8 41E 09 4 5 7 50E 07 7 1 6 68E 05 9 7 5 96E 03 2 1 00E 08 4 6 8 91E 07 7 2 7 94E 05 9 8 7 08E 03 2 1 1 19E 08 4 7 1 06E 06 7 3 9 44E 05 9 9 8 41E 03 2 2 1 41E 08 4 8 1 26E 06 7 4 1 12E 04 10 1 00E 02 2 3 1 68E 08 4 9 1 50E 06 7 5 1 33E 04 2 4 2 00E 08 5 1 78E 06 7 6...

Страница 20: ... for connecting the PEG100 Switching the high tension via an external switch or contact Example for connecting the PEG100 Switching the high tension automatically through a Pirani Standard Gauge with switching point B Examples for Connecting ...

Страница 21: ...PEG100 351 000 351 002 Harmonized and international national standards and specifications EN 61000 6 2 2005 EMC generic immunity standard EN 61000 6 3 2007 A1 2011 EMC generic emission standard EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and laboratory use EN 61326 2013 Group 1 Class B EMC requirements for electrical equipment for measurement control and la...

Страница 22: ...22 tina14e1 a 2017 12 PEG100 om Notes ...

Страница 23: ...tina14e1 a 2017 12 PEG100 om 23 Notes ...

Страница 24: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 Original German tina14d1 a 2017 12 reachus inficon com www inficon com t i na14e1 a ...

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