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Communication Protocol

tira85e1-a (2014-10)

Ether

CAT

for Pirani Capacitance Diaphragm and Pirani Standard Gauges

PCG550, PCG552, PCG554,
PSG550, PSG552, PSG554

Содержание PCG550

Страница 1: ...Communication Protocol tira85e1 a 2014 10 1 EtherCAT for Pirani Capacitance Diaphragm and Pirani Standard Gauges PCG550 PCG552 PCG554 PSG550 PSG552 PSG554 ...

Страница 2: ...uum gauges refer to the appropriate documents 1 2 The following description of the EtherCAT interface is compliant to the EtherCAT specification of the EtherCAT Technology Group ETG and to the EtherCAT Semiconductor Device Profile This manual describes the functionality of a EtherCAT slave and supports ETG 5003 1 S R V1 0 0 Part 1 Common Device Profile CDP 11 and ETG 5003 2080 S R V1 0 0 Part 2080...

Страница 3: ...Flange 29 29 mm M 4 VCR female 90 N 7 16 20 UNF male 0 mbar 1 Torr 2 Pa 3 micron 1 Tungsten 2 Nickel 3 Ceramic coated 6 Tungsten galvanically isolated 7 Nickel galvanically isolated 8 Ceramic coated galvanically isolated Unit 0 None 1 Display 2 2 switching functions 3 ATM sensor 2 switching functions 4 Display 2 switching functions 5 Display ATM sensor 2 switching functions 6 2 switching functions...

Страница 4: ...4 tira85e1 a 2014 10 PxG55x cp EP 0689669 B1 0689670 B1 0658755 B1 US Patents 5608168 4031997 5583297 Patents ...

Страница 5: ...t Piezo 18 4 4 5 Input Common 19 4 4 6 Input Heat Transfer 19 4 4 7 Input Trip Point 1 19 4 4 8 Input Trip Point 2 20 4 5 Input Area PCG without ATM 0x6000 0x6FFF 20 4 5 1 Input Common 20 4 5 2 Input Capacitance Diaphragm 20 4 5 3 Input Common 21 4 5 4 Input Heat Transfer 21 4 5 5 Input Trip Point 1 21 4 5 6 Input Trip Point 2 22 4 6 Input Area PSG 0x6000 0x6FFF 22 4 6 1 Input Common 22 4 6 2 Inpu...

Страница 6: ...ched Device Warning Details 44 4 14 9 PCG without ATM Latched Device Warning Details 45 4 14 10 PSG Latched Device Warning Details 45 4 14 11 PCG with ATM Latched Device Error Details 45 4 14 12 PCG without ATM Latched Device Error Details 46 4 14 13 PSG Latched Device Error Details 46 4 14 14 PCG with ATM Device Warning Mask 47 4 14 15 PCG without ATM Device Warning Mask 47 4 14 16 PSG Device War...

Страница 7: ...Device Profile SDP Vacuum Pressure Gauge 12 Data rate 100 Mbps Node address Explicit Device Identification Physical layer 100BASE Tx IEEE 802 3 EtherCAT connector 2 RJ45 8 pin socket IN EtherCAT input OUT EtherCAT output Cable special Ethernet Patch Cable CAT5e quality or higher shielded Cable length 100 m Process data Fixed PDO mapping and configurable PDO mapping Mailbox CoE SDO requests respons...

Страница 8: ... DN 16 ISO KF long 130 8 14 5 DN 16 CF F DN 16 CF R long 130 2 30 9 21 5 42 7 46 3 8 VCR 4 VCR 1 8 NPT 36 SP1 SP2 ST I O DIA ADJ 2 4 0 6 8 A E x100 x10 2 4 0 6 8 A E x1 2 4 0 6 8 A E ERR RUN LA LA IN OUT 67 56 DN 25 ISO KF 4 VCR 90 29 2 29 2 mm 7 16 20 UNF Dimensions mm ...

Страница 9: ...Signal Description 1 TD Transmission Data 2 TD Transmission Data 3 RD Receive Data 4 nu not used 5 nu not used 6 RD Receive Data 7 nu not used 8 nu not used Pin assignment of the D Sub 15 pin sensor connector according to the respective operating manual 1 2 Plug the EtherCAT and sensor cables connector into the gauge From the previous device the cable connected to OUT port has to be connected to t...

Страница 10: ...rface or the diagnostic port may result in incorrect data and data transmission errors Therefore it is inadmissible to simultaneously operate the gauge via the RS232C Serial Interface and EtherCAT interface or the diagnostic port 5 6 4 7 3 9 2 8 1 10 Position Label Function 1 IN EtherCAT IN connector 2 ERR Error LED 3 x100 Address Switch 100 hexadecimal 4 LA Link activity EtherCAT IN 5 x10 Address...

Страница 11: ...omously due to local error see error parameter double flash 200 ms on 200 ms off 200 ms on 1000 ms off An application watchdog timeout has occurred Sync Manager Watchdog timeout or communication timeout occurred red on A critical communication or application controller error has occurred Application controller is not responding any more PDI Watchdog Timeout detected by ESC Displays the input statu...

Страница 12: ...ead by the device firmware This device address is supported to the master as Explicit Device Identification Example Value of the Explicit Device ID 0xDDD dec 3549 0x100 0xD dec 3328 0x10 0xD dec 208 0x1 0xD dec 13 3 3 5 Device Address Switch 2 4 0 6 8 A E x100 x10 2 4 0 6 8 A E x1 2 4 0 6 8 A E ...

Страница 13: ...bject can be both read and written by the SDO service CoE CAN application protocol over EtherCAT Index Object Index hex address of an object NV Nonvolatile attribute value is maintained through power cycles Object Abstract representation of a particular component within a device which consists of data parameters and methods PDO Process Data Object Structure described by mapping parameters containi...

Страница 14: ...ntries when writing 0x1010 01 with 0x65766173 Bit 1 1 slave saves the backup entries automati cally when they are written Bit 2 31 0 Write With the value 0x65766173 the backup entries will be stored to non volatile memory of the slave 1011 0x01 UDINT RW Restore Default Parameters Read Bit 0 1 slave supports the restoring of backup entries with the default values when writing 0x1011 01 with 0x64616...

Страница 15: ... the RxPDO 1601 are designated for user mapping These PDO s do not have default values and can be set up by the PDO configuration Index SI DataType NV Access PM Name 1600 PM RW RxPDO Receive PDO Mapping 1601 PM RW RxPDO Receive PDO Mapping User Mapping Index SI DataType NV Access PM Name 1A00 PM RW TxPDO Transmit PDO Mapping 0x01 BIT Reading Valid 0x02 BIT Overrange Exceeded 0x03 BIT Underrange Ex...

Страница 16: ... RW Safe State 0x02 REAL RW Safe Value Specifies the behavior for the value for States other than Valid Safe State 0 1 2 3 Zero Full Scale Hold last value Use safe value Safe Value The value to be used for Safe State Safe Value PCG gauges with ATM The Manufacturer Configuration Module 2 is assigned to the ATM module PCG gauges without ATM The Manufacturer Configuration Module 2 is assigned to the ...

Страница 17: ...PdoState 0x11 REAL RO tx Sensor Value Is set if the device is not in Safe State value I 0x6nn0 SI 0x11 valid TxPdoState 0 1 Invalid Valid The corrected converted calibrated final analog input value of the sensor Index SI DataType NV Access PM Name 6001 0x01 BOOL RO tx Reading Valid 0x02 BOOL RO tx Overrange Exceeded 0x03 BOOL RO tx Underrange Exceeded Indicates whether the Value parameter contains...

Страница 18: ...alibrated final analog input value of the sensor Index SI DataType NV Access PM Name 6012 0x01 BOOL RO tx Reading Valid 0x02 BOOL RO tx Overrange Exceeded 0x03 BOOL RO tx Underrange Exceeded Indicates whether the Value parameter contains a valid value within the specified accuracy or not Reading Valid 0 Invalid 1 Valid Indicates whether the Value parameter contains a value in over range Reading Va...

Страница 19: ...in the specified accuracy or not Reading Valid 0 Invalid 1 Valid Indicates whether the Value parameter contains a value in over range Reading Valid 0 No Overrange Exceeded 1 Overrange Exceeded Indicates whether the Value parameter contains a value in under range Reading Valid 0 No Underrange Exceeded 1 Underrange Exceeded Index SI DataType NV Access PM Name 600E 0x01 BOOL RO tx Status High Trip 0x...

Страница 20: ...Type NV Access PM Name 6001 0x01 BOOL RO tx Reading Valid 0x02 BOOL RO tx Overrange Exceeded 0x03 BOOL RO tx Underrange Exceeded Indicates whether the Value parameter contains a valid value within the specified accuracy or not Reading Valid 0 Invalid 1 Valid Indicates whether the Value parameter contains a value in over range Reading Valid 0 No Overrange Exceeded 1 Overrange Exceeded Indicates whe...

Страница 21: ...in the specified accuracy or not Reading Valid 0 Invalid 1 Valid Indicates whether the Value parameter contains a value in over range Reading Valid 0 No Overrange Exceeded 1 Overrange Exceeded Indicates whether the Value parameter contains a value in under range Reading Valid 0 No Underrange Exceeded 1 Underrange Exceeded Index SI DataType NV Access PM Name 600E 0x01 BOOL RO tx Status High Trip 0x...

Страница 22: ...corrected converted calibrated final analog input value of the sensor Index SI DataType NV Access PM Name 6003 0x01 BOOL RO tx Reading Valid 0x02 BOOL RO tx Overrange Exceeded 0x03 BOOL RO tx Underrange Exceeded Indicates whether the Value parameter contains a valid value within the specified accuracy or not Reading Valid 0 Invalid 1 Valid Indicates whether the Value parameter contains a value in ...

Страница 23: ...escribes the configuration area of the PCG with ATM Calculating the High Trip Point and Low Trip Point 4 4 7 Index SI DataType NV Access PM Name 8000 or 8010 or 8020 0x01 REAL32 x RW Cross Over Area Upper Limit 0x02 REAL32 x RW Cross Over Area Lower Limit Upper limit of the cross over area At low pressures only the signal of the Pirani sensor is used for pres sure measurement at high pressures onl...

Страница 24: ...w Trip Point Limit is compared with the pressure value referenced by the Source Index parameter High Trip Point Time t in active active in active active Low Trip Point Measurement signal Pressure p Low Trip Hysteresis High Trip Hysteresis in active Index SI DataType NV Access PM Name 800E 0x01 BOOL x RW High Trip Enable 0x02 BOOL x RW Low Trip Enable 0x11 REAL x RW High Trip Point Limit 0x12 UDINT...

Страница 25: ...dition if Input Value I 0x900E SI 0x01 is below this limit Object index of Low Trip Point Value source Bit 16 31 Index Bit 08 15 Subindex Bit 00 07 reserved For a fix limit set value to 0x800E1400 For ATM Mode set value to 0x800E1600 High Trip Point Limit High limit to trigger trip point condition if Input Value I 0x900E SI 0x01 is above this limit High Trip Hysteresis Hysteresis value for High Tr...

Страница 26: ...I 0x01 is above this limit Object index of High Trip Point Value source Bit 16 31 Index Bit 08 15 Subindex Bit 00 07 reserved For a fix limit set value to 0x800F1100 High Trip Point Limit For ATM Mode set value to 0x800F1300 Percentage High Trip Source Percentage of High Trip Source Percentage of Piezo Sensor Value I 0x60010 SI 0x11 in Low Trip Point Limit Low limit to trigger trip point condition...

Страница 27: ...s used for pres sure measurement at high pressures only the signal of the diaphragm capacitive sensor To determine the output signal in the cross over area both signals are used proportionally to the pressure Lower limit of the cross over area Index SI DataType NV Access PM Name 8001 0x01 REAL x RW Zero Adjust Mode If set the CDG Sensor will be adjusted automatically through the Pirani sensor The ...

Страница 28: ...0x1A UDINT x RW Source Index High Trip Point 0 1 Disable Enable Low Trip Point 0 1 Disable Enable High Trip Point Limit High limit to trigger trip point condition if Input Value I 0x900E SI 0x01 is above this limit Object index of High Trip Point Value source Bit 16 31 Index Bit 08 15 Subindex Bit 00 07 reserved For a fix limit set value to 0x800E1100 High Trip Point Limit Low Trip Point Limit Low...

Страница 29: ...urce 0x17 REAL x RW High Trip Hysteresis 0x18 REAL x RW Low Trip Hysteresis 0x1A UDINT x RW Source Index High Trip Point 0 1 Disable Enable Low Trip Point 0 1 Disable Enable High Trip Point limit High limit to trigger trip point condition if Input Value I 0x900F SI 0x01 is above this limit Object index of High Trip Point Value source Bit 16 31 Index Bit 08 15 Subindex Bit 00 07 reserved For a fix ...

Страница 30: ...sure value referenced by the Source Index parameter High Trip Point Time t in active active in active active Low Trip Point Measurement signal Pressure p Low Trip Hysteresis High Trip Hysteresis in active Index SI DataType NV Access PM Name 800E 0x01 BOOL x RW High Trip Enable 0x02 BOOL x RW Low Trip Enable 0x11 REAL x RW High Trip Point Limit 0x12 UDINT x RW High Trip Source Index 0x14 REAL x RW ...

Страница 31: ... Hysteresis Hysteresis value for High Trip Point Low Trip Hysteresis Hysteresis value for Low Trip Point Object index of active source of I 0x900E SI 0x01 Input Value Source Index Bit 16 31 Bit 08 15 Bit 00 07 Index Subindex Reserved Is set to Combi Gauge Value 0xF6401100 Calculating the High Trip Point and Low Trip Point 4 4 7 Index SI DataType NV Access PM Name 800F 0x01 BOOL x RW High Trip Enab...

Страница 32: ... Low limit to trigger trip point condition if Input Value I 0x900F SI 0x01 is below this limit Object index of Low Trip Point Value source Bit 16 31 Index Bit 08 15 Subindex Bit 00 07 reserved For a fix limit set value to 0x800F1400 High Trip Hysteresis Hysteresis value for High Trip Point Low Trip Hysteresis Hysteresis value for Low Trip Point Object index of active source of I 0x900F SI 0x01 Inp...

Страница 33: ... measurement value 3 Highest precision measurement value 4 Highest informational measurement value Index SI DataType NV Access PM Name 9000 0x02 REAL x RO Highest Informational Measurement Value 0x03 REAL x RO Highest Precision Measurement Value 0x04 REAL x RO Lowest Precision Measurement Value Highest Informational Measurement Value Highest value that the gauge can measure without a specified acc...

Страница 34: ...e gauge is specified with an accuracy value Above that value the parameter Reading Valid is set to invalid Lowest Precision Measurement Value Lowest valid value at which the gauge is specified with an accuracy value Below that value the parameter Reading Valid is set to invalid Index SI DataType NV Access PM Name 9012 0x01 UINT RO Sensor Warning 0x02 UINT RO Sensor Alarm Sensor Warnings Bit 0 15 0...

Страница 35: ...dex SI DataType NV Access PM Name 9023 0x01 UINT RO Sensor Warning 0x02 UINT RO Sensor Alarm Sensor Warnings Bit 0 0 Bit 1 Electronics Warning Bit 2 15 0 Sensor Alarms Bit 0 0 Bit 1 Electronics Failure Bit 2 15 0 Index SI DataType NV Access PM Name 900E 0x01 REAL RO Input Value Trip Point 1 900F 0x02 REAL RO Input Value Trip Point 2 Input Value Trip Point 1 Trip Point Input value as referenced by ...

Страница 36: ...ormational measurement value Index SI DataType NV Access PM Name 9000 0x02 REAL x RO Highest Informational Measurement Value 0x03 REAL x RO Highest Precision Measurement Value 0x04 REAL x RO Lowest Precision Measurement Value Highest Informational Measurement Value Highest value that the gauge can measure without a specified accuracy Highest Precision Measurement Value Highest valid value at which...

Страница 37: ...id is set to invalid Lowest Precision Measurement Value Lowest valid value at which the gauge is specified with an accuracy value Below that value the parameter Reading Valid is set to invalid Index SI DataType NV Access PM Name 9013 0x01 UINT RO Sensor Warning 0x02 UINT RO Sensor Alarm Sensor Warnings Bit 0 0 Bit 1 Electronics Warning Bit 2 15 0 Sensor Alarms Bit 0 0 Bit 1 Electronics Failure Bit...

Страница 38: ...surement value 2 Lowest precision measurement value 3 Highest precision measurement value 4 Highest informational measurement value Index SI DataType NV Access PM Name 9000 0x02 REAL x RO Highest Informational Measurement Value 0x03 REAL x RO Highest Precision Measurement Value 0x04 REAL x RO Lowest Precision Measurement Value Highest Informational Measurement Value Highest value that the gauge ca...

Страница 39: ...e Index offset between PDO entries of two consecutive modules for ETG 5003 0x10 Maximum Number of Modules Up to 255 modules are possible A device can support less than this This entry described the supported number of modules Index SI DataType NV Access PM Name F010 0x01 UDINT RO Profile Number Module 1 0x02 UDINT RO Profile Number Module 2 0x03 UDINT RO Profile Number Module 3 Each sub index list...

Страница 40: ...device warning details parameter describes the warning state of the complete device Index SI DataType NV Access PM Name F381 0x01 UDINT RO tx Active Device Warning Details Device 0x02 UDINT RO tx Active Device Warning Details Module 1 0x03 UDINT RO tx Active Device Warning Details Module 2 0x04 UDINT RO tx Active Device Warning Details Module 3 F382 0x01 UDINT RO tx Active Manufacturer Warning Det...

Страница 41: ...2 UDINT RO tx Active Device Warning Details Module 1 0x03 UDINT RO tx Active Device Warning Details Module 2 F382 0x01 UDINT RO tx Active Manufacturer Warning Details Active Device Warning Details Index F381 Bit 0 2 0 Bit 3 EEPROM exception Bit 4 31 0 Active Device Warning Details Index F381 Bit 0 0 Bit 1 Electronics exception Bit 2 31 0 Active Device Warning Details Index F381 Bit 0 0 Bit 1 Elect...

Страница 42: ... Protocol and Device Application Bit 1 31 0 The active device error details parameter describes the error state of the complete device Index SI DataType NV Access PM Name F383 0x01 UDINT RO tx Active Device Error Details Device 0x02 UDINT RO tx Active Device Error Details Module 1 0x03 UDINT RO tx Active Device Error Details Module 2 F384 0x01 UDINT RO tx Active Manufacturer Error Details Active D...

Страница 43: ...ils Module 1 0x03 UDINT RO tx Active Device Error Details Module 2 F384 0x01 UDINT RO tx Active Manufacturer Error Details Active Device Error Details Index F383 Bit 0 2 0 Bit 3 EEPROM exception Bit 4 31 0 Active Device Error Details Index F383 Bit 0 Diaphragm Failure Bit 1 Electronics failure Bit 2 31 0 Active Device Error Details Index F383 Bit 0 Sensor Failure Bit 1 Electronics exception Bit 2 ...

Страница 44: ... Exceptions Status F391 0x01 UDINT RO tx Latched Device Warning Details Device 0x02 UDINT RO tx Latched Device Warning Details Module 1 0x03 UDINT RO tx Latched Device Warning Details Module 2 0x04 UDINT RO tx Latched Device Warning Detail Module 3 F392 0x01 UDINT RO tx Latched Manufacturer Warning Details Latched version of 0xF380 Latched Device Warning Details Device Latched version of 0xF381 01...

Страница 45: ... Warning Detail Module 1 F392 0x01 UDINT RO tx Latched Manufacturer Warning Details Latched version of 0xF380 Latched Device Warning Details Device Latched version of 0xF381 01 Latched Device Warning Details Module 1 Latched version of 0xF381 02 Latched Manufacturer Warning Details Latched version of 0xF382 01 Index SI DataType NV Access PM Name F393 0x01 UDINT RO tx Latched Device Error Details D...

Страница 46: ...r Details Module 1 Latched version of 0xF383 02 Latched Device Error Details Module 2 Latched version of 0xF383 03 Latched Manufacturer Error Details Latched version of 0xF384 01 Index SI DataType NV Access PM Name F393 0x01 UDINT RO tx Latched Device Error Details Device 0x02 UDINT RO tx Latched Device Error Details Module 1 F394 0x01 UDINT RO tx Latched Manufacturer Error Details Latched Device ...

Страница 47: ...ce 0x02 UDINT x RW Device Warning Mask Module 1 0x03 UDINT x RW Device Warning Mask Module 2 F3A2 0x01 UDINT x RW Manufacturer Warning Mask Device Warning Mask Device Mask bits for 0xF381 01 and 0xF391 01 Device Warning Mask Module 1 Mask bits for 0xF381 02 and 0xF391 02 Device Warning Mask Module 2 Mask bits for 0xF381 03 and 0xF391 03 Manufacturer Warning Mask Mask bits for 0xF382 01 and 0xF392 ...

Страница 48: ... PM Name F3A3 0x01 UDINT x RW Device Error Mask Device 0x02 UDINT x RW Device Error Mask Module 1 0x03 UDINT x RW Device Error Mask Module 2 F3A4 0x01 UDINT x RW Manufacturer Error Mask Device Error Mask Device Mask bits for 0xF383 01 and 0xF393 01 Device Error Mask Module 1 Mask bits for 0xF383 02 and 0xF393 02 Device Error Mask Module 2 Mask bits for 0xF383 03 and 0xF393 03 Manufacturer Error Ma...

Страница 49: ...mber F501 V_STRING RO Device Configuration Device Configuration Meaning Shortcut Meaning Example DS9 D Sub 9 pin FCC FCC HM Hirschmann DS15HD D Sub 15 pin HD DS15HD SP Setpoint SP PS Potential separation PS WO or NI Filament Tungsten Nickel WO ATM ATM ATM DIS Display DIS DN DeviceNet PB Profibus RS1 RS485 I RS2 RS485 II RS3 RS485 III RS4 RS485 IV DN CDG CDG CDG AO0 Characteristic AO1 Characteristi...

Страница 50: ...the gauge are in an underrange condition The value copied from the measurement value of the active measuring instance used for the Input PDO Identifies the object instance that is providing the measurement value the latter of which is copied into the Active Value parameter for all Input PDO s Index SI DataType NV Access PM Name F641 0x01 UDINT RO tx Trip Point Output All Instance Status of Trip Po...

Страница 51: ...nput latch time in microseconds It starts at zero on device power up Mandatory if device has inputs If device has no inputs defined this corresponds the time immediately prior to writing to input SM Local controller time corresponding to the input latch time in microseconds It starts at zero on device power up Mandatory if device has inputs If device has no inputs defined this corresponds the time...

Страница 52: ...dule 1 0x02 UDINT RO SDP Functional Generation Number Module 2 0x03 UDINT RO SDP Functional Generation Number Module 3 F9F3 V_STRING RO Vendor Name F9F4 0x01 V_STRING RO Semiconductor SDP Device Name Module 1 0x02 V_STRING RO Semiconductor SDP Device Name Module 2 0x03 V_STRING RO Semiconductor SDP Device Name Module 3 F9F5 0x01 USINT RW rx tx Output Identifier Module 1 0x02 USINT RW rx tx Output ...

Страница 53: ...Output Identifier 0x01 USINT RW rx tx Output Identifier F9F6 UDINT RO Time since power on F9F7 UDINT x RO Total time powered F9F8 UDINT RO Firmware Update Functional Generation Number Index SI DataType NV Access PM Name F940 0x01 UDINT RO Measurement Principle 0x02 BYTE RO Number of Sensors 0x04 V_STRING x RO SW Version VPG PCB F9F0 V_STRING RO Manufacturer Serial Number F9F1 0x01 UDINT RO CDP Fun...

Страница 54: ...VPG PCB Index F940 a b c d Mayor revision Minor revision Development revision Vendor specific i e 1 0 1 2 Execution of this command will start a Zero Adjust operation Index SI DataType NV Access PM Name FB40 0x01 V_STRING 6 RW Command 0x02 BYTE RO Status 0x03 V_STRING 3 RO Response Command Byte 0 0 Zero adjust with no offset Byte 1 1 Index of the Sub Sensor always 1 Byte 2 5 0 Offset value Data fo...

Страница 55: ...eply available Last command completed errors present reply available Command is executing Response Byte 0 See Subindex 0x02 Byte 1 Unused Byte 2 0 Full Scale Adjust successful 1 Full Scale Adjust failed out of range 254 No previous Full Scale Adjust command issued Execution of this command causes the device to emulate a complete power cycle This includes an ESC reset An SDP may limit some behavior...

Страница 56: ...mand clears the latched exceptions Index SI DataType NV Access PM Name FBF1 0x01 V_STRING 5 RW Command 0x02 BYTE RO Status 0x03 V_STRING 1 RO Response A device reset is initiated when the following byte sequence is sent Command Byte 0 Byte 1 Byte 2 Byte 3 Byte 4 0x74 0x65 0x73 0x65 0x72 Status supported values 0 1 2 3 255 Last command completed no error no response Reserved Last command completed ...

Страница 57: ...F2 0x01 V_STRING 4 RW Command 0x02 BYTE RO Status 0x03 V_STRING 1 RO Response A device reset is initiated when the following byte sequence is sent Command Byte 0 Byte 1 Byte 2 Byte 3 0x65 0x76 0x61 0x73 Status supported values 0 1 2 3 255 Last command completed no error no response Reserved Last command completed error no response Reserved Command is executing Response Byte 0 See Subindex 0x02 4 1...

Страница 58: ...T Protocol Enhancements 9 ETG 2000 EtherCAT Slave Information 10 ETG 5001 1 Modular Device Profile Part 1 General MDP Device Model 11 ETG 5003 1 Semiconductor Device profile Part 1 Common Device Profile CDP 12 ETG 5003 2080 Semiconductor Device profile Part 2080 Specific Device Profile SDP Vacuum Pressure Gauge 13 IEC 61158 x 12 all parts for type 12 Industrial communication networks Fieldbus spec...

Страница 59: ...tira85e1 a 2014 10 PxG55x cp 59 Notes ...

Страница 60: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 Original English tira85e1 a 2014 10 reachus inficon com t i r a85e1 a www inficon com ...

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