Inficon Gemini MAG500, Руководство по эксплуатации

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tina83e1-d (2018-12)
53
C
or
rec
ti
on
T
ur
n o
n pow
e
r s
uppl
y
.
R
epl
ac
e i
oni
z
at
ion
c
ham
-
ber
o
r
m
e
a
s
u
ri
ng c
h
am
-
ber
c
pl
.(
→

44
,
50
).
S
w
it
c
h on t
he hi
gh
v
ol
tage
(
→

29
).
E
v
ac
uat
e t
he v
ac
uum
syst
e
m
t
o
<
10
-2
mb
a
r
an
d
s
wit
c
h
t
h
e
gau
ge o
ff
and
o
n
agai
n v
ia
"
HV
ON
".
W
ai
t,
unt
il t
he g
as
di
s
-
c
har
ge h
as
i
gni
ted
(
≈
5
m
inut
es
a
t a pr
es
s
ur
e
of
10
-9
mb
a
r)
.
S
w
it
c
h t
he gauge
of
f an
d
on agai
n a
ft
er
5
s.
R
epl
ac
e t
he g
auge.
R
epl
ac
e
the m
eas
u
ri
ng
c
ham
ber
c
pl
.
(
→

50
).
P
os
s
ibl
e c
a
us
e
N
o s
uppl
y
v
ol
tag
e.
G
auge c
ont
am
inat
ed.
N
o hi
gh v
ol
tag
e i
n t
he
m
eas
ur
in
g c
ham
ber
.
O
v
er
pr
es
s
ur
e i
n t
he
m
eas
ur
in
g c
ha
m
ber
.
G
as
di
s
c
har
g
e has
n
ot
igni
ted.
EEPR
O
M
er
ror
.
M
eas
ur
in
g c
ham
ber
s
ev
er
el
y
c
ont
am
inat
ed
.
S
tat
us
s
ignal
0 0 0 0 0
14.
5
…
30
V
LE
D
<HV
-S
T
>
o
ff
lid
s
o
lid
gr
een
o
ff
b
lin
k
in
g
gr
ee
n
o
ff
lid
s
o
lid
gr
een
LE
D
<
S
T
>
o
ff
lid
s
o
lid
gr
ee
n
lid
s
o
lid
gr
een
lid
s
o
lid
gr
een
b
lin
k
in
g
red
lid
s
o
lid
gr
een
P
robl
em
N
o v
ol
tage at
s
ignal
out
put
.
M
eas
ur
in
g s
ignal
uns
tabl
e.
V
ol
tage at
s
ignal
out
put
0.
15
V
V
ol
tage at
s
ignal
out
put
1
.2
V
(3
MA
x
-xxx
-x
x
x
N)
0
.4
V
(3
MA
x
-xxx
-x
x
x
Q)
.
V
ol
tage at
s
ignal
out
pu
t co
n
-
tin
u
a
lly
<
0
.3
V (
3
M
Ax
-xxx
-x
x
x
N)
<
0
.5
V (
3
M
Ax
-xxx
-x
x
x
Q)
.
S
ignal
c
ont
inual
ly
at
appr
ox
.
5
×1
0
-4
m
bar
.