Inficon BPG402-S, Руководство по эксплуатации

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tina46e1-b (2017-12) BPG402.om
Contents
Product Identification 2
Validity 2
Intended Use 2
Functional Principle 3
1 Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
2 Technical Data 8
3 Installation 13
3.1 Vacuum Connection 13
3.1.1 Removing and Installing the Electronics Unit 14
3.1.2 Using the Optional Baffle 15
3.2 Electrical Connection 17
3.2.1 Use With INFICON VGC40x / VGC50x Vacuum Gauge Controller 17
3.2.2 Use With Other Controllers 17
3.2.2.1 Making an Individual Sensor Cable 18
3.2.2.2 Making a DeviceNet Interface Cable (BPG402-SD) 21
3.2.2.3 Making two EtherCAT Interface Cables (BPG402-SE) 22
3.2.2.4 Making a Profibus Interface Cable (BPG402-SP) 23
3.2.3 Using the Optional Power Supply (With RS232C Line) 24
4 Operation 26
4.1 Measuring Principle, Measuring Behavior 26
4.2 Operational Principle of the Gauge 28
4.3 Putting the Gauge Into Operation 28
4.4 Degas 28
4.5 Filament Status 29
4.5.1 Filament Status Indicator 29
4.5.2 Filament Status Relay (Only BPG402-S, SL) 29
4.5.3 Filament Status via Interface 29
4.6 Filament Control Mode 29
4.7 Emission Control Mode 30
4.8 Display (BPG402-S) 30
4.9 RS232C Interface 31
4.9.1 Description of the Functions 31
4.9.1.1 Output String (Transmit) 32
4.9.1.2 Input String (Receive) 34
4.10 DeviceNet Interface (BPG402-SD) 35
4.10.1 Description of the Functions 35
4.10.2 Operating Parameters 35
4.10.2.1 Operating Software 35
4.10.2.2 Node Address Setting 35
4.10.2.3 Data Rate Setting 36
4.10.3 Status Indicators 36
4.11 EtherCAT Interface (BPG402-SE) 37
4.11.1 Description of the Functions 37
4.11.2 Operating Parameters 37
4.11.2.1 Operating Software 37
4.11.2.2 Explicit Device Address Setting 37
4.11.3 Status Indicators 37
4.12 Profibus Interface (BPG402-SP) 38
4.12.1 Description of the Functions 38
4.12.2 Operating Parameters 38
4.12.2.1 Operating Software 38
4.12.2.2 Node Address Setting 38
4.13 Switching Functions 39
4.13.1 Setting the Switching Functions 40
5 Deinstallation 41