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tina46e1-b (2017-12) BPG402.om

The emission control mode function defines the rules by which the emission of the
gauge is switched on and off.
The manual mode feature has a positive effect on gauge live time, mainly in
process situations where the process chamber has to be vented frequently.

Emission Control Mode

Description

•

Automatic

(AUTO)

By default, the automatic mode is active and the emis-
sion is switched on and off automatically by the gauge.
However, the emission will only be switched on if the
pressure falls below "Switching on pressure" (

→



8).

If the pressure rises above the "Switching off pressure"
(

→



8), the emission is switched off. However, the

user can switch off the emission any time via the
interfaces (

→

below).

•

Manual

(MAN)

In manual mode, the emission can be switched on and
off by the user. However, switching on the emission is
only possible if the pressure is below "Switching on
pressure" (

→



8). If the pressure rises above the

"Switching off pressure" (

→



8) while the emission is

on, the emission will be switched off by the gauge.

The emission control mode parameter is only accessible via the serial

interfaces and described in the respective sections (

→



31,



[1], [2]

and [3]).

The gauges with part number

353-572 and
353-573

have a built-in two-line display with an LCD matrix of 32×16 pixels. The first line
shows the pressure, the second line the pressure unit, the function and possible
errors. The background illumination is usually green, in the event of an error, it
changes to red. The pressure is displayed in mbar (default), Torr or Pa. The pres-
sure unit can be changed via RS232C interface (

→



31).

Pressure reading

Pressure unit

Function display

(none)

Pirani operation

E

Emission 25

μ

A

E

.

Emission 5 mA

D

Degas

4.7 Emission Control Mode

General

4.8 Display

(BPG402-S)

Pressure Display

Function Display

«
...
28
29
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31
32
...
»

Содержание BPG402-S

Страница 1: ...Operating Manual tina46e1 b 2017 12 1 Bayard Alpert Pirani Gauge Dual Filament Bayard Alpert Pirani Gauge BPG402 S BPG402 SD BPG402 SE BPG402 SL BPG402 SP ...

Страница 2: ... SE with EtherCAT interface and two switching functions 353 590 DN 25 ISO KF 353 591 DN 40 CF R BPG402 SP with Profibus interface and two switching functions 353 574 vacuum connection DN 25 ISO KF 353 575 vacuum connection DN 40 CF R The part number PN can be taken from the product nameplate If not indicated otherwise in the legends the illustrations in this document correspond to gauge with part ...

Страница 3: ...he two measurement systems is output The hot cathode is switched on by the Pirani measurement system only below the switching threshold of 2 4 10 2 mbar to prevent filament burn out It is switched off when the pressure exceeds 3 2 10 2 mbar BPG402 Sx sensors are equipped with two hot cathodes The identical filaments are monitored by the gauge electronics In case of a filament failure the gauge wil...

Страница 4: ...ting the Gauge Into Operation 28 4 4 Degas 28 4 5 Filament Status 29 4 5 1 Filament Status Indicator 29 4 5 2 Filament Status Relay Only BPG402 S SL 29 4 5 3 Filament Status via Interface 29 4 6 Filament Control Mode 29 4 7 Emission Control Mode 30 4 8 Display BPG402 S 30 4 9 RS232C Interface 31 4 9 1 Description of the Functions 31 4 9 1 1 Output String Transmit 32 4 9 1 2 Input String Receive 34...

Страница 5: ...4 6 3 What to Do in Case of Problems 44 6 4 Replacing the Sensor 46 7 Options 47 8 Spare Parts 47 9 Storage 47 10 Returning the Product 48 11 Disposal 48 Appendix 49 A Relationship Output Signal Pressure 49 B Gas Type Dependence 50 C Literature 52 For cross references within this document the symbol XY is used for cross references to further documents and data sources the symbol Z ...

Страница 6: ...ard can lead to malfunctions or minor equipment damage Notice Hint recommendation The result is O K The result is not as expected Optical inspection Waiting time reaction time Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end user of the product 1 1 Symbol...

Страница 7: ...re to the relevant regulations and take the necessary precau tions when handling contaminated parts Communicate the safety instructions to all other users INFICON assumes no liability and the warranty becomes null and void if the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind of interventions modifications alterations e...

Страница 8: ...ment change Filament status 4 s LED relay contact 29 Emission control mode Automatic Manual Emission ON OFF automatically Emission ON OFF by user via interfaces 30 Current p 7 2 10 6 mbar 20 mA Control input signal 0 V 24 V dc active high 19 20 control via RS232C 31 Duration 3 min followed by automatic stop In degas mode the BPG402 Sx gauges keep supplying pressure readings the tolerances of which...

Страница 9: ...terface physical CAN bus Data rate adjustable via RATE switch 125 kBaud 250 kBaud 500 kBaud default P 125 kBaud 250 kBaud 500 kBaud programmable via DeviceNet 1 Node address MAC ID Adjustable via ADDRESS MSD LSD switches 0 63dec default 63dec P 0 63 programmable via DeviceNet 1 DeviceNet connector Micro Style 5 pin male Cable shielded special DeviceNet cable 5 conductors 21 and 5 Cable length syst...

Страница 10: ...R The gauge must only be connected to power supplies instruments or control devices that conform to the requirements of a grounded extra low voltage PELV The connection to the gauge has to be fused INFICON controllers fulfill these requirements Supply voltage at the gauge 24 V dc 20 28 V dc 1 ripple max 2 Vpp Power consumption Standard Degas Emission start 200 ms 0 5 A 0 8 A 1 4 A Fuse necessary 1...

Страница 11: ... conductor 100 m 1 0 mm conductor 30 m Materials exposed to vacuum Housing supports screens Feedthroughs Insulator Cathode Cathode holder Pirani element stainless steel NiFe nickel plated glass iridium yttrium oxide Y2O3 molybdenum platinum tungsten copper Internal volume DN 25 ISO KF DN 40 CF R 24 cm 3 34 cm 3 Pressure max 2 bar absolute Admissible temperatures Storage Operation Bakeout Long tube...

Страница 12: ...DN 25 ISO KF 4 40UNC 2B DN 40 CF R 4 40UNC 2B DN 40 CF R Gauges with DeviceNet connector are 14 mm longer 353 570 353 572 353 571 353 573 353 578 450 g 710 g 917 g 353 574 353 576 353 590 353 575 353 577 353 591 490 g 750 g Dimensions mm Weight ...

Страница 13: ...damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools when working in this area The gauge may be mounted in any orientation To keep condensates and particles from getting into the measuring chamber preferably choose a horizontal to upright position See dimensional drawin...

Страница 14: ...th centering ring Protective lid keep it Clamp Allen wrench AF 2 5 Unscrew the hexagon socket set screw 1 on the side of the electronics unit 2 2 1 Remove the electronics unit without twisting it Procedure 3 1 1 Removing and Installing the Electronics Unit Required tools material Removing the electronics unit ...

Страница 15: ...erely contaminating processes and to protect measurement electrodes opti cally against light and fast charged particles replacement of the built in grid by the optional baffle 47 is recommended Gauge deinstalled Deinstallation 41 Baffle 47 Pointed tweezers Pin e g pencil Screwdriver No 1 Carefully remove the grid with tweezers Installing the electronics unit 3 1 2 Using the Optional Baffle Precond...

Страница 16: ...na46e1 b 2017 12 BPG402 om Carefully place the baffle onto the sensor opening Using a pin press the baffle down in the center until it catches Carefully remove the baffle with the screwdriver Deinstallation ...

Страница 17: ...ler and DeviceNet EtherCAT or Profibus at the same time Sensor cable 4 INFICON sales literature Plug the sensor connector into the gauge and secure it with the locking screws Connect the other end of the sensor cable to the INFICON controller and secure it The gauge can also be operated with other controllers Especially the fieldbus versions BPG402 SD DeviceNet BPG402 SE EtherCAT and BPG402 SP Pro...

Страница 18: ...s The sensor cable is required for supplying all BPG402 types with power It also permits access to the relay contacts of the switching functions 19 20 The application and length of the sensor cable have to be considered when deter mining the number and cross sections of the conductors 11 Open the cable connector D Sub 15 pin female Prepare the cable and solder crimp it to the connector as indicate...

Страница 19: ...tput 0 10 V Pin 3 Threshold setpoint 1 0 10 V Pin 4 Relay switching function NO contact Pin 5 Supply common 0 V Pin 6 Not connected internally Pin 7 Degas active high 0 V 24 V Pin 8 Supply Vs 24 V Pin 9 Relay filament status common contact 2 Pin 10 Gauge identification Pin 11 Relay filament status NO contact 2 Pin 12 Measuring signal common Pin 13 RS232C TxD Pin 14 RS232C RxD Pin 15 Do not connect...

Страница 20: ...on 0 V Pin 6 Threshold setpoint B 1 0 10 V Pin 7 Degas active high 0 V 24 V Pin 8 Supply Vs 24 V Pin 9 Relay switching function B common contact Pin 10 Gauge identification Pin 11 Relay switching function B NO contact Pin 12 Measuring signal common Pin 13 RS232C TxD Pin 14 RS232C RxD Pin 15 Do not connect 1 Do not connect pin 3 and pin 6 for normal operation of the gauge These pins are reserved fo...

Страница 21: ...cking screws Connect the other end of the sensor cable to the connector of the instru ment or gauge controller you are using For operating BPG402 SD via DeviceNet an interface cable conforming to the DeviceNet standard is required If no such cable is available make one according to the following indications A shielded special 5 conductor cable conforming to the DeviceNet standard has to be used 5 ...

Страница 22: ...available make two according to the following indications Shielded Ethernet Patch cable quality CAT5e or higher Pin assignment 8 1 FCC68 8 pin male soldering side Pin 1 TD Transmission data Pin 2 TD Transmission data Pin 3 RD Receive Data Pin 4 not used Pin 5 not used Pin 6 RD Receive Data Pin 7 not used Pin 8 not used 3 2 2 3 Making two EtherCAT Interface Cables BPG402 SE Cable type Procedure ...

Страница 23: ...ming to the Profibus standard is required If no such cable is available make one according to the following indications Only a cable that is suited to Profibus operation may be used 6 12 Make the Profibus interface cable according to the following indications 1 5 6 9 D Sub 9 pin male soldering side Pin 1 Do not connect Pin 2 Do not connect Pin 3 RxD TxD P Pin 4 CNTR P 1 Pin 5 DGND 2 Pin 6 VP 2 Pin...

Страница 24: ...l of the gauge 31 Mains connection Mains voltage 90 250 V ac 50 60 Hz Mains cable 1 8 meter Schuko DIN and U S con nectors Output operating voltage of gauge Voltage 21 27 V dc set to 24 V dc Current Max 1 5 A Gauge connection Connector D Sub 15 pin female 24 V dc cable 5 m black Connection of the instrument or control device RS232C connection D Sub 9 pin female Cable 5 m black 3 conductors shielde...

Страница 25: ...y to the gauge and lock the connector with the screws Connect the RS232C line to the instrument or control device and lock the connector with the screws RS232C PC BPG402 Sx Power supply Mains Connect the power supply to the mains Connecting the power supply ...

Страница 26: ...igh pressure range fine vacuum and a high emission cur rent is used in the low pressure range high vacuum The switching of the emis sion current takes place at decreasing pressure at approx 7 2 10 6 mbar at in creasing pressure at approx 3 0 10 5 mbar At the switching threshold the BPG402 Sx can temporarily 2 s deviate from the specified accuracy Diagram of the Bayard Alpert measuring system F1 F2...

Страница 27: ...case of a filament breakage the gauge will immediately react and switch over to the second undamaged filament During the change over procedure the last valid pressure value before filament failure will be output As soon as the second filament is operating and the emission parameters have settled t 4s the measuring circuit resumes operation A Hot Cathode Warning is generated during this switch over...

Страница 28: ...approx 10 min Once the gauge has been switched on permanently leave it on irrespective of the pressure Communication via the digital interfaces is described in separate sections Gauge failures due to contamination as well as expendable parts e g filament are not covered by the warranty Deposits on the electrode system of the Bayard Alpert gauge can lead to unstable measurement readings The degas p...

Страница 29: ...atus Relay contact diagram 19 Both filaments O K closed One filament broken open Both filaments broken open The filament status can be read via the serial interfaces Gauge Interface Detailed information BPG402 Sx all versions RS232C 32 BPG402 SD DeviceNet 1 BPG402 SE EtherCAT 3 BPG402 SP Profibus 2 In automatic mode AUTO default the gauge automatically alternates between filaments in order to age ...

Страница 30: ... user However switching on the emission is only possible if the pressure is below Switching on pressure 8 If the pressure rises above the Switching off pressure 8 while the emission is on the emission will be switched off by the gauge The emission control mode parameter is only accessible via the serial interfaces and described in the respective sections 31 1 2 and 3 The gauges with part number 35...

Страница 31: ... of instrument parameters Caution Caution data transmission errors If the gauge is operated with the RS232C interface and a fieldbus in terface at the same time data transmission errors may occur The gauge must not be operated with the RS232C interface and DeviceNet or Profibus at the same time The interface works in duplex mode A nine byte string is sent continuously without a request approx ever...

Страница 32: ...ation of the master is achieved by testing three bytes Byte No Function Value Comment 0 Length of data string 7 set value 1 Page number 5 hot cathode gauges 8 Check sum of bytes No 1 7 0 255 low byte of check sum 1 1 High order bytes are ignored in the check sum Bit 1 Bit 0 Definition 0 0 emission off 0 1 emission 25 μA 1 0 emission 5 mA 1 1 degas Bit 2 Definition x not used Bit 3 Definition 0 1 t...

Страница 33: ...pplied As result the pressure value results in the usual decimal format pmbar 10 high byte 256 low byte 4000 12 5 pTorr 10 high byte 256 low byte 4000 12 625 pPa 10 high byte 256 low byte 4000 10 5 The example is based on the following output string Byte No 0 1 2 3 4 5 6 7 8 Value 7 5 0 0 242 48 20 12 71 The instrument or controller receiver interprets this string as follows Byte No Function Value...

Страница 34: ...ssion Control Mode to MAN 6 3 16 138 0 154 Power failure safe storage of the Emission Control Mode 6 3 32 1 33 Switch emission on 3 64 16 1 81 Switch emission off 3 64 16 0 80 Set Filament Control Mode to AUTO 7 3 16 211 0 227 Set Filament Control Mode to MAN 7 3 16 211 1 228 Power failure safe storage of the Filament Control Mode 7 3 32 13 45 Select filament 1 8 3 16 210 0 226 Select filament 2 8...

Страница 35: ... of the switching functions As the DeviceNet protocol is highly complex the parameters and programming of BPG402 SD are described in detail in the separate Communication Protocol 1 Before the gauge is put into operation it has to be configured for DeviceNet op eration A configuration tool and the device specific EDS file Electronic Data Sheet are required for this purpose The EDS file can be downl...

Страница 36: ...peration Red non recoverable error LED Description Off gauge not online self test not yet concluded no supply STATUS MOD LED Green flashing gauge online but no communication self test concluded but no communication to other nodes established gauge not assigned to any master Green gauge online necessary connections established Red flashing one or several input output connections in time out status ...

Страница 37: ...ed EtherCAT protocol 3 Pressure reading Pressure unit Torr mbar Pa Degas function Gauge adjustment Status and error messages Status of the switching functions As the DeviceNet protocol is highly complex the parameters and programming of BPG402 SD are described in detail in the separate Communication Protocol 3 For operating the gauge via EtherCAT prior installation of the device specific ESI file ...

Страница 38: ...witching functions As the DeviceNet protocol is highly complex the parameters and programming of BPG402 SP are described in detail in the separate Communication Protocol 2 For operating the gauge via Profibus prior installation of the BPG402 SP specific GSD file is required on the bus master side This file can be downloaded via inter net 4 For unambiguous identification of the gauge in a Profibus ...

Страница 39: ...ues of the switching functions can be set within the pressure range 1 10 9 mbar 100 mbar via potentiometers SETPOINT BPG402 S SL or SETPOINT A and SETPOINT B BPG402 SD SE SP The following rule applies UThreshold 0 75 log pSetpoint c 7 75 Where constant c is pressure unit dependent Appendix A Measured value Off On Switching function Measuring Signal Pressure p Setpoint A B Time t Off UThreshold Hys...

Страница 40: ...using of the gauge The threshold voltages are referenced to ground housing vacuum connection not to Pin 5 common power GND 24 V supply BPG402 S BPG402 SL BPG402 SD BPG402 SE BPG402 SP max ø2 5 Setpoint Pin 3 max ø2 5 Setpoint A Pin 3 Setpoint B Pin 6 Using a screwdriver max ø2 5 mm set the voltage of the selected switching function to the desired value UThreshold There is no local visual indicatio...

Страница 41: ...propriate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools when working in this area Vent the vacuum system Before taking the gauge out of operation make sure that this has no adverse effect on the vacuum system Depending o...

Страница 42: ...42 tina46e1 b 2017 12 BPG402 om Remove gauge from the vacuum system and replace the protective lid Protective lid ...

Страница 43: ...tory calibrated Through the use in different climatic conditions fitting positions aging or contamination 28 and after exchanging the sensor 46 a shifting of the characteristic curve can occur and readjustment can be come necessary Only the Pirani part can be adjusted At the push of a button the digital value and thus the analog output are adjusted electronically to 10 V 1000 mbar at atmospheric p...

Страница 44: ...ation of the gauge no manual adjustment is needed In the event of a fault or a complete failure of the output signal the gauge can eas ily be checked Voltmeter ohmmeter Allen wrench AF 2 5 Spare sensor if the sensor is faulty The output signal is available at the sensor cable connector Pin 2 and Pin 12 In case of an error it may be helpful to just turn off the mains supply and turn it on again aft...

Страница 45: ...cathode range Subsequently the gauge will test the filaments again test time 8 sec filament If the error still exists the gauge will immediately return into the error state If the cause of a fault is suspected to be in the sensor the following checks can be made with an ohmmeter the vacuum system need not be vented for this purpose Separate the sensor from the electronics unit 14 Using an ohmmeter...

Страница 46: ... 1 2 3 For diagnosis of the BPG402 SD DeviceNet gauges the built in LEDs might pro duce some useful information 36 Replacement is necessary when the sensor is severely contaminated the sensor is mechanically deformed the sensor is faulty e g one both filaments of hot cathode broken 44 the sensor is faulty e g Pirani element broken 44 INFICON recommends the replacement of the sensor as soon as the ...

Страница 47: ...F including allen wrench 354 494 Replacement sensor DN 40 CF R including allen wrench 354 495 Ordering number Replacement sensor DN 40 CF R long tube including allen wrench 354 496 9 Storage Caution Caution vacuum component Inappropriate storage leads to an increase of the desorption rate and or may result in mechanical damage of the product Cover the vacuum ports of the product with protective li...

Страница 48: ...aminated parts Contaminated parts can be detrimental to health and environment Before beginning to work find out whether any parts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts WARNING WARNING substances detrimental to the environment Products or parts thereof mechanical and electric components oper ating fluids etc can be d...

Страница 49: ... Torr Pa 0 1 0 3 0 5 Sensor error 44 0 51 0 774 Inadmissible range 0 774 5 10 10 3 75 10 10 5 10 8 1 00 1 10 9 7 5 10 10 1 10 7 1 75 1 10 8 7 5 10 9 1 10 6 2 5 1 10 7 7 5 10 8 1 10 5 3 25 1 10 6 7 5 10 7 1 10 4 4 00 1 10 5 7 5 10 6 1 10 3 4 75 1 10 4 7 5 10 5 1 10 2 5 50 1 10 3 7 5 10 4 1 10 1 6 25 1 10 2 7 5 10 3 1 10 0 7 00 1 10 1 7 5 10 2 1 10 1 7 75 1 10 0 7 5 10 1 1 10 2 8 50 1 10 1 7 5 10 0 ...

Страница 50: ...e 10 2 mbar H2O vapor The gas type dependence in the pressure range 10 2 1 mbar Pirani pressure range can be compensated by means of the following formula peff C indicated pressure where Gas type Calibration factor C Air O2 CO 1 0 N2 0 9 CO2 0 5 Water vapor 0 7 Freon 12 1 0 H2 0 5 He 0 8 Ne 1 4 Ar 1 7 Kr 2 4 Xe 3 0 The above calibration factors are mean values B Gas Type Dependence Indication rang...

Страница 51: ...gauge adjusted for air peff C indicated pressure where Gas type Calibration factor C Air O2 CO N2 1 0 N2 1 0 He 5 9 Ne 4 1 H2 2 4 Ar 0 8 Kr 0 5 Xe 0 4 The above calibration factors are mean values A mixture of gases and vapors is often involved In this case accurate determination is only possible with a partial pressure measuring instru ment ...

Страница 52: ...htenstein 5 www odva org Open DeviceNet Vendor Association Inc DeviceNet Specifications 6 www profibus com Profibus user organization 7 European Standard for DeviceNet EN 50325 8 European Standard for Profibus EN 50170 9 www inficon com Instruction Sheet BPG402 S BPG402 SD BPG402 SL BPG402 SP tima46d1 German tima46e1 English INFICON AG LI 9496 Balzers Liechtenstein 10 www inficon com Instruction S...

Страница 53: ...tina46e1 b 2017 12 BPG402 om 53 Notes ...

Страница 54: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 Original German tina46d1 b 2017 12 reachus inficon com t i na46e1 b www inficon com ...

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