MAX100 SETUP
3e-4
CommandTHC for X-Y Table
Instruction Manual
5
Power supply interface cable
See Figure 3e-2.
1. Remove access covers from the power supply, as required.
2. Locate TB1 inside the power supply.
3. Install the interface cable:
Fabricate sensing wires as follows:
• Use 18AWG (
≈
0.9 mm
2
), double pair, shielded wire, rated for 600V or greater.
• Wire length: As required, from the power supply to the plasma interface assembly.
• After installing the wires into the power supply, install appropriate size fork terminals on the 4 wire
ends.
Connect the 4 wires to TB1 where wire No. 33, 34, 35, and 36 are connected. Label these wires No. 33,
34, 35, and 36.
Connect the other end of the 4 wires to the J3 and J4 terminal of the plasma interface assembly as
shown in Figure 3e-2.
Содержание Command THC
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