horiba MV-2000, Инструкция по эксплуатации

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1. Outline
MV Series vaporizers have flow rate adjusting valves and vaporizer functions. When one of
them is combined with an appropriate model of LF or XF Series micro liquid mass flow
meters for feedback control of the liquid flow rate, the equipment ensures stable generation
of material. Since the vaporizer unit [vaporizer]and the flow rate control unit[mixing valve]
of each model of MV series are separated, it is possible to make independent temperature
control. It is possible to set temerature of the vaporizer unit[vaporizer] higher than control
unit[mixing valve], restraining the temperature rise in the flow control unit. It preuents heat
decomposition in the flow rate control unit and enables stable supply.
2. Specifications
Model MV-2 □□□ - □□□
Applicable material
*1
TEOS etc.
Heater specifications
*2
MV-21 □□ - □□□ : Mixing valve AC 120 V, 50/60 Hz, 200 VA, Vaporizer AC 120 V, 50/60 Hz, 200 VA
MV-22 □□ - □□□ : Mixing valve AC 208 V, 50/60 Hz, 200 VA, Vaporizer AC 208 V, 50/60 Hz, 200 VA
MV-23 □□ - □□□ : Mixing valve AC 240 V, 50/60 Hz, 200 VA, Vaporizer AC 240 V, 50/60 Hz, 200 VA
Orifice
MV-2 □ 4 □ - □□□ :

0.4 mm
MV-2 □ 7 □ - □□□ :

0.7 mm
MV-2 □ 0 □ - □□□ :

1.0 mm
Applicable flow rate
*3
MV-2 □□ 1- □□□ :Less than 1 ccm(or g/min)
MV-2 □□ 2- □□□ :1 to less than 5 ccm(or g/min)
MV-2 □□ 3- □□□ :5 to less than 10 ccm(or g/min)
MV-2 □□ 4- □□□ :10 ccm(or g/min) or more
Wetted material
*4
MV-2 □□□ -M □□ :SUS316L
MV-2 □□□ -P □□ :SUS316L, PFA: Standard
Pneumatic valve MV-2 □□□ - □ V □ : With pneumatic valve *7
MV-2 □□□ - □ N □ : Without pneumatic valve
Filter MV-2 □□□ - □□ F: With Filter
MV-2 □□□ - □□ N: Without Filter
Temperature setting
*5
Depend on vaporization condition
Temperature sensor K type thermocouple (Mixing valve unit and vaporizer unit)
Temperature switches
*6
Mixing valve: For prevention of temperature rise: UCHIYA EP42P 140

C NC type
Vaporizer: For prevention of temperature rise: UCHIYA EP42P 140

C NC type
External leak standard
1

10
-8
Pa

m
3
/s (He) or less
Valve seat leak standard
Mixing valve : 1

10
-6
Pa

m
3
/s (He) or less [at working temperature]
Pneumatic valve: 1

10
-9
Pa

m
3
/s (He) or less [at working temperature]
Standard joint Liquid inlet : 1/8 inch VCR type Male
Carrier gas inlet: 1/4 inch VCR type Female
Gas outlet
: 1/2 inch VCR type Male
Ambient temp. in main
unit installation location
15

C - 50

C (altitude: up to 2000m)
Pressure resistance 1.0 MPa (G)
Weight 1,290 +/- 10 g (with pneumatic valve)
1,150 +/- 10g (without pneumatic valve)