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2) After turning on power to the Liquid flow meter(LF or XF), input the forced closing
signal to close the control valve. (See Instruction Manual for Liquid flow meter.)
3) Set the primary pressure (material supply pressure).
* The material supply pressure varies depending on the material to be produced and
product flow rate. Set the supply pressure, referring to the specification sheet.
* Set the pressure for supplying to the tank under pressure in consideration of the
difference in level between MV and tank, so that the supply pressure to MV is
identical with the pressure indicated on the individual setting sheet.
4) Please control a predetermined carrier gas flow by MFC for carrier gas.
5) Supply MV with the liquid material.
* If the forced closing signal has not been input, the material is supplied at the
beginning in such a large quantity that all material cannot be vaporized, and the
material may be left in the liquid state on the secondary side. Before supplying
the material, check that the signal has been input.
* When the liquid material is introduced, the output signal of the Liqud flow meter (LF
or XF) temporarily increases. This is not an error. The signal will become zero
when the line to MV is filled with the liquid. (Check the Liquid flow meter(LF or
XF) output signal.)
4.3 Vaporization
(1) Feed the necessary carrier gas to the MFC.
(2) After the carrier gas flow rate stabilizes, input the setting signal to cancel the forced
closing signal, and vaporization will be started.
* After vaporization is started, check the Liquid flow meter output signal to ensure that
the flow rate is controlled normally.
* Immediately after the equipment is started up, gas may be left in the piping, and
vaporization may be unstable. Feed the gas into the exhaust line.
5. Peripheral
Equipment
We supply mixing valves and cables designed for this equipment. The use of these special
equipments eliminates the necessity of wiring and ensures reliable operations.
Control unit for Mixing valve
: PE-D20, etc.
Cable
: SC-ELV (for LF), SC-EDH (for XF)
Temperature control unit
For MV
:HC-100VE
For heating piping :HC-100VE
Other various peripheral equipments are available. See our catalogs.
