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5) Fit the supplied thermocouple (MAIN TC) cable for mixing valve to the thermocouple
(MAIN TC) connector on the mixing valve, and connect the thermocouple (VAPO TC)
cable for vaporizer to the thermocouple (VAPO TC) connector on the vaporizer.
Connect the heater cable (MAIN HT) for mixing valve to the heater connector (MAIN HT)
on the mixing valve, and connect the heater (VAPO HT) connector for vaporizer to the
heater (VAPO HT) connector on the vaporizer.
Table 1 Connector Names
Thermocouple
Heater
Mixing valve
MAIN TC
MAIN HT
Vaporizer
VAPO TC
VAPO HT
Valve control
VALVE
6) Seeing the instruction manual for LF Series or XF Series, connect the power and signal
cables.
7) Connect the thermocouple cables and heater cables for the Mixing valve and vaporizers
of MV to their respective temperature regulators. For MV, use temperature regulators
provided with a control constant auto tuning function.
Select temperature regulators and SSRs (solid-state relays) appropriate to the
specifications (type of temperature sensor and heater capacity) for the temperature
sensors and heaters on the heating piping on the secondary side of MV, and connect
them. (See Section 11 “Examples of temperature regulator wiring.”) To prevent
disconnection of the thermocouple connector, secure the thermocouple cable connector
fitting and the case with a screw M3 (10 mm or less in length).
* For MV, K type (CA) thermocouples and 200W heaters are used. Use temperature
regulators and SSRs appropriate to these specifications.
* For MV, use temperature regulators having a control period (proportional period) of 1
second or less for stable vaporization.
* Use temperature regulators with a heater burnout warning function as needed to
check the temperature switch operations and give the alarm upon occurrence of
heater burnout.
* Use temperature regulators with a temperature range alarm function to monitor the
temperature with the temperature alarm.
4.2 Startup
and
warm-up
(1) Turn on power to the temperature regulators, and set the temperatures of MV and
heating piping according to the specified temperatures shown on the individual setting
sheets. (Heat-up)
* The temperature setting for MV varies depending on the type of liquid and flow rate.
* The specified temperatures are shown on the label at the back of the product.
* After heating up, do not touch the main unit. Doing so can burn your hands.
(2) After the temperature increases, warm up the equipment for more than 30 minutes.
After the temperature stabilizes, perform auto tuning of the control constant of each
temperature regulator.
(3) After warming up, supply the material in accordance with the following procedures.
1) Evacuate the piping.
* If the liquid material reacts with the atmosphere, cycle purging is recommended.
For the cycle purging, feed purging gas, such as inert gas, into the piping after
evacuating, and evacuate the piping again.
* If the line to be connected is not a vacuum line, sufficiently purge the line with gas.
