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GRIPPING POWER EPS200 Скачать руководство пользователя страница 7

Gripping Power, Inc

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EPS200 User s Manual

2.6. Load Connections. For proper operation and continued reliability, the high voltage
outputs of the EPS200 must be electrically isolated from extremely high DC bias voltages,
high power RF fields or other sources of potential damage.

It is highly recommended that only accessories manufactured, or specifically authorized, by
Gripping Power, Inc. should be used with the EPS200 when developing an electrostatic
chuck application for plasma processes. Gripping Power, Inc. can provide interconnect
cables, RF decouplers and other accessories to meet any specific need.

A typical electrostatic chuck application for a semiconductor plasma process is shown
below. All of the components are required for proper chucking operation and protection of
the EPS200 power supply.

Figure 2.2 - Typical Installation

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Содержание EPS200

Страница 1: ...EPS200 Electrostatic Chuck DC Power Supply Users Manual http www GrippingPower com G r i p p i n g P o w e r I n c 11930 44th St North Suite B Clearwater FL 33762 727 572 4100 ...

Страница 2: ... and workmanship for a period of 90 days from the date of delivery GPI is not responsible or liable for indirect special or consequential damages arising out of or in connection with the use or performance of the product or other damages with respect to loss of property loss of revenues or profit or costs of removal installation or reinstallation Except as provided herein GPI makes no express warr...

Страница 3: ...1 Operation 8 3 2 The Front Panel 8 3 3 Setting the Operating Mode 8 3 4 Local Operating Mode 9 3 5 Digital Remote Mode 9 3 6 Analog Remote Mode 9 3 7 RS 232 Remote Mode 10 3 8 RS 232 Command Lockout 11 3 9 DeviceNet Mode 11 4 PROGRAM AND CONTROL COMMANDS 4 1 Introduction 12 4 2 High Voltage Control Commands 12 4 3 Status Information Commands 14 4 4 T1 T2 and T3 Timer Commands 16 4 5 Digital Outpu...

Страница 4: ...verload Fault 23 6 3 Alarm Output 23 6 4 No Output 23 6 5 Component Replacement 23 APPENDIX A Programming Examples APPENDIX B Technical Specifications APPENDIX C RS 232 Connector Specification APPENDIX D Remote Control Interface Specifications APPENDIX E Ordering and Service Information ...

Страница 5: ...32 digital and analog remote control modes are provided All electrical interfaces are isolated from the high voltage output and are ground referenced The high voltage can be turned on and off via a single digital bit input An analog input is provided for remote high voltage control Two digital output signals are provided to minimize interface problems when replacing mechanical chuck mechanisms wit...

Страница 6: ...d for 9600 baud no parity eight data bits one stop bit When uploading ASCII text programming files use a 100 millisecond line to line delay Additional information detailing the communication specifications and serial interface is available in Appendix C 2 4 Digital Analog Remote Interface The digital and analog interface is a 15 pin D style subminiature female connector located on the rear panel T...

Страница 7: ...sories manufactured or specifically authorized by Gripping Power Inc should be used with the EPS200 when developing an electrostatic chuck application for plasma processes Gripping Power Inc can provide interconnect cables RF decouplers and other accessories to meet any specific need A typical electrostatic chuck application for a semiconductor plasma process is shown below All of the components a...

Страница 8: ...d four remote operating modes The local mode can be used for testing and developing new programs The remote mode which disables the front panel setpoint adjustment is normally used in a production process where repeatability and automated processing is desired 3 4 Local Operating Mode The local mode is entered by setting the LOCAL REMOTE switch on the front panel to the LOCAL position The mode ind...

Страница 9: ...ect switch until AlgRem is displayed in the mode indicator area of the status display Note that the HV ON switch is ignored when in analog remote mode The high voltage output setpoint used during the HV ON cycle is obtained from the 15 pin control connector on the rear of the unit The analog voltage is converted to a setpoint and displayed on the status display The high voltage output will not tra...

Страница 10: ...must be sent to unit to indicate the end of the message If the last byte after the command message is not a carriage return of the command does not pass syntax checks the data will be ignored and a character will be returned Multiple commands per line are not allowed Except where indicated the EPS200 buffers the incoming data tests for a valid command executes or stores it The acknowledge message ...

Страница 11: ...inue The AB and OF commands are included as a remote safety feature AB Abort the current program OF High voltage off RP Return program status RS Return hardware status Table 3 2 Valid RS 232 Commands in Local Mode 3 9 DeviceNet Mode The DeviceNet remote operating mode is entered by setting the LOCAL REMOTE switch on the front panel to the REMOTE position Press the mode select switch until DevNet i...

Страница 12: ...PS200 can be set to ignore compliance faults completely by sending a CF command Send 0 CF CR Receive 0 CF CR 4 2 2 CN Set high voltage compliance on Once the load had stabilized and voltage tracking errors are significant a CN command will turn the voltage compliance error detection on Voltage compliance deviations outside the compliance widow will produce an overload fault Send 0 CN CR Receive 0 ...

Страница 13: ...ccurs the alarm output is set and the unit displays an Overload message The alarm condition can be cleared by any user acknowledge such as a status poll or a toggling of the REMOTE LOCAL switch Valid parameters are 0 up to 1000 microamps Send 0 SI 500 CR Receive 0 SI 500 CR 4 2 9 RM Report maximum voltage The RM command is used to indicate the maximum full scale range of the EPS200 All units have ...

Страница 14: ...ion commands The following commands provide status information about the unit operating parameters or program condition 4 3 1 ID Return software version The ID command returns the software version installed in the EPS200 Send 0 ID CR Receive 0 EPS200 01 30 CR 4 3 2 RS Return Status The RS command will return a four byte ASCII hexadecimal value which can be decoded to determine the status of the un...

Страница 15: ...e and reset when they are inactive 4 3 3 RP Return program status The RP command returns the number of the selected program the program step number that is currently executing if any and the activity of the program running or stopped Send 0 RP CR Receive 0 P0 01 S CR In this example the selected program is program zero P0 the current step is step one 01 and the program is stopped S If a program is...

Страница 16: ...voltage has been on since timer 2 was last cleared using the C2 command Timer 2 can be used as a chuck or chamber preventative maintenance timer The resolution of T2 is one second It has a maximum time period of 59 999 hours 59 minutes and 59 seconds Timer 3 T3 is the OEM high voltage on timer This timer cannot be reset and is used by the manufacturer for MTBF information The resolution of T3 is o...

Страница 17: ...ping chuck operation is started clamp is up is normally cleared and clamp is down is set active When the chucking operation is completed clamp is up is normally set and clamp is down is cleared The user must set the bits to the preferred state throughout a program If an abort AB command is received or a fault is cleared the EPS200 will automatically reset the bits to the default state of clamp is ...

Страница 18: ...al 4 5 4 SU Set the clamp is up bit The SU command sets the clamp is up output bit on The clamp is up output is an open collector output and will be driven low to digital common when the bit is in the on condition Send 0 SU CR Receive 0 SU CR ...

Страница 19: ... a high voltage off condition is already present when the WF instruction is encountered program execution will continue with the next instruction Instruction Format WF CR In local mode once a program has been started by pressing the high voltage switch and a WF is encountered the EPS200 will wait for the switch to be set to the off position In digital or analog remote mode once a program has been ...

Страница 20: ... is erased Send 0 CP CR Receive 0 CP CR 5 4 3 CA Clears all programs The CA command clears all ten of the EPS200 stored programs The user is prompted for a Y es or N o response to confirm that erasure of all of the stored programs is desired Send 0 CA CR Receive Preparing to clear ALL programs CR Are you sure Y N CR 5 4 4 LP List current program The LP command sends a listing of the currently sele...

Страница 21: ... address zero hex 32 ASCII space characters sp act as delimiters and must be inserted as shown between fields No space is permitted after the attention character and the address field The following field nn is the line number which can range from 01 to 32 Instruction lines can be entered in any order Instructions are stored and listed in order sorted by line number Line numbers may be skipped Empt...

Страница 22: ...ser time delay R2 Read timer 2 HV on time R3 Read timer 3 OEM odometer RC Return compliance value V RI Return overcurrent trip point I RM Report maximum voltage RP Return program number step run stop RS Return hardware status RV Return voltage setpoint V Help command Table 5 1 Instructions that may not be used in a program ...

Страница 23: ... a lower value SV command or inspect the load for shorts or other excessive loading If the unit continues to display the overload fault disconnect the unit from the load and turn on the high voltage If the high voltage comes on and achieves the desired voltage level the unit is performing normally If the unit continues to display the Overload message when isolated from the load it has experienced ...

Страница 24: ... EPS200 to discharge the chuck and more effectively release the substrate Digital output bit commands are included as well 01 TP toggle polarity 02 SV 800 set the output to 800 VDC 03 CU clear clamp is up bit 04 SD set clamp is down bit 05 ON turn on the high voltage 06 WF wait for the high voltage off command 07 TP toggle polarity 08 ON turn on the high voltage 09 SV 800 set output to 800V 10 ST ...

Страница 25: ... 10 Weight 3 lb 1 3 kgs DC Output EPS200 1 0 to 1 000 VDC 1 EPS200 2 0 to 2 500 VDC 1 Output impedance 150 kohm Output connector BNC 2x High voltage output isolation from chassis 100 meg minimum Operating Modes and Interface Options Operating modes 1 local and 3 remote Remote control interfaces Digital analog RS 232 Program Specifications Number of user defined programs 10 Number of steps per prog...

Страница 26: ...ce Connector Pin Description Direction 2 Transmit Data Output 3 Receive Data Input 5 Common All serial communications meets RS 232C requirements The baud rate is fixed at 9600 baud No parity and one stop bit is required Modem control lines such as RTS and CTS are not provided No handshaking protocol such as XON and XOFF is supported The host system must delay data transmission to avoid overflowing...

Страница 27: ...tive low to pin 10 Output 10 Digital common Input 11 No connection 12 No connection 13 No connection 14 No connection 15 No connection Analog I O pins 2 and 6 are configured for 0 1 VDC operation Consult the factory for applications that require a 0 10 VDC interface Pins 5 and 10 are not tied together internally All digital I O should be referenced to pin 10 and all analog I O should be referenced...

Страница 28: ...ls for repair or replacement contact the manufacture and obtain an RMA number All items returned for repair must be packaged properly before shipment or the warranty will be void Ship to Gripping Power Inc 11930 44th Street North Suite B Clearwater Florida 33762 http www GrippingPower com Tel 727 572 4100 Fax 727 592 9894 ...

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