Gripping Power, Inc
13
EPS200 User s Manual
4.2.6. (SC) Set high voltage compliance window. Once the high voltage is on, the
unit will attempt to adjust the output voltage to compensate for varying load conditions.
If the high voltage output deviates outside of the compliance window, an overload error
will be produced. The compliance window can be up to 99 VDC. Valid parameters are
0 up to 99.
Send:
>0 SC 10 [CR]
Receive:
>0 SC 10 [CR]
4.2.7. (SV) Set high voltage setpoint. The SV command sets the value of the high
voltage output used whenever the ON command is issued directly or within a program
in RS-232, digital remote, local or DeviceNet modes. This value is ignored in analog
remote mode. Valid parameters are 0 up to 1000 for a 1kV unit and 2500 for a 2.5kV
unit.
Send:
>0 SV 900 [CR]
Receive:
>0 SV 900 [CR]
4.2.8. (SI) Set overcurrent trip point. The SI command sets the value of the
overcurrent trip point used in all operating modes. The EPS200 will turn off the high
voltage output when the overcurrent trip point is reached. When this occurs, the alarm
output is set and the unit displays an 'Overload' message. The alarm condition can be
cleared by any user acknowledge, such as a status poll or a toggling of the
REMOTE/LOCAL switch. Valid parameters are 0 up to 1000 microamps.
Send:
>0 SI 500 [CR]
Receive:
>0 SI 500 [CR]
4.2.9. (RM) Report maximum voltage. The RM command is used to indicate the
maximum full scale range of the EPS200. All units have a 0 to 1000 VDC or 0 to 2500
VDC range.
Send:
>0 RM [CR]
Receive:
>0 1000 [CR]
4.2.10. (SH) Shunt HV output. The SH command will cause the power supply to
short the output terminals through the internal output resistor network. This command
can be beneficial in removing residual charges left on the chuck before or after
processing.
Send:
>0 SH [CR]
Receive:
>0 SH [CR]
4.2.11. (TP) Toggle polarity. The TP command causes the output voltage polarity to
reverse. If the high voltage is on, the output will turn off and then back on at the
reverse polarity. If the high voltage is not on, the polarity will reverse with the next
HV ON command. The value of the setpoint voltage does not change. Reversing the
chuck voltage polarity is typically performed to remove charge from the chuck surface
when dechucking substrates.
Send:
>0 TP [CR]
Receive:
>0 TP [CR]
