Energetiq LDLS EQ-1500, Руководство по эксплуатации

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EQ-1500 Operation Manual Rev 6 21
So first and foremost, the nitrogen purge gas is intended to displace any oxygen in the system’s
optical chamber. The optics assembly is in direct contact with this purge gas. UV optics are
quite prone to UV photo contamination. Clean and pure nitrogen from either a dewar or
research-grade N
2
bottle is recommended. Do not use any other purge gas. Usage of
clean dry air (CDA) may cause damage to internal optical components, and is likely to
produce ozone gas, which is a potential inhalation hazard.
The fitting is a push-to-connect fitting sized for 1/4” O.D. tubing. The suggested hose to
mate to this fitting is either Nylon: Shore D 50-70, Polyethylene: Shore D 50-196, or Teflon
1/4” O.D. tubing.
There is no return fitting for the purge nitrogen. The purge flow normally escapes within the
lamp unit enclosure, and then to atmosphere.
Optical Interface
The exit aperture consists of a Newport LH-1-5 1.5” lens mount. This incorporates a 1.563-20
thread. Optionally, to utilize the full 0.5 NA output of the EQ-1500, this lens mount can be
removed. With the lens mount removed, the machined mounting holes on the front panel can
be used to interface to the EQ-1500 to external optics. Figure 8 shows the details of the
optical interface. See Figure 8. below.
Any beam transport space should be purged with dry nitrogen to prevent the formation of
ozone from atmospheric oxygen.