Energetiq LDLS EQ-1500, Руководство по эксплуатации

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EQ-1500 Operation Manual Rev 6 20
Cooling Water
The EQ-1500 requires 1.9–3.8 lpm (0.5–1 gpm) water at a minimum of 0.14 MPa (20 psi).
The temperature must be held at 22 ± 1 degrees C. The pressure drop at 3.8 lpm (1 gpm)
through the cold plate is less than 0.07 MPa (10 psi). There are several thermoelectric and
direct water-to-water chillers that can satisfy these requirements. Tight temperature regulation
is required for tight regulation of the lamp’s output. If there are any questions or concerns,
please contact the manufacturer for recommendations or guidance.
The Lamp House water connection fittings are push-to-connect fittings sized for 3/8” O.D.
tubing. The Controller water connection fittings are 3/8” Swagelok® tube fittings.
The Lamp House and Controller should be connected in series, with the Controller upstream.
See Figure 7 below.
Figure 7: Cooling water circuit layout
Purge Gas
The EQ-1500 requires grade 6 or better nitrogen purge gas. The requirement for purge gas is
a result of the EQ-1500 lamp’s unique performance and operating principles. The EQ-1500
produces UV radiation capable of generating ozone gas when exposed to atmospheric oxygen.
Water Supply
Water Return