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Edwards nEXT 240D, Инструкция по эксплуатации

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© Edwards Limited 2013. All rights reserved. 

Page 9

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical data

B800-00-880 Issue D

2

Technical  data

2.1

General

2.2

Pumping media

Table 2 - General data

General items

Reference data

Performance

Refer to 

Table 3, 4 and 5; Figure 1, 2 and 3

Dimensions

Refer to 

Figure 4, 5 and 6

Maximum inlet flange temperature

nEXT240 75 °C
nEXT300 80 

°C

nEXT400 70 

°C

Maximum permitted external magnetic field

5 mT Radial 

*

*

Reduce gas load when operating in magnetic field

Pollution degree

EN61010 Pollution degree 2

Equipment type

Fixed equipment, for indoor use only

Enclosure protection (installed)

IP40

WARNING

Vent dangerous gases and gas mixtures safely. Do not expose people to these gases. If pumping 
hazardous gases or vapours, observe the safety recommendations of the supplier of the gas/
vapour.

WARNING

Do not use the nEXT pump to pump pyrophoric or explosive gas mixtures as it is not suitable for 
this purpose. The pump and its connections are not designed to contain an explosion.

WARNING

In the interstage and booster versions of the nEXT pumps, gas pumped through the interstage port 
will mix with gas pumped through the pump inlet. Ensure that the gases will not react or combine 
to form dangerous gases and substances.

WARNING

Do not exceed the maximum continuous operating pressure. Doing so can result in dangerous rotor 
temperatures and will shorten the life of the pump.

Содержание nEXT 240D

Страница 1: ... Original Instruction Manual nEXT Turbomolecular Pumps nEXT240 nEXT300 and nEXT400 Description Item Number nEXT240D B812XXXXX nEXT240T B813XXXXX nEXT300D B822XXXXX nEXT300T B823XXXXX nEXT400D B832XXXXX nEXT400T B833XXXXX ...

Страница 2: ...he Restriction of Hazardous Substances C22 2 61010 1 04 2004 Safety requirements for electrical equipment for measurement Control and laboratory use Part 1 General requirements UL61010A 2002 Safety requirements for electrical equipment for measurement Control and laboratory use Part 1 General requirements and fulfils all the relevant provisions of 2006 42 EC Machinery Directive 2006 95 EC Low Volt...

Страница 3: ...gas specification 23 2 5 Cooling water 23 2 6 Materials exposed to gases pumped 23 2 7 Electrical data 24 2 8 Logic interface connector 24 2 9 Controller connector socket 27 2 10 Indicator LED s 28 2 11 Operating and storage environment 28 3 Installation 29 3 1 Unpack and inspect 29 3 2 Typical installation 29 3 3 Connection to the vacuum system 30 3 3 1 Inlet screen supplied fitted on CF only 31 ...

Страница 4: ... 5 Normal speed setting 53 4 1 6 Timer setting and options 54 4 1 7 Analogue signal options 55 4 1 8 Factory settings 55 4 1 9 Assigning a multi drop address 55 4 2 Configuring the nEXT pump using a TIC 56 4 3 Before starting the pump 57 4 3 1 Close the vent valve 57 4 3 2 Pre start checks 57 4 4 Operation with parallel control and monitoring 58 4 4 1 Start the pump 58 4 4 2 Running at standby spe...

Страница 5: ...nance 79 7 3 Spares 80 7 3 1 ISX inlet screen 80 7 3 2 Inlet strainer 80 7 3 3 Inlet flange seals and integrated inlet screens 80 7 3 4 NW16 and NW25 Ports 81 7 4 Accessories 81 7 4 1 Installation 81 7 4 2 ACX air cooler 81 7 4 3 WCX water cooler 81 7 4 4 BX bakeout band 82 7 4 5 TAV vent valve and vent port adaptor 82 7 4 6 VRX vent restrictor 82 7 4 7 Vent port adaptor 83 7 4 8 PRX purge restric...

Страница 6: ...al data 12 6 nEXT pumps technical data 13 7 Vent gas specification and vent control 22 8 Purge gas specification 23 9 Cooling water specification 23 10 Logic interface technical data 24 11 Logic interface connector pins 25 12 Controller technical data 27 13 Indicator LED s 28 14 Operating and storage environment 28 15 Checklist of components 29 16 Summary of commands that can be sent to the nEXT p...

Страница 7: ...ds logo are trademarks of Edwards Limited Contents B800 00 880 Issue D 40 BX bakeout band 82 41 TAV vent valve and vent port adaptor 82 42 Vent restrictors 82 43 Vent port adaptor 83 44 PRX purge restrictor 83 45 C clamp adaptor tool kit 83 46 C clamp adaptor port kit 83 ...

Страница 8: ...This page has been intentionally left blank B800 00 880 Issue D Page vi Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ...

Страница 9: ...s are given where failure to observe the instruction could result in damage to the equipment associated equipment and process The units used throughout this manual conform to the SI international system of units of measurement where appropriate US equivalent units of measurement are also given When flow rates are specified the abbreviation sccm is used to mean standard cubic centimetres per minute...

Страница 10: ...sm For SEM and TEM applications an L variant is available which offers considerably lower vibration and stray magnetic field emissions nEXT pumps are supplied with an inlet screen fitted into the centering O ring for ISO version pumps and into envelope for CF version pumps nEXT pumps with an NW25 interstage port are supplied with an inlet strainer that fits into the interstage port The inlet scree...

Страница 11: ... the nEXT pumps have their own regenerative supply and do not require a separate battery for emergency power backup The regenerated energy is used to maintain the electrical supply to the controller and any vent valve or fan attached to the controller connector until the pump speed falls to below 50 of full rotational speed this will ensure that the vent valve remains shut until below 50 of full r...

Страница 12: ...il condition The timer starts as soon as the speed drops to below 50 full speed If during the timeout period the pump recovers to above 50 full speed then the timer will be reset If the pump rotational speed fails to recover by the end of the timeout period the controller will trigger a fail condition and will decelerate the pump to rest When the pump is shipped the timer function is enabled howev...

Страница 13: ...ed Refer to Section 4 1 5 for instructions on altering the normal speed setting 1 5 Logic interface The pump controller can only be operated through the logic interface The signals on the logic interface are of three types Control inputs these are switch type signals that are used to control the pump Status outputs these outputs identify the status of the system Analogue output this provides a 0 1...

Страница 14: ...e same connector pins as the parallel signals standby and fail so these parallel control and monitoring signals are not available The serial enable signal MUST be linked to 0 V and the parallel start signal will be left unconnected 1 5 4 Parallel control with serial monitoring or serial configuration This method of control is best for users who normally wish to operate the pump in parallel control...

Страница 15: ...be used to configure the nEXT pump Refer to Section 3 7 1 The TIC is supplied with a WindowsTM based PC program which allows the nEXT pump to be configured from a single PC The program has a simple user interface which means that it is not necessary to use the ASCII message protocol described in Section 3 7 The TIC PC program has a facility to save multiple nEXT pump configurations which can then ...

Страница 16: ...B800 00 880 Issue D Page 8 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 17: ...closure protection installed IP40 WARNING Vent dangerous gases and gas mixtures safely Do not expose people to these gases If pumping hazardous gases or vapours observe the safety recommendations of the supplier of the gas vapour WARNING Do not use the nEXT pump to pump pyrophoric or explosive gas mixtures as it is not suitable for this purpose The pump and its connections are not designed to cont...

Страница 18: ...e for pumping aggressive or corrosive gases WARNING Do not expose any part of the human body to vacuum WARNING Do not use a nEXT pump to pump mercury vapour and do not allow mercury for example from a McLeod gauge to come into contact with the pump If mercury vapour is pumped the pump rotor may corrode and fail Air Carbon dioxide Methane Neon Propane Krypton Butane Helium Carbon monoxide Ethane Ni...

Страница 19: ...100CF DN100ISO K DN100CF Outlet flange DN25NW DN25NW DN25NW DN25NW Vent port inch BSPP inch BSPP inch BSPP inch BSPP Purge port inch BSPP inch BSPP inch BSPP inch BSPP Interstage port DN25NW DN25NW DN25NW DN25NW Booster port DN25NW DN25NW DN25NW DN25NW Inlet pumping speed N2 He H2 300 l s 340 l s 280 l s 300 l s 340 l s 280 l s 300 l s 340 l s 280 l s 300 l s 340 l s 280 l s Inlet compression rati...

Страница 20: ...25NW DN25NW DN25NW DN25NW Booster port DN25NW DN25NW DN25NW DN25NW Inlet pumping speed N2 He H2 400 l s 390 l s 325 l s 400 l s 390 l s 325 l s 400 l s 390 l s 325 l s 400 l s 390 l s 325 l s Inlet compression ratio N2 He H2 1 x 1011 1 x 108 5 x 105 1 x 1011 1 x 108 5 x 105 1 x 1011 1 x 108 1 x 106 1 x 1011 1 x 108 1 x 106 Interstage pumping speed N2 He H2 13 l s 13 l s 11 l s 13 l s 13 l s 11 l s...

Страница 21: ...nvection 30 C Ambient 10 sccm 10 sccm 35 sccm 25 sccm 45 sccm 25 sccm Argon Water cooling 40 C Ambient 35 sccm 35 sccm 63 sccm 42 sccm 70 sccm 49 sccm Force air cooling 35 C Ambient 20 sccm 28 sccm 76 sccm 70 sccm 70 sccm 77 sccm Natural convection 30 C Ambient 7 sccm 7 sccm 20 sccm 20 sccm 28 sccm 20 sccm Maximum continuous backing pressure at ultimate inlet pressure Nitrogen Water cooling 40 C A...

Страница 22: ... 880 Issue D Page 14 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data Figure 1 nEXT240 performance curve Figure 2 nEXT300 performance curve ...

Страница 23: ... Edwards Limited 2013 All rights reserved Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited Technical data B800 00 880 Issue D Figure 3 nEXT400 performance curve ...

Страница 24: ...B800 00 880 Issue D Page 16 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data Figure 4 nEXT 240 dimensions mm ...

Страница 25: ...e 4 nEXT 240 dimensions mm figure legend 1 Earth point 2 LED indicators on drive unit 3 Removable cap RS485 RS232 switch vent valve socket 4 Base mounting holes and fan mountings 5 Booster port B 6 Interstage port 7 Booster port A 8 Backing port 9 24 48 V Supply 10 Body purge port 11 Electrical drive unit 12 Envelope vent port inch BSP 13 Envelope vent ...

Страница 26: ...B800 00 880 Issue D Page 18 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data Figure 5 nEXT 300 dimensions mm ...

Страница 27: ...e 5 nEXT 300 dimensions mm figure legend 1 Earth point 2 LED indicators on drive unit 3 Removable cap RS485 RS232 switch vent valve socket 4 Base mounting holes and fan mountings 5 Booster port B 6 Interstage port 7 Booster port A 8 Backing port 9 24 48 V Supply 10 Body purge port 11 Electrical drive unit 12 Envelope vent port inch BSP 13 Envelope vent ...

Страница 28: ...B800 00 880 Issue D Page 20 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data Figure 6 nEXT 400 dimensions mm ...

Страница 29: ...e 6 nEXT 400 dimensions mm figure legend 1 Earth point 2 LED indicators on drive unit 3 Removable cap RS485 RS232 switch vent valve socket 4 Base mounting holes and fan mountings 5 Booster port B 6 Interstage port 7 Booster port A 8 Backing port 9 24 48 V Supply 10 Body purge port 11 Electrical drive unit 12 Envelope vent port inch BSP 13 Envelope vent ...

Страница 30: ... of the vent options and the vent valve connection Refer to Section 4 1 3 for configuring the venting options Figure 7 Max allowed rate of pressure rise during venting pressure against time pump initially at full speed Table 7 Vent gas specification and vent control Vent gas specification and control Reference data Vent gas Dry air nitrogen argon or other inert gases Maximum dew point at atmospher...

Страница 31: ...gas specification Purge gas specification Reference data Purge gas Dry air nitrogen argon or other inert gases Maximum dew point at atmospheric pressure 22 C Maximum size of particulates 1 µm Maximum concentration of oil 0 1 parts per million Allowable purge gas flow when required 20 to 50 sccm 0 33 to 0 84 mbar l s 1 or 33 to 84 Pa l s 1 Recommended purge gas flow 25 sccm 0 42 mbar l s 1 42 Pa l ...

Страница 32: ...application 2 8 Logic interface connector nEXT pumps have a 15 way logic interface connector on the end of the logic interface cable The logic interface connector can be plugged directly into the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller Use a suitable connector mating half not supplied to connect the nEXT pump to the customer equipment Refer to Table 10 for the connector mat...

Страница 33: ... sinking 20 mA Current rating 20 mA to 0 V Voltage rating 28 8 V d c maximum external pull up voltage Mating half of connector not supplied Table 11 Logic interface connector pins Pin Number Signal Polarity Use 2 0 V Control reference 0 V reference for all control and status signals below 3 START STOP control input Connect to Pin 2 to start pump 4 STANDBY control input Serial RX RS485 A Connect to...

Страница 34: ...00 00 880 Issue D Page 26 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data Figure 8 Interface circuits for nEXT turbo pump controllers ...

Страница 35: ...lve or fan connected to the three pins The connector mating plug is shown in Figure 9 with the polarity of the pins marked when the vent valve fan is energised The 24 V d c output on the controller connector is protected against overload or short circuit to 0 V d c 24 V d c Rtn chassis The output is guaranteed to supply the current given in Table 12 but for higher currents the output voltage will ...

Страница 36: ...ing Status LED This yellow LED flashes with a 50 duty cycle at the rotational frequency of the pump motor At high speeds it appears continuously on The LED switches off when the rotational speed is very low or stopped If a service is due this LED flashes in a sequence to indicate which service operation is required Refer to Section 5 5 Alarm LED This red LED flashes in a sequence to indicate an er...

Страница 37: ...re the pump in suitable conditions following the procedure described in Section 6 1 Do not discard the packing materials retain them to re package the pump if it is returned for service 3 2 Typical installation A typical pumping system with a nEXT pump is shown in Figure 10 The accessories available for the nEXT pumps are detailed in Section 7 4 the accessories are shown in Figure 20 and 21 WARNIN...

Страница 38: ...sk of tripping WARNING Install the pump in the vacuum system before the logic interface cable is connected to the control equipment and before the electrical supply is connected This will ensure that the pump cannot operate accidentally causing injury 1 Vacuum system 2 High vacuum gauge 3 Vibration damper 4 Inlet screen 5 nEXT pump 6 Backing valve 7 Vacuum gauge 8 Flexible bellows 9 Foreline trap ...

Страница 39: ...ixed vacuum system refer to Section 3 3 3 If this is not possible because of the nature of the vacuum system then the base of the pump must be fixed to a firm support Refer to Section 3 3 4 for instructions on base mounting the pump 3 3 3 Inlet connection and orientation The pump can be securely fixed to the vacuum system via the inlet flange The pump can be mounted in any attitude from the vertic...

Страница 40: ...that no torques or other forces are transmitted to the pump from the vacuum system or the associated pipelines If necessary fit an inlet vibration damper between the pump inlet and the vacuum system In this case fix the base of the pump to a firm support as described in Section 3 3 4 3 3 4 Base mounting The base of the nEXT pump can be fixed to a firm support using the tapped fixing holes Refer to...

Страница 41: ... 4 and connect the purge gas supply to the vent port adaptor The purge gas must comply with the specification given in Section 2 4 3 4 2 Recommended purge gas flow The recommended purge gas flow for typical applications is 25 sccm 0 42 mbar l s 1 42 Pa l s 1 This flow will protect the pump when pumping oxygen in concentrations above 20 by volume The flow rate of the purge gas must be limited to th...

Страница 42: ...alf not supplied to connect the control equipment to the connector on the logic interface cable refer to Table 10 When making the electrical connections to the nEXT pump described in the following sections refer to Table 11 for full details of the logic interface connector pins The nEXT pump can be controlled using a hardware parallel control interface and or via commands sent over a serial interf...

Страница 43: ... earth for example a personal computer or measuring equipment Refer to Table 11 logic interface connector pins when connecting the electrical supply to the customer connector mating half Figure 11 Logic interface connections parallel control Note The pump controller may be supplied from voltages above 24 V as specified in Table 10 however the circuitry connected to the normal and fail lines must s...

Страница 44: ...ut is configured to monitor pump rotational speed To monitor other parameters re configure the nEXT pump using commands over the Serial Interface Refer to Section 3 7 for further details 3 To monitor the normal status output connect the customer control equipment to the normal status output pin 15 and to pin 2 of the customer logic interface mating half The output can be used to control other devi...

Страница 45: ...pendent on any difference in voltage between the 0 V at the sending and receiving end If the 0 V reference at the receiving end is within 0 3 V of the 0 V Control Reference pin on the nEXT pump control connector then the serial link should be capable of operating at distances up to 6 m An interface circuit external to the nEXT pump may be required for longer distances The software in the nEXT pump...

Страница 46: ...allation Figure 13 Logic interface connections RS232 serial control Figure 14 Logic interface connections RS485 serial control 1 RS232 interface on control equipment 2 24 48 V d c electrical supply 3 Fuse 4 nEXT pump logic interface 1 RS485 interface on control equipment 2 24 48 V d c electrical supply 3 Fuse 4 nEXT pump logic interface ...

Страница 47: ...le and send a serial stop command 3 7 3 Serial protocol The serial interface link is set to 9600 Baud 8 bits 1 stop no parity with no handshaking The commands are made up from printable ASCII characters The maximum message size that can be sent is 80 characters including start and end characters Note All alphabetical characters must be sent in upper case format Response may contain lower case char...

Страница 48: ...013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Installation Figure 15 Conceptual diagram for multi drop connection using RS232 interface 1 RS232 interface on control equipment 2 Buffer 3 nEXT pump 4 OR gate ...

Страница 49: ...l be ignored and no reply will be sent The correct structure to use is as follows a valid start character either a character for a store operation or a character for a query operation followed by a command which will be an upper case alphabetical character followed by an object number comprising three decimal digits followed by for some commands only a data field comprising a sequence of character...

Страница 50: ...nt if 50 speed or hard vent if 50 speed Hard vent if stop or hard vent if fail and 50 speed Hard vent if stop or controlled vent if fail and 50 speed or hard vent if fail and 50 speed Hard vent if fail or hard vent if stop and 50 speed Hard vent if fail or controlled vent if stop and 50 speed or hard vent if stop and 50 speed Hard vent if stop or fail Same as option 6 Vent Permanently enabled Fan ...

Страница 51: ...rs Hours until controller service due Pump run time V883 0 999999 decimal hours Hours run by pump 0 999999 decimal hours Hours until pump service due Pump cycles V884 0 65535 decimal cycles Cycles run by pump 0 65535 decimal cycles Cycles until pump service due Bearing run time V885 0 999999 decimal hours Hours run by bearing 0 999999 decimal hours Hours until bearing service due Oil cartridge run...

Страница 52: ...s showing multiple X characters are to indicate maximum length and not fixed length Table 18 Error codes Returned error code Meaning 0 No error 1 Invalid command for object ID 2 Invalid Query Command 3 Missing parameter 4 Parameter out of range 5 Invalid command in current state e g serial command to start stop when in parallel control mode Table 17 Command abbreviations Abbreviation Meaning ...

Страница 53: ...s specified in Table 10 however the circuitry connected to the normal and fail lines must still respect the maximum external pull up voltage rating given in Table 10 1 RS232 interface on control equipment 2 24 V d c electrical supply 3 Fuse 4 Optional LED indicator system OK 5 Optional LED indicator normal speed 6 Current limit resistor for LED 7 Optional serial link selector 8 nEXT pump 9 Optiona...

Страница 54: ...rmal signal and analogue output over the parallel interface Figure 17 shows a schematic diagram of a system that demonstrates how to do this This connection is a hybrid of the parallel and serial connection which are described in detail in Section 3 6 and 3 7 respectively Many of the options described in those sections are available in mixed parallel and serial operation but note that whilst seria...

Страница 55: ...t upstream of the nEXT pump to prevent backstreaming of oil from the backing pump If using the TAV5 vent valve the pump may only be hard vented when it is at full speed if the vacuum system has a volume of 5 litres or more If using the TAV6 vent valve the pump may only be hard vented when it is at full speed if the vacuum system has a volume of 10 litres or more If the volume of the vacuum system ...

Страница 56: ...suitable vent restrictor is fitted to the vacuum system to limit the rate of pressure rise Refer to Table 20 for information about vent restrictor sizes If a suitable vent restrictor is not fitted open the vent valve only after the speed of the pump has fallen to 50 of full rotational speed Table 19 Vent options Option number Description of vent function 0 Vent valve opens fully below 50 full rota...

Страница 57: ...r to Table 6 for further performance information 3 10 2 Forced air cooling Air cooling accessories are available for nEXT pumps refer to Section 7 4 Fit the air cooler as described in the instruction manual supplied with it If an alternative fan is used for air cooling ensure that the flow rate is above 100 m3 h 1 60 cfm The air cooler can be powered by a customer external power supply the Edwards...

Страница 58: ...water cooler can be used for the water supply or return connections Push nylon hose approximately 10 mm outer diameter into the ends of the hose connectors on the water cooler on the pump Alternatively remove the hose connectors from the water cooler and make direct connections to the 1 8 inch BSP female threaded fittings on the water cooler To avoid breaking the cooling water circuit when removin...

Страница 59: ... control and monitoring and the controller settings will not be reconfigured go straight to Section 4 3 4 1 Configuring the nEXT pump using serial commands Refer to Table 16 for a summary of the full set of serial commands parameter ranges and factory defaults for each setting The following sections describe the settings in more detail 4 1 1 Power limit setting Table 21 shows the power limit setti...

Страница 60: ... will be in the following format If the character d is 8 then the fan is enabled If it is anything else configure the controller to run the fan 4 1 3 Controlled venting options If the controller is used to automatically control a vent valve there are a number of venting options available refer to Table 19 To set a vent option send the following command where the character d refers to the option nu...

Страница 61: ...nt the value as a percentage of full rotational speed The reply will be in the following format The standby speed is now stored in memory within the nEXT pump To check what standby speed is set send a query as follows The reply will be as follows 4 1 5 Normal speed setting The normal speed is a user configurable setting and can be set to any value between 50 and 100 full rotational speed When the ...

Страница 62: ...meout period is set send a query as follows The reply will be as follows The timer is permanently enabled during ramp up however it is optional to have it enabled at other times When the pump is shipped the timer is enabled by default To disable the timer send the following serial command The reply will be as follows The state of the timer option is stored in memory within the nEXT pump To enable ...

Страница 63: ...nd To reset the controller to factory settings send the following command The reply will be as follows The factory settings are restored in the memory within the nEXT pump 4 1 9 Assigning a multi drop address When the nEXT pump is shipped multi drop mode is disabled by default Each individual pump must be programmed with its own multi drop address via a point to point connection before introductio...

Страница 64: ... the nEXT pump The reply will be as follows where dd denotes the multi drop address of the pump Multi drop mode can be disabled by assigning the pump an address 0 To do this send the following command where dd denotes the multi drop address of the pump and XX denotes the address of the node that is sending the command The reply will be as follows Once multi drop mode is disabled the pump will no l...

Страница 65: ... automatically shut when the pump is started If using the TIC to operate the vent valve refer to Section 4 7 Note The backing pump and nEXT pump can be started at the same time The nEXT pump will not be damaged and can operate as an effective baffle however if the vacuum system is large 100 litres or larger it will be more efficient to allow the backing pump to reduce system pressure to 10 mbar be...

Страница 66: ...hed To return the pump to full speed disconnect the standby control input from the 0 V control reference on the logic interface connector 4 4 3 Stop the pump Stop the nEXT pump by disconnecting the start stop control input from the 0 V control reference on the logic interface connector The pump rotor will decelerate to rest 4 4 4 Parallel monitoring It is possible to monitor the following paramete...

Страница 67: ...il it reaches standby speed If it is running faster than standby speed it will decelerate until standby speed is reached To return the pump to full speed send the following command The reply will be as follows 4 5 4 Stop the pump To stop the nEXT pump send the following command over the serial communications link The reply will be in the following format On successful receipt of the stop command t...

Страница 68: ...ion In mixed parallel and serial operation the pump may receive commands from both serial and parallel interfaces To understand how these commands control the pump refer to Figure 19 The pump will power up with None in Control From this state a parallel start signal or a serial start command may be received resulting in the pump moving to parallel control mode or serial control mode respectively S...

Страница 69: ... normal and analogue output signals provide valid pump status information at all times under mixed parallel and serial operation The analogue output voltages are described in Table 10 Table 23 Serial enable matrix Serial enable Active Inactive RS485 RS232 Switch RS232 Standby and fail lines are used for RS232 data Standby and fail lines are used for parallel Standby control and fail indication Par...

Страница 70: ...connected directly to this type of unit which will provide the power necessary to drive the nEXT pump Instructions on the setup and operation with the TIC or TIC Turbo Controller can be found on CD ROM part number D397 00 879 which is supplied with the TIC or TIC Turbo Controller 4 8 Decelerating and venting Immediately after applying the stop command whether by the parallel or serial interface or...

Страница 71: ...of full rotational speed Refer to Section 2 7 for the maximum power delivered to the pump and to Table 6 for maximum allowable inlet pressure 4 9 2 Operation at high temperatures Temperature sensors within the pump mechanism and electronics are monitored by an internal system If the system detects that any internal temperatures are too high the power supplied to the pump motor is reduced the pump ...

Страница 72: ... ultimate vacuum in the shortest possible time Heating the pump will also prevent condensation of vapours inside the pump The Edwards BX bakeout band may be used to heat the pump refer to Section 7 4 Fit the appropriate band around the pump just below the CF inlet flange When baking the pump or the system make sure that the temperature of the inlet flange does not exceed the values specified in Ta...

Страница 73: ...p will ramp up to its designated speed as quickly as possible If the timer period expires the controller will go into fail condition and will display flashing error code 3 As above when the power is reinstated the pump will not ramp up until the error is cleared To clear the error send a stop command either parallel or serial depending on the control mode then send a start command to ramp the pump...

Страница 74: ...B800 00 880 Issue D Page 66 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 75: ... rotors is typically 40 000 to 50 000 cycles As a precautionary measure Edwards recommends that pumps are returned for a major service rotor replacement after 20 000 cycles of acceleration to full speed and back to a stop or after ten years of use whichever occurs first 5 4 Clean the external surfaces of the pump WARNING When removing the pump ensure personal protective equipment is used to safegu...

Страница 76: ...causes of faults and the recommended actions to rectify faults Table 25 Fault finding Symptom Check Action The controller LEDs do not flash for 0 5 seconds when system switched on Has the electrical supply failed Ensure that the electrical supply is switched on and the fuses and current limiting devices have not been tripped Is the pump impeller rotating LEDs may not flash if pump is rotating The ...

Страница 77: ...f the interstage inlet pressure is too high inlet pressure at the turbomolecular inlet is increased ensure that the interstage inlet pressure is 0 5 mbar 50 Pa Is the backing pressure 10 mbar 1x103 Pa If so the backing pressure may be too high Check for backing pipeline leaks If the throughput is high a larger backing pump may be required Is the high vacuum area of the system contaminated If so cl...

Страница 78: ...rking Check the serial enable line is inactive Must be disconnected or driven high for use of standby and fail lines Check slide switch is in the correct position for the RS232 or RS485 communication Left for RS485 Right for RS232 Right for parallel control and monitoring Yellow service LED is flashing a repeated sequence See flashing service codes in Section 5 5 1 The red alarm LED is on Normal d...

Страница 79: ...ervice status word each bit is numbered starting with 0 for the least significant to 31 for the most significant as shown in Section 5 5 3 The meaning of each bit in the service status word is given in Table 27 Table 26 Flashing service codes Service flash code Comments Actions LED on 1sec LED off 1sec Oil cartridge service recommended It is recommended that the oil cartridge is replaced Refer to ...

Страница 80: ...nded service time of the impeller in the nEXT pump can be monitored by sending the following query The reply will be as follows where the first number is the hours run by the impeller and the second is the number of hours until service is recommended 5 5 5 Pump cycles The number of start stop cycles completed and the number remaining until the next service is due can be monitored by sending the fo...

Страница 81: ...D is flashing identify the error flash code and consult Table 28 There is a sufficient off period between each subsequent cycle repetition to clearly mark the start of a new flash sequence The duration of a long flash L is equal to 3 times the duration of a short flash 0 5 s Command V 8 8 5 cr Reply V 8 8 5 sp d d d d d d d d d d d d cr Command V 8 8 6 cr Reply V 8 8 6 sp d d d d d d d d d d d d c...

Страница 82: ...rotational speed in revolutions per second Hz The system status word returned is made up of 8 hexadecimal digits To decode this word convert each digit into a 4 digit binary number Table 29 is provided as an aid Follow the example below 5 ssssLs Pump internal measurement system disconnected or damaged Cycle the power to the pump and see whether the error code appears again If it does contact the s...

Страница 83: ... 1 4 1 3 1 2 1 1 1 0 9 8 7 6 5 4 3 2 1 0 Table 30 Status flag Bit number Status flag Active flags means 0 Fail Fail status condition active 1 Stopped speed Below stopped speed 2 Normal speed Above normal speed 3 Vent valve closed Vent valve energised 4 Start Start command active 5 Serial enable Serial enable active 6 Standby Standby active 7 Half full speed Above 50 full rotational speed 8 Paralle...

Страница 84: ...e as follows where string1 is the boot loader software version number Table 31 Example decoding of system status words Bit number Status of bit in example We can deduce 0 0 The pump has not failed 1 1 The pump is at rest 2 0 Speed is below normal speed 3 0 The vent valve is open 4 0 There is no active start command 5 1 Serial enable is active 6 0 Standby is not active 7 0 Speed is below 50 of full...

Страница 85: ...described in Section 3 4 Keep the pump upright at all times to prevent the drainage of oil from the bearing reservoir 5 Avoid long term storage if possible When long term storage is necessary the pump should be set up and run for at least eight hours every six months 6 2 Disposal Dispose of the nEXT pump and any components and accessories safely in accordance with all local and national safety and...

Страница 86: ...B800 00 880 Issue D Page 78 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 87: ...s to support on site maintenance service or repair of your equipment For more information about service options contact the nearest Edwards Service Centre or other Edwards company 7 2 1 Returning a pump for service If returning a pump to a Service Centre use the returns procedure included at the end of this manual The instruction in the returns procedure to drain all fluids does not apply to the l...

Страница 88: ...s of replacement seals are given in Table 36 Table 33 Service kits Service kit Item number Oil cartridge B800 00 811 Bearing and oil cartridge B800 00 810 Table 34 Inlet screens Flange Size Inlet Screen Item Number DN100CF Coarse inlet screen B800 00 821 DN100CF Fine inlet screen B800 00 822 DN160CF Coarse inlet screen B800 00 823 DN160CF Fine inlet screen B800 00 824 Table 35 Inlet strainers Flan...

Страница 89: ...oler An ACX air cooler can be fitted to the nEXT pump refer to Section 3 10 to check the suitability of air cooling in a particular application 7 4 3 WCX water cooler A water cooler can be fitted to the nEXT pump refer to Section 2 5 to check the suitability of the cooling water supply Table 37 NW16 and NW25 ports Port Item Number NW25 B800 00 809 NW16 B800 00 806 Table 38 ACX air cooler Air Coole...

Страница 90: ...cuum systems TAV6 has a higher conductance and is suitable for larger vacuum systems typically with volume greater than 10 litres 7 4 6 VRX vent restrictor Use a VRX fixed orifice vent restrictor to restrict flow of vent gas into the pump A VRX vent restrictor can be fitted to the inlet of a TAV5 or TAV6 vent valve or to a PRX10 purge restrictor Refer to Table 20 for information on the selection o...

Страница 91: ...ed with a C clamp connection The following tool kit and parts are available 7 4 10 Interface Cable An interface cable connects the nEXT pump to a PC Serial commands are then used to control and monitor the nEXT pump 7 4 11 TIC PC Program The TIC PC program is a piece of PC based software that can be used fore retrieving and setting the user configurable parameters in the pump It also enables monit...

Страница 92: ...ghts reserved Edwards and the Edwards logo are trademarks of Edwards Limited Service spares and accessories Figure 20 nEXT exploded accessories view 1 BX 250 bake out band DN100CF envelope shown 2 BX 250 bake out band position 3 WCX water cooling accessory ...

Страница 93: ...imited Service spares and accessories B800 00 880 Issue D Figure 21 nEXT exploded accessories view 1 DN10NW adaptor 2 VRX vent restrictor 3 Manual vent valve fitted 4 TAV solenoid vent valve 5 Purge plug fitted 6 PRX purge restrictor 7 DN10NW adaptor 8 ACX nEXT air cooler radial 9 ACX nEXT air cooler axial ...

Страница 94: ...B800 00 880 Issue D Page 86 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

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