Edwards iH1000, Инструкция по эксплуатации

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A590-00-880 Issue D
Page 8 © Edwards Limited 2008. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
Table 1 - Technical data iH160 and iH1800
Type Characteristics iH160 iH1800 Units
General Dimensions (L (to exhaust enclosure)
x W x H (to inverter))
*
*
Refer to Web for installation drawings.
776 (909) x 390
x 529 (783)
986 (1059) x 470
x 888 (1094)
mm
Mass (excluding packaging) 244 502 kg
Noise level (ultimate) <64 <69 dB(A)
Vibration level at inlet <1.8 <1.8 mm s
-1
Initial force to push the pump 8 25 kg
Sustained force to push the pump 5 10 kg
Earth leakage < 3.8 < 6.8 mA
Warm up time to nominal pumping
performance 15 15 minutes
Minimum warm up time to process
gas pumping 4 4 hours
Performance
50 Hz / 60 Hz Typical peak pumping speed 165 1800 m
3
h
-1
Ultimate (shaft seal purge only) 1x10
-2
1x10
-3
mbar
Maximum inlet pressure Atmospheric Atmospheric
Maximum operating time at
maximum inlet pressure Continuous Continuous hour
Water cooling
system Minimum flow rate required 2 4 l min
-1
Typical heat removed from the
system 2.5 3.2 kW
Connections Pump inlet flange (bolted) ISO63 ISO160
Exhaust gas outlet NW40 NW40
Extraction port 105 50 mm dia
Table 2 - Technical data
Type Characteristics All HTX only Units
Gas system Nitrogen supply pressure range 1.4 to 6.9 3.8 to 6.9 bar gauge
Stability of supply +/-2.4 +/-2.4 bar gauge
Nitrogen supply quality < 0.01 < 0.01 µm
Nitrogen flow rate 44 76 slm
Gas module pressure range 1 1 bar gauge
Pressure transducer accuracy +/-0.0041 at 0.4 +/-0.0041 at 0.4 bar gauge