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A590-00-880

Issue D Original

Instruction Manual

iH Dry Pumping Systems

Description

Item Number

iH80

A590-00-xxx

iH160

A590-10-xxx

iH160HTX

A590-12-xxx

iH600

A590-20-xxx

iH1000

A590-30-xxx

iH1800

A590-40-xxx

iH1800HTX

A590-42-xxx

iH1800NRV

A590-50-xxx

iH1800NRV HTX

A590-52-xxx

Where xxx is as follows:
460 V, 60 Hz, 3 phase

908

200/208 V, 50/60 Hz, 3 phase

945

380/415 V, 50 Hz, 3 phase

946

230 V, 60 Hz, 3 phase

957

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Содержание iH1000

Страница 1: ...00 xxx iH160 A590 10 xxx iH160HTX A590 12 xxx iH600 A590 20 xxx iH1000 A590 30 xxx iH1800 A590 40 xxx iH1800HTX A590 42 xxx iH1800NRV A590 50 xxx iH1800NRV HTX A590 52 xxx Where xxx is as follows 460...

Страница 2: ...conformity with the following standard s or other normative document s EN1012 2 1996 A1 2009 Compressors and Vacuum Pumps Safety Requirements Vacuum Pumps EN61010 1 2001 Safety Requirements for Electr...

Страница 3: ......

Страница 4: ...This page has been intentionally left blank...

Страница 5: ...materials 17 3 6 2 Gas purges 18 3 7 Leak test the system 18 3 8 Electrical supply 18 3 8 1 Reconfigure the iH system for your electrical supply if necessary 19 3 8 2 Reconfigure the iH system for you...

Страница 6: ...of pump 5 6 The front panel controls 5 7 Centre of gravity and levelling foot loads 10 8 System arrangement to reduce effective footprint if required 14 9 Reconfigure the iH system for your electrical...

Страница 7: ...e instructions The use of WARNINGS and CAUTIONS is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment and or...

Страница 8: ...by contacting Edwards 1 2 Applications If you use the iH system on an application for which it is not suitable refer to Figure 1 you may invalidate your warranties If in doubt contact Edwards who will...

Страница 9: ...d exhaust purge 1 3 2 The iH NRV systems For Flat Panel Display processes 1 4 Priority of control The system can be controlled by a number of modules the Pump Display Terminal PDT from the tool throug...

Страница 10: ...4 Seismic bracket 4 off 5 RF earth ground stud M6 6 Cooling water return connection 7 Levelling feet 4 off 8 Nitrogen purge port 9 Castor 4 off 10 Exhaust enclosure 11 Active gauge connection 12 iTIM...

Страница 11: ...p Figure 6 The front panel controls 1 Inverter 2 Extraction port 3 Lifting eyebolts 2 off 4 RF earth ground cable iH160 1000 1800 only 5 Pumped gas inlet connection 6 Leak test port combination 7 Leak...

Страница 12: ...A590 00 880 Issue D Page 6 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 13: ...ial force to push the pump 8 16 20 kg Sustained force to push the pump 5 7 8 kg Earth leakage 1 1 1 1 3 mA Warm up time to nominal pumping performance 15 15 15 minutes Minimum warm up time to process...

Страница 14: ...imum warm up time to process gas pumping 4 4 hours Performance 50 Hz 60 Hz Typical peak pumping speed 165 1800 m3 h 1 Ultimate shaft seal purge only 1x10 2 1x10 3 mbar Maximum inlet pressure Atmospher...

Страница 15: ...Max power input to both motors kW 6 51 7 8 7 8 iH1800 HCDP Full load Amp 14 4 14 9 14 4 Motor rating kW 2 9 3 5 3 5 HCMB Full load Amp 14 4 14 9 14 4 Motor rating kW 2 9 3 5 3 5 Max power input to bot...

Страница 16: ...7 Centre of gravity and levelling foot loads Table 4 Centre of gravity and levelling foot loads Refer to Figure 7 iH80 iH600 iH1000 iH160 iH1800 Centre of gravity A 661 661 661 661 661 B 322 309 314 3...

Страница 17: ...twork LON communications connector XLR type 4 way plug 24 V d c 0 75 A Exhaust gas management interface DIN type 6 pin plug 1 normally open and 3 common 30 V a c 1 A 2 normally open and 4 normally clo...

Страница 18: ...erature range 10 30 C Typical pressure differential across supply and return With cooling water supply temperature of 20 C and flow rate of 3 l min 1 15 psig Water type Treated or non corrosive indust...

Страница 19: ...tem from the electrical supply so that they cannot be operated accidentally z Electrical nitrogen and water supplies are all potentially hazardous energy sources Before carrying out any maintenance th...

Страница 20: ...ncern suitable vibration isolators not supplied should be fitted between the docking points and the bolt or stud if doing this the levelling feet will need to be removed 4 If preferred the lifting eye...

Страница 21: ...e HCDP pump and the HMB pump are correct If a pump oil level is incorrect pump performance may be affected and the pump may be damaged The iH system is given a charge of oil before it leaves the facto...

Страница 22: ...ressure z On very dusty applications use a low impedance inlet filter to minimise damage to the pump z The exhaust pipelines should be suitable for 150 C for HTX systems 1 Remove the temporary cover o...

Страница 23: ...equipment you must z Not allow air to enter the equipment z Ensure that the system is leak tight z Ensure that pumped gases do not enter their flammable range This can be achieved by diluting flammabl...

Страница 24: ...ak test the system Note If you need further information on leak testing look it up on the Web using URL at the start of manual or contact your supplier or Edwards for advice Refer to Figure 5 items 6...

Страница 25: ...ecure with the two screws 2 3 8 2 Reconfigure the iH system for your electrical supply iH80 600 only If you want to use an iH80 or iH600 system with a different electrical supply use the following pro...

Страница 26: ...ll rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Installation Figure 9 Reconfigure the iH system for your electrical supply 1 Cover 2 Screw 2 off 3 Electrics box 4 Com...

Страница 27: ...ed for use in domestic buildings or in properties directly connected to an electrical supply network which also supplies domestic buildings CAUTION Do not connect voltages greater than specified in Ta...

Страница 28: ...dentally dragged and the strain relief bush on the electrical supply connector mating half fails the earth ground conductor will be the last conductor to be pulled from the connector 1 Refer to Figure...

Страница 29: ...earth ground stud Figure 3 item 5 You must use a suitable low impedance cable for example use braided cable 3 10 Connect to your emergency stop circuit Note If you do not connect to your own control e...

Страница 30: ...ooling water outlet Figure 3 item 6 and connect your water supply hose to the cooling water inlet Figure 3 item 3 4 Turn on the cooling water supply 5 Inspect the water hoses pipelines and connections...

Страница 31: ...s or refer to the Web 8 Look at the pressure gauge in your inlet pipeline z If the pressure is increasing the HCDP pump motor terminal box and or if you have an iH160 1000 or 1800 system the HMB pump...

Страница 32: ...sage will be shown on the Pump Display Terminal if fitted and will be sent to the Interface Module s connected to the iH system Ensure that your installation is configured so that it remains safe if t...

Страница 33: ...e PDT or the IM iTIM and IM operation 4 Use your control equipment to set the pump start stop signal to the interface connector and check that the Running LED is illuminated z Control must be taken wi...

Страница 34: ...e interface connector The Running LED Figure 6 item 2 will then go off and the pump running status output signal will open PDT operation CAUTION If you stop the pump without the nitrogen purge cycle i...

Страница 35: ...ers 810 and 812 z HMB PHASE IMBALANCE error number 1012 On an iH160 1000 or 1800 system the following alarms will cause only the HMB pump to shut down whether run til crash is selected or not z HMB CU...

Страница 36: ...CTIVATED If connected z The Running LED will go off z The Alarm LED illuminates 4 7 Restart the pump after an emergency stop or automatic shut down Note If the iH system has automatically shut down be...

Страница 37: ...leshooting inside electrical enclosures These enclosures contain hazardous voltages and are not operator areas WARNING Leak test the system after maintenance and seal any leaks found to prevent leakag...

Страница 38: ...etails The iH system requires little user maintenance Safety sensors fitted to the iH system do not require routine maintenance The maintenance operations you can carry out are described in the follow...

Страница 39: ...5 If necessary disconnect the iH air extraction port from your factory extraction system 6 If necessary disconnect any accessories from the iH system 7 Adjust the levelling feet so that the iH system...

Страница 40: ...ating in the fuse holder Refer to Table 6 for the fuse ratings Refit the fuse holder in the Electrics Box then use a flat bladed screwdriver to turn the fuse holder clockwise by a 1 4 of a turn to sec...

Страница 41: ...scribed in Section 3 of this manual 6 3 Disposal Edwards products are supported by a world wide network of Edwards Service Centres Each Service Centre offers a wide range of options including disposal...

Страница 42: ...A590 00 880 Issue D Page 36 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 43: ...tor When you order please state for each part required z Model and Item Number of your equipment z Serial number if any z Item Number and description of the part 7 2 Service Edwards products are suppo...

Страница 44: ...USA D372 18 200 Laptop Europe D372 18 300 Laptop UK D372 18 400 Laptop Japan D372 18 500 PCMCIA Laptop D372 17 000 Nitrogen flow switch A532 54 000 IH Disconnect box U20000445 IH Photohelic switch ga...

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