© Edwards Limited 2018. All rights reserved.
Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
B722-40-880 Issue H
1
Introduction
1.1
Scope and definitions
This manual provides installation, operation, maintenance and storage instructions for the Edwards DX Compound
Turbomolecular Pumps. The pumps must be used as specified in this manual. Read this manual before installing and
operating the pumps.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be
obeyed. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and/or process.
The units used throughout this manual conform to the SI international system of units of measurement. When flow
rates are specified, the abbreviation ‘sccm’ is used to mean standard cubic centimetres per minute. This is a flow of
1 cm
3
min
-1
at an ambient temperature of 0 ºC and a pressure of 1013 mbar (1.013 x 10
5
Pa).
The following warning labels may be present on the pump and used throughout the product documentation:
The units used throughout this manual conform to the SI international system of units of measurement; where
appropriate US equivalent units of measurement are also given.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people. The actual symbol shown varies according to the hazard.
Warning
An appropriate safety instruction should be followed.
Warning - Dangerous Voltage
Indicates hazards arising from dangerous voltages.
Warning - hot surfaces
Indicates that the marked item may be hot and should not be touched without taking precautions.
Protective conductor terminal.
Warning - use protective equipment
Indicates that appropriate protective equipment must be used.
