Edwards EXT75DX Скачать руководство пользователя страница 26 | Manualshive

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B722-40-880 Issue H

Page 18

© Edwards Limited 2018. All rights reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Installation

Figure 4 - Typical pumping system with a DX pump

1. Vacuum system
2. High-vacuum gauge
3. Vibration isolator
4. Inlet screen
5. DX pump
6. Backing valve
7. Vacuum gauge
8. Flexible bellows
9. Foreline trap

10. Rotary backing pump
11. Mist filter
12. Vent valve
13. Alternative position for vent valve
14. Air cooler
15. PRX purge restrictor
16. Regulated purge gas supply
17. WCX water cooler and connections

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Содержание EXT75DX

Страница 1: ...X CF63 B722 42 000 EXT75DX NW40 B722 43 000 EXT75DX ISO100 B722 45 000 EXT75DX ISO100 NW25 Backing B722 46 000 EXT75DX ISO63 Reversed B722 48 000 EXT75DXi NW40 B722 35 000 EXT75DXi ISO63 NW16 Intersta...

Страница 2: ...harmonised standards EN 1012 2 1996 A1 2009 Compressors and vacuum pumps Safety requirements Vacuum pumps EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and labor...

Страница 3: ...pumps nXDS 6 10 15 20 EXT pumps EXT75DX XDS pumps XDS35 46 100 Diaphragm XDD 1 D lab Turbo Pump Carts T station nEXPT nEXT station Materials Content Declaration Part name Lead Pb Mercury Hg Cadmium Cd...

Страница 4: ...This page has been intentionally left blank...

Страница 5: ...cification and vent control data 13 2 4 Purge gas specification 14 2 5 Cooling water 14 2 6 Materials exposed to gases pumped 14 2 7 Electrical data 15 2 8 Logic interface connector 15 2 9 Podule conn...

Страница 6: ...ndby speed setting 41 4 1 5 Normal speed setting 41 4 1 6 Timer setting and options 42 4 1 7 Analogue signal options 43 4 1 8 Electronic braking options 43 4 1 9 Factory settings 44 4 1 10 Assigning a...

Страница 7: ...aptor 65 7 4 6 VRX vent restrictor 65 7 4 7 Vent port adaptor 65 7 4 8 PRX purge restrictor 66 7 4 9 Vibration isolators 66 7 4 10 FL20K foreline trap 66 7 4 11 Podule connector plug 66 7 4 12 TIC tur...

Страница 8: ...Ds 18 13 Operating and storage environment 18 14 Checklist of components 19 15 Summary of commands that can be sent to the DX pump 30 16 Command abbreviations 32 17 Error codes 32 18 Vent options 35 1...

Страница 9: ...ment When flow rates are specified the abbreviation sccm is used to mean standard cubic centimetres per minute This is a flow of 1 cm3 min 1 at an ambient temperature of 0 C and a pressure of 1013 mba...

Страница 10: ...ump Note The EXT75DXi with an NW16 interstage port is not supplied with an inlet strainer The DX pumps have a vent port for venting the pump and vacuum system to atmospheric pressure The pump is suppl...

Страница 11: ...4 for factory default settings of the parameters discussed in the following Sections 1 4 1 Power limit setting Select the maximum power that will be drawn by the pump refer to Section 4 1 1 The more p...

Страница 12: ...nfigure the Podule to monitor a different system parameter refer to Section 4 1 7 1 4 5 Automatic vent options An Edwards TAV vent valve can be connected directly to the DX pump s Podule The Podule is...

Страница 13: ...ut for a number of pump parameters The logic interface has been designed to include both serial and parallel modes of control and monitoring operating through one connector The pump can be operated us...

Страница 14: ...ust the configuration settings stored in the Podule or to monitor operational status of the pump Whilst operating in Parallel mode the same controls and monitoring signals are available as described i...

Страница 15: ...losure protection installed EXT75DX and 75DXi NW25 IP50 EXT75DXi NW16 IP50 EXT75iiDX Contact Edwards for details WARNING Vent dangerous gases and gas mixtures safely Do not expose people to these gase...

Страница 16: ...3 If pumping a gas not in the list above contact the supplier for advice If the supplier is not contacted the pump warranty may be invalidated The pump is not suitable for pumping aggressive or corro...

Страница 17: ...onal speed drops below nominal Values for maximum continuous inlet pressure obtained using a RV12 backing pump Refer to Section 3 9 for cooling conditions Nitrogen Water Cooling 40 C ambient Cooling w...

Страница 18: ...it setting 80 W EXT75DX Note Contact Edwards for details on the EXT75DXi and EXT75iiDX variants WARNING Do not exceed the maximum continuous operating pressure Doing so can result in dangerous rotor t...

Страница 19: ...options and the vent valve connection and refer to Section 4 1 3 for configuring the venting options Figure 2 Maximum allowed rate of pressure rise during venting pressure against time with pump init...

Страница 20: ...ification Reference data Purge gas Dry air nitrogen argon or other inert gases Maximum dew point at atmospheric pressure 22 C Maximum size of particulates 1 m Maximum concentration of oil 0 1 parts pe...

Страница 21: ...ven using an Edwards TIC be aware that there are several variants Contact Edwards to determine which is most suitable for the application 2 8 Logic interface connector DX pumps have a 15 way logic int...

Страница 22: ...gure 3 with the polarity of the pins marked when the vent valve fan is energised The podule connector plug is available as an accessory see Section 7 4 Analogue output Output voltage 0 to 10 V d c dir...

Страница 23: ...able standby speed 5 Serial enable Connect to Pin 2 to enable serial interface mode 7 FAIL Serial TX Logic high when fail condition exists in parallel mode 9 Analogue output Positive 0 10 V output pro...

Страница 24: ...ncy of the pump motor At high speeds it appears continuously on The LED switches off when the rotational speed is very low or stopped In a fail condition this LED flashes in a sequence to indicate err...

Страница 25: ...ed in Section 6 1 Do not discard the packing materials retain them to re package the pump if it is returned for service Note An inlet strainer is not available for the NW16 interstage port of the EXT7...

Страница 26: ...ng system with a DX pump 1 Vacuum system 2 High vacuum gauge 3 Vibration isolator 4 Inlet screen 5 DX pump 6 Backing valve 7 Vacuum gauge 8 Flexible bellows 9 Foreline trap 10 Rotary backing pump 11 M...

Страница 27: ...ion of the inlet screen EXT75DX 3 3 2 Mechanical fixing There are two ways in which the DX pumps can be securely fixed The ideal fixing for a DX pump is via its inlet flange to a rigid firmly fixed va...

Страница 28: ...es If necessary fit an inlet vibration isolator between the pump inlet and the vacuum system refer to Section 7 4 In this case fix the base of the pump to a firm support as described in Section 3 3 4...

Страница 29: ...ge gas to the pump remove the plug fitted in the purge port fit a vent port adaptor refer to Section 7 4 and connect the purge gas supply to the vent port adaptor The purge gas must comply with the sp...

Страница 30: ...nnector pins The DX pump can be controlled using a hardware parallel control interface and via commands sent over a serial interface If the DX pump is controlled using the hardware Parallel Interface...

Страница 31: ...th Refer to Table 9 Logic Interface Connector Pins when connecting the electrical supply to the customer connector mating half Figure 6 Logic interface connections parallel mode 3 6 Parallel interface...

Страница 32: ...gate its operational status using a number of commands There is a multi drop mode that allows for communication with more than one DX pump whilst using just one control system 3 7 1 Connect the serial...

Страница 33: ...Serial Stop command 3 7 3 Serial protocol The Serial Interface link is set to 9600 Baud 8 bits 1 stop no parity with no handshaking The commands are made up from printing ASCII characters The maximum...

Страница 34: ...sent The correct structure to use is as follows a valid start character either a character for a store operation or a character for a query operation followed by a command which will be an upper case...

Страница 35: ...y the pump can any commands sent via the Parallel Interface be acted on Similarly if the pump is started using the Start switch on the Parallel Interface the pump cannot then be stopped by sending a S...

Страница 36: ...gs S867 1 Reset all configuration options and parameters to the factory settings PIC software version S868 10 string chars PIC software version number D39647620x Speed control C869 0 1 decimal Set tar...

Страница 37: ...mal characters prefixed by a minus number for negative numbers h hexadecimal ASCII character r Returned error code refer to Table 16 sp space character string may have several ASCII characters X Multi...

Страница 38: ...in multi drop message protocol are detailed below All multi drop commands queries or replies have the first character All commands queries and replies contain a header containing the address of the no...

Страница 39: ...recommends opening the manual vent valve only after the pump speed has fallen to 50 of full rotational speed 3 8 2 TAV5 or TAV6 solenoid vent valve The TAV5 and TAV6 solenoid valves can be purchased a...

Страница 40: ...TIC Refer to the TIC Instruction Manuals for more information 3 8 4 Alternative valve connected to the vacuum system If using another vent valve ensure that a suitable vent restrictor is fitted to th...

Страница 41: ...nal power supply the Edwards TIC Turbo and Instrument Controller the TIC Turbo Controller or by the Podule It cannot be powered by the Podule if a TAV solenoid valve is already connected to the Podule...

Страница 42: ...ng hose clips and make sure that they are tightened securely Alternatively unscrew the riffled hose connectors and remove them from the water cooler and make direct connections to the 1 8 inch BSP fem...

Страница 43: ...3 4 1 Configuring the DX pump using serial commands Refer to Table 14 for a summary of the full set of serial commands Table 12 details the parameter range and factory default for each setting The fo...

Страница 44: ...be in the following format If the character d is 8 then the fan is enabled If it is anything else configure the Podule to run the fan 4 1 3 Controlled venting options If the Podule is used to automat...

Страница 45: ...ed in memory within the DX pump To check what Standby Speed is set send a query as follows The reply will be as follows 4 1 5 Normal speed setting The Normal Speed is a user configurable setting and c...

Страница 46: ...ut period is set send a query as follows The reply will be as follows The Timer is permanently enabled during ramp up however it is optional whether to have it enabled at other times When the pump is...

Страница 47: ...the Electronic Braking feature The pump is supplied with Electronic Braking disabled by default To enable Electronic Braking send the following serial command The reply will be as follows The state of...

Страница 48: ...address can be any decimal number from 1 to 98 The address number 0 is used to disable multi drop mode The address number 99 is reserved as a wild card and is used in the query set up detailed later T...

Страница 49: ...rform these settings refer to the TIC Turbo and Instrument Controller or TIC Turbo Controller Instruction Manuals Note It is not possible to configure the Analogue Output Options using the TIC There i...

Страница 50: ...d to the DX pump 2 Start the backing pump 3 Switch on the power supply to the pump Check that the two LEDs on the Podule light up for approximately 0 5 seconds and then extinguish If the LEDs do not l...

Страница 51: ...here is no open vent valve command but when a stop command is sent to the pump the override is cleared 4 5 2 Start the pump To start the pump send the following command over the serial communications...

Страница 52: ...oth measured in C 4 5 6 Link parameter readings The internal voltage current and motor power of the DX pump can be monitored by sending the following query The reply will be as follows where the first...

Страница 53: ...rotational speed has fallen below 50 otherwise the rate of pressure rise may be too high which could damage the pump In an emergency only open the vent valve quickly to decelerate the pump rotor in th...

Страница 54: ...power supply If higher currents are drawn the voltage of the regenerated power supply may collapse causing the vent valve to open before the speed falls through 50 of full operating speed If the elec...

Страница 55: ...inside the pump The Edwards BX bakeout band may be used to heat the pump refer to Section 7 4 Fit the appropriate band around the pump just below the CF inlet flange When baking the pump or the system...

Страница 56: ...serial depending on the control mode Then send a Start command to ramp the pump up to designated speed Either Parallel or Serial Control Timer enabled Regenerative power maintains all output signals...

Страница 57: ...rotors is typically 40 000 to 50 000 cycles As a precautionary measure Edwards recommends that pumps are returned for a major service rotor replacement after 20 000 cycles of acceleration to full spe...

Страница 58: ...th the pump The pump does not rotate after a serial Start command is sent Check whether the pump returns a reply to the Start command If there is no reply check that the serial communications link is...

Страница 59: ...e high vacuum system Check the rest of the system for leaks and contamination If found repair the leaks and clean the contamination Remove the pump from the system and test the ultimate pressure of th...

Страница 60: ...e reply will be as follows where the first returned number refers to motor rotational speed in revolutions per second Hz Table 23 Flashing error codes Error flash position Error flash code Comments Ac...

Страница 61: ...ns a list of the lower 16 status flags that will be useful for fault finding The upper 16 status flags are reserved by Edwards Binary digits Bit numbers 2 2 8 3 0 0 2 2 0 0 1 0 0 0 1 0 1 0 0 0 0 0 1 1...

Страница 62: ...are trip Over speed or Over current trip activated 14 Thermistor error Pump internal temperature measurement system disconnected or damaged 15 Serial control mode interlock Serial enable has become in...

Страница 63: ...articularly useful for service personnel to determine the model of the pump Send the following query to find out pump type The reply is as follows where String1 is the pump type String2 is the DSP sof...

Страница 64: ...B722 40 880 Issue H Page 56 Edwards Limited 2018 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 65: ...oir 5 Avoid long term storage if possible When long term storage is necessary the pump should be set up and run for at least eight hours every six months 6 2 Disposal Dispose of the DX pump and any co...

Страница 66: ...B722 40 880 Issue H Page 58 Edwards Limited 2018 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 67: ...e or repair of the equipment For more information about service options contact the nearest Service Centre or other Edwards company 7 2 1 Returning a pump for service If returning a pump to a Service...

Страница 68: ...p 7 4 2 ACX air cooler An ACX air cooler can be fitted to the DX pump Refer to Section 3 9 to check the suitability of air cooling in a particular application 7 4 3 WCX water cooler A water cooler can...

Страница 69: ...ctance and is suitable for larger vacuum systems typically with volume greater than 10 litres 7 4 6 VRX vent restrictor Use a VRX fixed orifice vent restrictor to restrict flow of vent gas into the pu...

Страница 70: ...ng from the backing pump and is recommended where the highest system cleanliness is required 7 4 11 Podule connector plug A Podule connector plug can be fitted to the DX pump to drive a TAV vent valve...

Страница 71: ...rable parameters in the pump Figure 10 Installation of optional accessories and spares 1 Vibration isolator 2 Inlet flange seal supplied 3 DX pump 4 TAV vent valve 5 Vent port adaptor 6 VRX vent restr...

Страница 72: ...B722 40 880 Issue H Page 64 Edwards Limited 2018 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

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