Edwards EXT200/200H GCMS, Инструкция по эксплуатации, Страница: 13 / 38

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Technical data
B756-01-880 Issue K
Maximum backing
pressure
***
N
2
12.6 mbar
(1260 Pa)
12.6 mbar
(1260 Pa)
7.3 mbar
(730 Pa)
-
He 7.7 mbar
(770 Pa)
7.7 mbar
(770 Pa)
- -
H
2
2 mbar
(200 Pa)
2 mbar
(200 Pa)
- -
Ar - - 8 mbar
(800 Pa)
Minimum backing pump
displacement 0.6 m
3
h
-1
0.6 m
3
h
-1
0.6 m
3
h
-1
0.6 m
3
h
-1
Maximum continuous
inlet pressure - water-
cooling at 35 °C
†††
No water cooling on
GCMS and ICPMS.
Main inlet 2.5 x
10
-3
mbar
(2.5 x
10
-1
Pa)
2.5 x
10
-3
mbar
(2.5 x
10
-1
Pa)
Side inlet 5 x 10
-3
mbar
(5 x 10
-1
Pa)
5 x 10
-3
mbar
(5 x 10
-1
Pa)
Maximum continuous
inlet pressure - air
cooling at 35 °C ambient
†††
Air cooling is beneficial
to the EXDC controller.
Nitrogen unless
otherwise
Main inlet 3 x 10
-3
mbar
(3 x 10
-1
Pa)
3 x 10
-3
mbar
(3 x 10
-1
Pa)
5 x 10
-3
mbar
(He: 7.5 x 10
-3
mbar)
1 x 10
-2
mbar
(Ar: 5 x 10
-3
mbar)
stated.
Side inlet 9 x 10
-3
mbar
(9 x 10
-1
Pa)
9 x 10
-3
mbar
(9 x 10
-1
Pa)
1.5 x 10
-2
mbar
(He: 5 x 10
-3
mbar)
1 x 10
-2
mbar
(Ar: 5 x 10
-3
mbar)
Operating attitude Vertical and
upright
through to
horizontal
± 2 °
Vertical and
upright
through to
horizontal
± 2 °
Vertical Vertical
Nominal rotational
speed 60000 r min
-1
60000 r min
-1
60000 r min
-1
60000 r min
-1
Standby rotational speed 42000 r min
-1
42000 r min
-1
42000 r min
-1
42000 r min
-1
EXC controller only
Table 4 - Technical data (continued)
Parameter EXT70/200H
EXT200/200H
and Hi
EXT200/200H
GCMS
*
EXT 200/
200H
ICPMS
Notes