Edwards EXT200/200H GCMS Скачать руководство пользователя страница 7 | Manualshive

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Edwards EXT200/200H GCMS Скачать руководство пользователя страница 7

© Edwards Limited 2013. All rights reserved.

Page 1

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

B756-01-880 Issue K

1

Introduction

1.1

Scope and definitions

This manual provides installation, operation, maintenance and storage instructions for the Edwards EXT70/200H and
EXT200/200H Split Flow Compound Molecular Pumps, abbreviated to EXT Split Flow Pump in the remainder of this
manual. The pump must be used as specified in this manual. Read this manual before installing and operating the
pump.

The EXT Split Flow Pumps are designed for use with an Edwards EXDC or EXC Controller. Read the instruction manual
supplied with the controller before attempting to install or operate the equipment. The controller manual contains
details of electrical installation.

Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be
obeyed. The use of WARNINGS and CAUTIONS is defined below.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.

The following warning labels are on the pump:

The units used throughout this manual conform to the SI international system of units of measurement. Also
throughout this manual, wherever flow rates are specified, the abbreviation 'sccm' is used to mean standard
cm

3

min

-1

: this is a flow of 1cm

3

min

-1

at an ambient temperature of 0 °C and a pressure of 1013 mbar (1.013 x 10

5

Pa).

WARNING

Warnings are given where failure to observe the instruction could result in injury or death to
people.

Warning - refer to accompanying documentation.

Warning - risk of electric shock.

Warning - hot surfaces.

Protective Conductor terminal.

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Содержание EXT200/200H GCMS

Страница 1: ...200H B756 03 991 EXT200 200H B756 24 991 EXT200 200H GCMS Reversed Body B756 41 991 EXT200 200H LCMS Reversed Body B756 43 991 24 Volt EXT system comprising Compound Turbomolecular Pump and EXDC160 EX...

Страница 2: ...uipment for measurement Control and laboratory use Part 1 General requirements UL61010 1 2nd Edition Safety requirements for electrical equipment for measurement Control and laboratory use Part 1 Gene...

Страница 3: ...conformity with the provisions of the Machinery Directive 2006 42 EC The machine s is in conformity with the following standard s or other normative document s EN ISO 12100 2 2003 Safety of Machinery...

Страница 4: ...This page intentionally blank...

Страница 5: ...ed separate from the pump 16 3 3 3 Inlet connection and orientation 16 3 3 4 Backing connection 17 3 3 5 Interstage connection Hi pump variants only 18 3 4 Vent options vent valve connection and contr...

Страница 6: ...200H GCMS split flow pump system units in mm 10 3 Dimensions of the EXT 200 200H ICPMS split flow pump system units in mm 11 4 Dimensions of the EXT 200 200H GCMS LCMS reversed body 12 5 A typical vac...

Страница 7: ...s details of electrical installation Important safety information is highlighted as WARNING and CAUTION instructions these instructions must be obeyed The use of WARNINGS and CAUTIONS is defined below...

Страница 8: ...B756 01 880 Issue K Page 2 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 9: ...Ambient operating temperature range 5 C to 40 C Ambient operating humidity range 10 to 90 RH non condensing Maximum operating altitude 2000 m Ambient storage temperature range 30 C to 70 C WARNING Ven...

Страница 10: ...r for advice If the supplier is not contacted the warranty on the pump may be invalidated The pumps are not suitable for pumping aggressive or corrosive gases 2 3 Vent gas specification and vent contr...

Страница 11: ...there is any doubt about the quality of the supply Table 3 Water cooling Quality Mechanically and optically clean with no deposits or turbidity pH value 6 0 to 8 0 Maximum calcium carbonate concentrat...

Страница 12: ...l s 1 190 l s 1 185 l s 1 113 l s 1 Pb 1 mbar 100 Pa H2 130 l s 1 163 l s 1 175 l s 1 102 l s 1 Pb 0 5 mbar 50 Pa Ar 153 l s 1 104 l s 1 Pb 0 2 mbar 20 Pa Side inlet pumping speed N2 155 l s 1 155 l s...

Страница 13: ...mum continuous inlet pressure air cooling at 35 C ambient Air cooling is beneficial to the EXDC controller Nitrogen unless otherwise Main inlet 3 x 10 3 mbar 3 x 10 1 Pa 3 x 10 3 mbar 3 x 10 1 Pa 5 x...

Страница 14: ...pump RV3 RV3 RV3 RV3 The data shown for EXT200 200H GCMS applies to pumps B75640991 B75641991 B75642991 B75643991 and B75644991 This is because these pumps have the same internal components and the da...

Страница 15: ...d component types are exposed to the gases pumped aluminium alloys stainless steels fluoroelastomer and nitrile O rings hydrocarbon lubricant felt rare earth magnets silicon nitride phenolic resin and...

Страница 16: ...erved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data Figure 2 Dimensions of the EXT 200 200H GCMS split flow pump system units in mm 1 8 slots 8 4 mm wide 2 EXDC control...

Страница 17: ...e Edwards logo are trademarks of Edwards Limited Technical data B756 01 880 Issue K Figure 3 Dimensions of the EXT 200 200H ICPMS split flow pump system units in mm 1 8 slots 8 4 mm wide 2 Controller...

Страница 18: ...s and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank Figure 4 Dimensions of the EXT 200 200H GCMS LCMS reversed body 1 Extended vent port adaptor 2 Back...

Страница 19: ...the packaging If the pump is damaged notify the supplier and the carrier in writing within three days state the Item Number of the pump together with the order number and the supplier s invoice numbe...

Страница 20: ...acuum system WARNING Once the pump is removed from the bottom packaging there is a danger of toppling WARNING Install the pump in the vacuum system before connecting the controller to the power supply...

Страница 21: ...should be retained over the pump inlets until the pump is ready to be installed WARNING Do not expose any part of the human body to vacuum as it can cause injury WARNING Care must be taken to avoid fo...

Страница 22: ...if the pump is operational and a manual handling hazard if the pump impeller is stationary Integral mesh centering rings have not been designed to enable the inlet screen to be removed If the inlet sc...

Страница 23: ...may be required if the pump is run at a high inlet pressure The EXT70 200H and EXT200 200H Split Flow Pumps are also suitable for use with diaphragm backing pumps although the effect of higher backin...

Страница 24: ...act Edwards However if the pump is manually vented when it is at full rotational speed and the rate of pressure rise is too high the pump life may be reduced When using the manual vent valve supplied...

Страница 25: ...ction 3 5 regarding exposure to hazardous voltages whilst the pump is still rotating The EXC Controller is designed to allow a pumping system to be configured in a variety of ways from a basic manuall...

Страница 26: ...ing water contains too much calcium carbonate or if it contains particulates which are too large Corrosion of the water cooling circuit may occur if there is too little calcium carbonate and oxygen in...

Страница 27: ...open the vent valve quickly to decelerate the pump rotor in the shortest possible time WARNING Do not operate the pump unless it is connected to the vacuum system The pump rotor rotates at very high...

Страница 28: ...itors the temperature of the EXT Split Flow Pump and the electrical power consumption of the pump If the EXDC Controller detects excessive power consumption or temperature the rotational speed of the...

Страница 29: ...actory reconditioned replacement Alternatively send the pump to an Edwards Service Centre to have the bearings replaced When returning the pump to an Edwards Service Centre use the procedure included...

Страница 30: ...ds recommends the use of non CFC solvents such as isopropanol or ethanol For environmental reasons keep wastage of cleaning solutions and solvents to a minimum 5 5 Fault finding Refer to Table 7 for t...

Страница 31: ...r the supplier Is the EXC Controller first speed indication LED lit If not the EXC Controller is faulty If lit then the EXT Split Flow Pump is faulty Consult Edwards or the supplier The EXC Controller...

Страница 32: ...he gauge or too large a chamber Increase the conductance or reduce the volume Is the interstage inlet pressure 0 2 mbar 20 Pa If the interstage inlet pressure is too high inlet pressure at the turbomo...

Страница 33: ...possible When long term storage is necessary the pump should be set up and run for at least eight hours every six months 6 2 Disposal Dispose of the EXT Split Flow Pump and any components and accesso...

Страница 34: ...B756 01 880 Issue K Page 28 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 35: ...ers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned...

Страница 36: ...DC Drive Module as an alternative to an EXC Controller and pump to controller cable 7 4 3 EXC controllers The Edwards EXC Controllers provide the facilities necessary for operating a pumping system ba...

Страница 37: ...valve is fitted in place of the manual valve or alternatively can be fitted with an adaptor supplied with the valve and be used with any suitable NW10 flanged port on the vacuum system The vent port...

Страница 38: ...w of vent gas into the EXT Split Flow Pump Refer to Section 3 4 for information on the selection of the correct VRX vent restrictor Figure 8 Installation of optional accessories Table 17 VRX vent rest...

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