Edwards EXT200/200H GCMS, Инструкция по эксплуатации, Страница: 12 / 38

B756-01-880 Issue K
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Technical data
Table 4 - Technical data
Parameter EXT70/200H
EXT200/200H
and Hi
EXT200/200H
GCMS
*
EXT 200/
200H
ICPMS
Notes
Mass 9 kg 9 kg (7.5 kg
†
) 9 kg 9 kg mass without controller
Side inlet flange DN100ISO DN100ISO DN100ISO DN100ISO controller
Main inlet flange DN63ISO DN100ISO DN100ISO DN100ISO
Outlet flange DN25NW DN25NW DN25NW DN25NW
Vent port 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP
Interstage port
(optional) DN25NW DN25NW DN25NW DN25NW
Main inlet pumping
speed
N
2
‡**
110 l s
-1
177 l s
-1
155 l s
-1
107 l s
-1
Pb < 5 mbar (500 Pa)
He
‡**
145 l s
-1
190 l s
-1
185 l s
-1
113 l s
-1
Pb < 1 mbar (100 Pa)
H
2
‡**
130 l s
-1
163 l s
-1
175 l s
-1
102 l s
-1
Pb < 0.5 mbar (50 Pa)
Ar
‡**
- - 153 l s
-1
104 l s
-1
Pb < 0.2 mbar (20 Pa)
Side inlet pumping
speed
N
2
‡**
155 l s
-1
155 l s
-1
155 l s
-1
155 l s
-1
Pb < 5 mbar (500 Pa)
He
‡**
131 l s
-1
131 l s
-1
179 l s
-1
187 l s
-1
Pb < 1 mbar (100 Pa)
H
2
‡**
79 l s
-1
79 l s
-1
131 l s
-1
143 l s
-1
Pb < 0.5 mbar (50 Pa)
Ar
‡**
- - 127 l s
-1
148 l s
-
Interstage pumping
speed
N
2
‡
- 8.75 l s
-1
N/A N/A Pb = 5 mbar (500 Pa)
He
‡
- 10.4 l s
-1
N/A N/A Pb = 5 mbar (500 Pa)
P
i
= 5 x 10
-1
mbar (50 Pa)
Compression ratio from
the backing port to the
main inlet
N
2
>5 x 10
7
>5 x 10
7
>5 x 10
7††
>5 x 10
7††
He 1 x 10
6
1 x 10
6
1 x 10
7
2.5 x 10
7
H
2
3.5 x 10
4
3.5 x 10
4
- 5 x 10
5
Ar - - >5 x 10
7‡‡
>5 x 10
7‡‡
Compression ratio from
the side inlet to the
main inlet
N
2
6 x 10
3
6 x 10
3
1 x 10
4
9 x 10
3
He 6 x 10
2
6 x 10
2
1.5 x 10
2
2.5 x 10
2
H
2
2 x 10
1
2 x 10
1
3.3 x 10
1
6 x 10
1
Ar - - 1.7 x 10
4
7 x 10
3