Edwards EXPT, Инструкция по эксплуатации

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Maintenance
B723-00-880 Issue C
5 Maintenance
5.1 Safety
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When you refer to a manual supplied as a Supplementary Publication, you must obey all of the WARNING and
CAUTION instructions in the manual.
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A suitably trained and supervised technician must maintain the EXPT Pumping Station.
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Allow the pumps to cool to a safe temperature before you start maintenance work.
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Check that all the required parts are available and of the correct type before you start work.
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Ensure that the maintenance technician is familiar with the safety procedures which relate to the products
pumped. Wear the appropriate safety-clothing when you come into contact with contaminated components.
Dismantle and clean contaminated components in a fume-cupboard.
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Isolate the EXPT Pumping Station and other components in the system from the electrical supply so that they
cannot be operated accidentally.
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Do not reuse O-rings and Co-Seals if they are damaged.
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Dispose of components, grease and oil safely (refer to Section 6 ).
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Protect sealing-faces from damage.
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Do not touch or inhale the thermal breakdown products of fluoroelastomer seals. These breakdown products
are very dangerous and may be present if the EXPT Pumping Station has been heated to 260 °C and above.
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Leak-test the system after maintenance and seal any leaks found if you have disconnected any vacuum or
exhaust pipeline connections.
5.2 Maintenance plan
The following documents list the minimum maintenance operations necessary to maintain the EXPT Pumping Station
in normal use.
More frequent maintenance may be necessary if the EXPT Pumping Station has been used to pump corrosive or
abrasive gases and vapours. If necessary, adjust the maintenance plan according to your experience.
WARNING
Obey the safety instructions given below and take note of appropriate precautions. If you do not,
you can cause injury to people and damage to equipment.
EXT pumps
Turbomolecular pumps
EXT70H / EXT255H 24 V (B722-20-880)
EXT75DX / EXT255DX (B722-40-880)
Backing pumps
Diaphragm pump
XDD1 (A746-01-885)
Rotary vane pumps E2M0.7 / E2M1.5 (A371-22-880)
RV3 / RV5 / RV8 / RV12 (A652-01-880)
Scroll pumps XDS5 / XDS10 (A726-01-880)