© Edwards Limited 2009. All rights reserved.
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Introduction
B723-00-880 Issue C
Figure 1 - Components of the EXPT pumping station (typical system shown)
11. Earth stud
12. Heater supply (turbomolecular
pump remote use only)
13. Backing line valve
14. Flexible bellows
15. Turbomolecular pump
16. TIC controller
17. Castors (standard on EXPT2 systems)
1. Mains ON/OFF
2. Logic interface
3. Serial communications port
4. Mains input
5. Heater fuse
6. Backing pump fuse
7. TAV vent valve
8. Backing pump
9. Vacuum gauge inputs
10. Backing pump supply