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W601100880_A - Technical data

Dimensions

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Содержание Barocel 7025M

Страница 1: ...W601100880_A Original Instructions Barocel 7025M Gauge INSTRUCTION MANUAL edwardsvacuum com ...

Страница 2: ...s regarding the content So far as is reasonably practicable Edwards has ensured that its products have been designed and constructed so as to be safe and without risks when properly installed and used in accordance with Edwards operating instructions Edwards accepts no liability for loss of profit loss of market or any other indirect or consequential loss whatsoever Product warranty and limitof li...

Страница 3: ...he relevant requirements of harmonised standards EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and laboratory use General requirements EN 60529 1991 A2 2013 Specification for degree of protection provided by enclosures IP code IP code 30 EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements General requirements Class...

Страница 4: ...REACH The product manual provides information and instruction to ensure the safe storage use maintenance and disposal of the product including any substance based requirements Article 33 Declaration This product does not knowingly or intentionally contain Candidate List Substances of Very High Concern above 0 1 ww by article as clarified under the 2015 European Court of Justice ruling in case C 10...

Страница 5: ...anty 8 Technical data 9 Dimensions 11 Analogue measurement signal versus pressure 12 Installation 13 Vacuum connection 13 Electrical connection 15 FCC68 8 pin connector 16 D Sub 9 pin connector 17 Operation 18 To zero the gauge 18 ZERO Adjustment 18 Uninstallation 20 Maintenance and repair 21 Return the equipment for service 21 Disposal 22 Separating the components 22 Contents ...

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Страница 7: ...of Figures Figure 1 Dimensions mm 11 Figure 2 Analogue measurement signal versus pressure 12 Figure 3 Connect the gauge to the system 15 Figure 4 FCC69 8 pin sensor cable 16 Figure 5 D Sub 9 pin sensor cable 17 List of Figures ...

Страница 8: ...e 6 W601100880_A List of Tables Table 1 General 9 Table 2 Output signal 9 Table 3 Gauge identification 9 Table 4 Electrical 9 Table 5 Materials exposed to vacuum 10 Table 6 Environmental 10 List of Tables ...

Страница 9: ...nection with an Edwards TIC controllers or another applicable unit Function The Barocel 7025M gauge has a capacitive sensor element made of aluminium oxide ceramics and electronics which convert the capacitance into a direct current d c voltage output signal The output signal is linear to the measured pressure and independent of the gas type Before using this gauge Make sure that the model is the ...

Страница 10: ...sure all other users are aware of the safety instructions Liability and warranty Edwards accepts no liability and the warranty becomes non applicable if the end user or third parties Ignore the information in this document Use the gauge in a non agreeable manner Make any kind of interventions modifications alterations etc on the gauge Use the gauge with accessories not listed in this instruction m...

Страница 11: ... Relationship voltage pressure Linear Output impedance 10 short circuit proof Loaded impedance 10 k Response time 100 ms Table 3 Gauge identification Gauge identification Resistance 18 k referenced to supply common WARNING HIGH VOLTAGE Risk of electrical shock The gauge can only be connected to power supplies instruments or control devices that comply with the requirements of a grounded Protective...

Страница 12: ...ctor cross sections are required Table 5 Materials exposed to vacuum Materials exposed to vacuum Flange tube Stainless steel AISI 316L Sensor feedthrough Ceramics Al2O3 99 5 Internal volume DN 16 ISO KF 3 7 cm3 8 VCR female 5 1 cm3 Admissible pressure absolute 00 Torr mbar F S 4 bar 100 Torr mbar F S 3 bar 10 Torr mbar F S 2 bar Bursting pressure absolute 6 bar Table 6 Environmental Temperature co...

Страница 13: ...Page 11 W601100880_A Technical data Dimensions Figure 1 Dimensions mm ...

Страница 14: ...ersus pressure p Uout 10 V p F S Conversion Torr to Pascal Torr mbar Source NPL National Physical Laboratory Guide to the Measurement of Pressure and Vacuum ISBN 0904457x 1998 Pa 1 00 1013 25 760 1 3332 101325 760 133 3224 Example Gauge with 10 Torr F S Measurement signal Uout 6 V p 6 V 10 V 10 Torr 0 6 10 Torr 6 Torr ...

Страница 15: ... gases because of system overpressure greater than 2 5 bar causes a hazard KF flange connections with elastomer seals cannot resist such pressures Use O rings with an outer centring ring WARNING HIGH VOLTAGE Risk of electric shock Make sure that the pump and electrical cables are correctly protected against earth ground faults A protective earth ground conductor equivalent or larger than the incom...

Страница 16: ...he gauge in a horizontal to upright position and use a seal with a centring ring and filter to prevent the influx of condensates and particles in the measurement chamber 2 Install the gauge so that the buttons can be accessed with a pin for future adjustments 3 Remove the protective lid and connect the gauge to the vacuum system 4 Keep the protective lid ...

Страница 17: ...e connector case has a direct contact to the cable s shield on its whole circumference Do not connect the other side of the shield Connect the supply common with protective ground directly at the power supply 1 Clamp 2 Seal with centring ring 3 Seal with centring ring and filter 4 Protective lid WARNING HIGH VOLTAGE Risk of electric shock The gauge can only be connected to power supplies instrumen...

Страница 18: ... the housing 16 V over voltage protection FCC68 8 pin connector 1 If a sensor cable is not available one can be made Refer to Figure 4 on page 16 Connect the sensor cable Figure 4 FCC69 8 pin sensor cable 1 Supply 2 Supply common ground 3 Signal output measurement signal 4 Gauge identification or remote zero adjust 5 Signal common 6 N C 7 N C 8 N C case Connector case ...

Страница 19: ...available one can be made Refer to Figure 5 on page 17 Connect the sensor cable Figure 5 D Sub 9 pin sensor cable 1 Signal output measurement signal 2 N C 3 N C 4 Supply 5 N C 6 N C 7 Gauge identification or remote zero adjust 8 Signal common 9 Supply common ground case Connector case ...

Страница 20: ...as to be adjusted on the controller Adjust the zero of the gauge first and then on the controller ZERO Adjustment The zero can be adjusted by The ZERO button on the gauge The digital input Remote Zero Adjust briefly apply the supply voltage to pin 7 of the D Sub connector or to pin 4 of the FCC68 and Binder M12 connector An Edwards vacuum gauge controller To adjust the zero 1 Evacuate the gauge to...

Страница 21: ...ration 2 Briefly press the ZERO button with a pin maximum ø1 1 mm The zero adjustment runs automatically duration 8 seconds Note After zero adjustment the gauge automatically returns to measurement mode 1 Press the pin briefly ...

Страница 22: ...evant regulations and follow the necessary precautions when handling contaminated parts CAUTION IMPACT DAMAGE Risk of damage to equipment The ceramic sensor can be damaged by impacts Do not drop the gauge CAUTION DIRT CONTAMINATION Risk of damage to equipment Dirt and damage will cause the gauge to operate incorrectly When you handle the gauge prevent dirt and damage to the vacuum components CAUTI...

Страница 23: ...of Contamination of Vacuum Equipment and Components Form HS2 The HS2 form tells us if any substances found in the equipment are hazardous which is important for the safety of our employees and all other people involved in the service of your equipment The hazard information also lets us select the correct procedures to service your equipment We provide instructions for completing the form in the D...

Страница 24: ...nents must be separated by material and then recycled WARNING CONTAMINATED PARTS Risk to health and the environment from contaminated parts Before you dispose of the gauge find out if any parts are contaminated Obey the relevant regulations and observe the necessary precautions when handling contaminated parts WARNING ENVIRONMENTAL POLLUTANT Risk to environment from substances or parts The gauge a...

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Страница 28: ...edwardsvacuum com ...

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