EBARA A07V, Инструкция по эксплуатации, Страница: 48 / 69

(34)
6.4 Spare (Maintenance) Parts List
Pump maintenance requires the following parts at customer site.
Table 6.2
1. Standard Consumable
Item Type EC Part No. ETI Part
No.
PFPE oil
FOMBLIN Y-L VAC 25/6
BARRIERTA J100
DEMNUM S-65
KRYTOX VPF 1525
CER01-4002 927009
2. Parts Recommended for Safe Operation
Item Type EC Part No. ETI Part
No.
NW25 CER01-4746 980928
NW40 CER01-4747 980927
O-ring (Viton A)
G55 (For exhaust check
valve) CER01-4402-2 923111
3. Parts Recommended for Quick Maintenance
Item Type EC Part No. ETI Part
No.
Exhaust check valve 32X80L CER01-4402 980083
4. Recommended Spare Parts (not needed for each pump)
Item Type EC Part No. ETI Part
No.
Oil level switch NOR. CLOSE CER90-6515 -----
Water flow sensor 20 L/min CER90-6018 942020
Pump gas flow sensor (seal) 3.4 Pam3/s CER90-6012
N
2
flow sensor 84.4 Pam3/s CER90-6017 -----
T/C bolt T TYPE, M8 CER90-6035 913046
N
2
gas pressure regulator R31-200-C121 CER01-4420 980086
(EC: EBARA CORPORATION; ETI: EBARA TECHNOLOGIES INCORPORATED)
EBARA Corporation