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xi)

 

 

 

7

 

Removal and Transportation................................................................................36

 

8

 

Troubleshooting ....................................................................................................38

 

8.1

 

Troubleshooting (1) Basic Trouble ............................................................38

 

8.2

 

Troubleshooting (2) ALARM .......................................................................39

 

8.3

 

Troubleshooting (3) TRIP ............................................................................41

 

8.4

 

Troubleshooting (4) TRIP [Options] ...........................................................42

 

9

 

Inquiries .................................................................................................................43

 

9.1

 

North America ..............................................................................................43

 

9.2

 

Asia ...............................................................................................................44

 

9.3

 

Europe ..........................................................................................................45

 

 

 
 
 
 
 
 

Appendices 

1.  Material Safety Data Sheet – Vacuum Pump Oil.................................................I 
2. Safety 

Interlocks ..............................................................................................III 

3.  Ebara Dry Pumps and SEMI S2-93A (S2-0200)................................................ V 
4. Leak 

Check 

Procedure ..................................................................................... VI 

5.  Returning pumps for Rebuild in U.S. ............................................................... VII 

 

  

  

 

EBARA 

Corporation 

 

Содержание A07V

Страница 1: ...ION MANUAL MULTI STAGE DRY VACUUM PUMP A70W A70W S A70W C A30W A30W S A30W C A25S A25S S A10S A10S S A07V A07V S Distribute this Instruction Manual to all end user personnel operating the equipment IS...

Страница 2: ...ny portion of this manual without permission Manufacturer reserves the right to discontinue or change any specifications or designs without notice and without incurring obligations All rights reserved...

Страница 3: ...tailed specifications Power Sup Rec Dipswitch S W setting Typical check items Spare Parts Pump Lifting Service Net Add Add Add List Correction Design Change Design Change Add Table Add List Add Note A...

Страница 4: ...ther documents issued by EBARA If you have any questions on pump operation safety or maintenance please do not hesitate to contact EBARA directly Three terms in this manual designate different levels...

Страница 5: ...the human body Work only in locations with an emergency escape route WARNING Do not convert the pump from one process to another without an intervening overhaul Gases or reaction products remaining in...

Страница 6: ...environmental and safety regulations CAUTION Dispose of printed circuit boards containing lithium batteries in strict accord with all applicable local and national environmental regulations CAUTION T...

Страница 7: ...power off and lockout before servicing Hazardous materials warning Applies only when pumping hazardous materials Run the pump only with N2 gas purge before servicing Take adequate measures against dan...

Страница 8: ...i Hazardous weight danger Heavy weight may cause severe injury or death due to overturning or falling pump Keep out from under the lifted pump Raise all adjuster feet fully when moving EBARA Corporati...

Страница 9: ...vii EBARA Corporation...

Страница 10: ...viii EBARA Corporation...

Страница 11: ...ix EBARA Corporation...

Страница 12: ...ecifications 4 4 Installation 16 4 1 Location 16 4 2 Piping 17 4 2 1 Vacuum and Exhaust Piping 17 4 2 2 Cooling Water Piping 17 4 2 3 N2 Gas Piping 19 4 2 4 Ventilation Duct 19 4 3 Electrical Wiring 2...

Страница 13: ...ubleshooting 3 TRIP 41 8 4 Troubleshooting 4 TRIP Options 42 9 Inquiries 43 9 1 North America 43 9 2 Asia 44 9 3 Europe 45 Appendices 1 Material Safety Data Sheet Vacuum Pump Oil I 2 Safety Interlocks...

Страница 14: ...xii Blank page EBARA Corporation...

Страница 15: ...whenever needed 2 Introduction Check the following items on receipt of the pump package Check the nameplate affixed to the outer cover of the pump to confirm that the pump supplied agrees with your o...

Страница 16: ...mulation of reaction byproducts For processes that do not produce corrosion or reaction byproducts the selector valve can stop completely the dilution N2 flow Adjusting the regulation pressure to the...

Страница 17: ...anger is imminent The pump will continue to operate in this condition which enables the operator to complete the wafer cycle before checking the pump The pump will stop automatically and generate a TR...

Страница 18: ...ersons using great caution should move the pump Steel Plate DANGER If when moving a pump it loses balance and starts to tip over do not attempt to stop it Get away from the pump immediately and let it...

Страница 19: ...MPa N2 Gas Approx Flow Rate Dilution 0 Mode 24 27 Pa m3 s 3 4 Pa m3 s 17 22 Pa m3 s 3 4 Pa m3 s Connection d50 mm L50 mm Pressure 196 Pa Duct Ventilation Approx Flow Rate 0 5 m3 min Brand FOMBLIN Y L...

Страница 20: ...s 3 4 Pa m3 s 17 20 Pa m3 s 3 4 Pa m3 s 15 19 Pa m3 s 3 4 Pa m3 s Connection d50 mm L50 mm d50 mm L60 mm Pressure 196 Pa Duct Ventilation Approx Flow Rate 0 5 m3 min Brand FOMBLIN Y L VAC 25 6 BARRIE...

Страница 21: ...7 EBARA Corporation Outline Drawing A70W...

Страница 22: ...8 Outline Drawing A30W EBARA Corporation...

Страница 23: ...9 EBARA Corporation Outline Drawing A25S...

Страница 24: ...10 EBARA Corporation Outline Drawing A10S...

Страница 25: ...11 EBARA Corporation Outline Drawing A07V...

Страница 26: ...0000 10 2 10 1 10 0 10 1 10 2 10 3 10 4 10 5 Pa l min A70W A70W A30W A30W 60Hz 1 10 100 1000 10000 100000 10 2 10 1 10 0 10 1 10 2 10 3 10 4 10 5 Pa l min A70W A70W A30W A30W Figure 3 1 Performance Cu...

Страница 27: ...10000 100000 l min A25S A10S 1 10 2 10 1 10 0 10 1 10 2 10 3 10 4 10 5 Pa 60Hz 1 10 100 1000 10000 100000 10 2 10 1 10 0 10 1 10 2 10 3 10 4 10 5 Pa l min A25S A10S Figure 3 2 Performance Curve A25S A...

Страница 28: ...100 1000 10000 100000 10 2 10 1 10 0 10 1 10 2 10 3 10 4 10 5 Pa l min A07V 60Hz 1 10 100 1000 10000 100000 10 2 10 1 10 0 10 1 10 2 10 3 10 4 10 5 Pa l min A07V Figure 3 3 Performance Curve A07V EBAR...

Страница 29: ...lluting N2 Gas Flow Sensor Selector Valve Pressure Gauge P Regulator Cooling Water Flow Sensor FT3 Water FT2 N2 Gas Motor 1 Main Pump MP Booster Pump BP Connector LCD Controller Motor Starter 2 Motor...

Страница 30: ...caster and a height adjustment foot support the pump base To move the pump raise the four adjustment feet by turning the holding nuts in the counterclockwise direction Figure 4 1 Caster WARNING Be car...

Страница 31: ...do not apply excessive force to align flange faces e EBARA recommends the insertion of a flexible bellows between the piping and the suction and exhaust flanges of the pump f Length of the flexible b...

Страница 32: ...leading to a water leak CAUTION Even if the cooling water flow rate drops the pump will continue to operate until the casing temperature reaches the TRIP limit Select facility water piping rated for a...

Страница 33: ...hot air from the pump enclosure through the ventilating duct port in the top cover Without proper ventilation the temperature inside the cover may rise causing an ALARM The pump does not have a gas l...

Страница 34: ...ct direct to distribution panel wiring terminals or use a twist lock Hubbel type connector Wire the connector for the main power supply 200V AC at 3 phase and 50Hz 200 220V AC at 3 phase and 60Hz See...

Страница 35: ...Apply voltage through pump 2 Apply voltage through equipment 1 2 6 5 0 2 5 Figure 4 5 Control Signal Receptacle As seen from connecting side CAUTION Do not wire vacant pins CAUTION Apply 12V DC power...

Страница 36: ...M Open collector Dry contact Control Connector 3 4 8 9 50 27 26 Inductive load 12 14 Resistance load 11 DC50V Max 50mA DC50V Max 50mA 5 NOTE 1 Insert a diode 100V 1A class when connecting inductive lo...

Страница 37: ...N O Alternate 17 42 BP Current ALARM 6 OUT N O Alternate 18 43 Oil Level ALARM OUT N O Alternate 19 TRIP Collective OUT N C Alternate 44 20 COM of 19 OUT 45 Bearing Temp ALARM 6 OUT N O Alternate 21...

Страница 38: ...sorb the back electromotive force from surge currents 4 4 Operation Mode Set the dipswitches on the control panel in accordance with the conditions Table 4 6 Table 4 6 Dipswitch Settings No Mode Off O...

Страница 39: ...Dilution N2 Flow ALARM when dilution N2 selector valve is open NOTE Select compatible settings for the dilution N2 selector valve and Dipswitch No 7 together Set Dipswitch No 8 ON to start and stop BP...

Страница 40: ...he pipe connections Slowly turn the pressure adjustment knob clockwise to set the pressure gauge pressure to 0 05 MPa Then press the red stopper to lock the knob in position WARNING Supply N2 gas to t...

Страница 41: ...ow rate is 2 7 3 4 Pa m3 s Shaft seal N2 flow rate is not shown on LCD Check that LCD displays no ALARM TRIP signal The motor current is indicated as 00 0 A on LCD When LCD indicates an ALARM TRIP sig...

Страница 42: ...ed LED Orange Figure 5 1 LCD Controller Buttons START Start MP and BP STOP Start of MP and BP DISP SELECT Change LCD indication RESET Reset ALARM and TRIP BUZZER OFF Mute buzzer in ALARM TRIP LED B P...

Страница 43: ...sent number of ALARM TRIP shows 10 second countdown after turning on power Mode selection contains items below UTY Service observation REM Operation switched to remote RUN Remote start signal DIL Dilu...

Страница 44: ...ocess gases WARNING Purge with N2 gas for one 1 hour or more after the pump stops to remove the residual process gas inside the pump CAUTION The pump will remain at a very high temperature even after...

Страница 45: ...n Both MP and BP stop and both RUN LED go out Motor current is indicated as 00 0 A 5 2 2 Remote Distant Operation Start NOTE External signal type must comply with dipswitch settings Input external MP...

Страница 46: ...eration and for a short time after the pump has stopped Avoid contact and keep flammable substances out of reach Do not remove the outer cover during operation NOTE Even after clearing the cause of th...

Страница 47: ...xhaust piping of the pump Before you remove and wash the piping purge with a sufficient volume of N2 gas On systems with an exhaust gas scrubber interrupt N2 purge and close the inlet valve of the scr...

Страница 48: ...G55 For exhaust check valve CER01 4402 2 923111 3 Parts Recommended for Quick Maintenance Item Type EC Part No ETI Part No Exhaust check valve 32X80L CER01 4402 980083 4 Recommended Spare Parts not ne...

Страница 49: ...ETI Part No DANGER HAZARDOUS WEIGHT DANGER CER90 9193 322237 WARNING HAZARDOUS VOLTAGE WARNING CER90 9115 321868 WARNING HIGH TEMPERATURE WARNING CER90 9113 321866 WARNING HAZARDOUS MATERIAL WARNING C...

Страница 50: ...tion and exhaust ports of the pump with a blind flange or similar seal Seal off other process gas connection points such as the differential port with a blind flange Tape the LCD controller face down...

Страница 51: ...any options such as an interface box mounted on the pump To transport an uncrated pump lower the adjustment feet Place a protective cloth around the pump and use protective members between the outer c...

Страница 52: ...lace or overhaul BP start signal is not applied Apply BP start signal BP does not start Instrument failure Replace instruments Adjuster foot is not lowered Properly set all adjuster feet Cover is in c...

Страница 53: ...Shaft seal N2 flow decreases Dilution N2 flow decreases 1 w dilution mode Dilution N2 valve open 2 w o dilution mode Selector valve is open 2 Close the valve Set to standard mode Exhaust pressure rise...

Страница 54: ...es Cooling water decrease Increase water After taking corrective action input RESET signal or push RESET button The pump will not RESET while the cause of the ALARM remains WARNING Interrupt Earth Lea...

Страница 55: ...RIP BP MOTOR NO CURRENT TRIP MP MOTOR NO CURRENT BP motor current value is 0 MP motor current value is 0 Instruments are in failure Replace instruments Starting in ALARM TRIP condition Satisfy all sta...

Страница 56: ...while the cause of the TRIP remains In remote operation mode interrupt external START signal before resetting WARNING Interrupt Earth Leakage Breaker ELB or CB and lock out power before starting on w...

Страница 57: ...INC 1 Western Region CALIFORNIA Headquarters 51 Main Avenue Sacramento CA 95838 U S A Phone 916 920 5451 Fax 916 925 6654 Silicon Valley Operations 45 Plumeria San Jose CA 95134 2103 U S A Phone 408 9...

Страница 58: ...hone 82 2 581 6901 Fax 82 2 581 4211 3 Taiwan EBARA Densan TED No 7 Nan Yuen 2nd Road Chung Li City Tao Yuen Hsien Taiwan Phone 886 3 451 5881 Fax 886 3 452 7904 EBARA Precision Machinery Taiwan Inc E...

Страница 59: ...Branch 3 4 Adam Square Brucefield Industrial Estate Livingston G 8West Lothian EH54 9DE U K Phone 44 1509 460232 Fax 44 1506 460222 2 Germany EBARA Germany GmbH Donaustabe 7 D 63452 Hanau Germany Pho...

Страница 60: ...46 Blank Page EBARA Corporation...

Страница 61: ...LAND VACUUM INDUSTRIES INC Preparer s St Or P O Box 35 HOWARD AVE Preparer s City CHURCHVILLE Preparer s State NY Preparer s Zip Code 14428 MSDS Serial Number BYQMW Ingredients Identity Information Pr...

Страница 62: ...OTHER ABSORBENTS SEND TO DISPOSAL Waste Disposal Method LANDFILL DISPOSE OF IN ACCORDANCE W LOCAL STATE FEDERAL REGULATIONS DESTROY BY USING HIGH TEMPERATURE INCINEATOR DESIGNED TO BURN FLUORINE CONT...

Страница 63: ...III Label Country US Label Emergency Number 716 293 3330 EBARA Corporation...

Страница 64: ...of pumps controls power to the coil of a contactor feeding a distribution panel Activation cuts power to the entire panel Nitrogen Flow Low A flow sensor trips when nitrogen supply to the pump oil bea...

Страница 65: ...break opening the motor starter relay s and shutting down the pump Because vacuum pumps typically operate unattended the interlock does not provide visual and audible alarms Restoration of differentia...

Страница 66: ...xiliary nitrogen in the exhaust ETI offers a hardware only normally open flow switch However the standard configuration is a firmware driven shutdown executing through the pump processor and preservin...

Страница 67: ...for maintenance Check pump down time that is time to go from atmosphere to target pressure of foreline to confirm the absence of gross leaks For vacuum systems and process pump exhaust lines pressuriz...

Страница 68: ...olyethylene bags or equivalent Tag or label equipment stating the possible hazardous material and or the environment in which it was used Obtain an RMA number from the EBARA Service department and pos...

Страница 69: ...IX Blank Page EBARA Corporation...

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