Dwyer Instruments GFM2 Series Скачать руководство пользователя страница 18

Actual Gas

Hexafluoroethane C

2

F

6

(Freon-116)

Hexane C

6

H

14

Hydrogen H

2

-1 (<10-100 L)

Hydrogen H

2

-2 (>10-100 L)

Hydrogen H

2

-3 (>100 L)

Hydrogen Bromide HBr
Hydrogen Chloride HCl
Hydrogen Cyanide HCN
Hydrogen Fluoride HF
Hydrogen Iodide HI
Hydrogen Selenide H

2

Se

Hydrogen Sulfide H

2

S

Iodine Pentafluoride IF

5

Isobutane CH(CH

3

)

3

Isobutylene C

4

H

6

Krypton Kr
Methane CH

4

(<=10 L/min)

Methane CH

4

-1 (>=10 L/min)

Methanol CH

3

Methyl Acetylene C

3

H

4

Methyl Bromide CH

2

Br

Methyl Chloride CH

3

Cl

Methyl Fluoride CH

3

F      

Methyl Mercaptan CH

3

SH

Methyl Trichlorosilane (CH

3

)SiCl

3

Molybdenum Hexafluoride MoF

6

Monoethylamine C

2

H

5

NH

2

Monomethylamine CH

3

NH

2

Neon NE
Nitric Oxide NO
Nitrogen N

2

Nitrogen Dioxide NO

2

Nitrogen Trifluoride NF

3

Nitrosyl Chloride NOCl
Nitrous Oxide N

2

O

Octafluorocyclobutane (Freon-C318) C

4

F

8

Oxygen O

2

Oxygen Difluoride OF

2

Ozone
Pentaborane B

5

H

9

Pentane C

5

H

12

Perchloryl Fluoride ClO

3

F

Perfluoropropane C

3

F

8

Phosgene COCl2

Phosphine PH3

Phosphorous Oxychloride POCl3

Phosphorous Pentafluoride PH5

Phosphorous Trichloride PCl3

Propane C3H8

Propylene C3H6

Silane SiH4

Silicon Tetrachloride SiCl4

Silicon Tetrafluoride SiF4

Sulfur Dioxide SO2

Sulfur Hexafluoride SF6

Sulfuryl Fluoride SO2F2

Tetrafluoroethane (Forane 134A) CF3CH2F

Tetrafluorohydrazine N2F4

Trichlorofluoromethane (Freon-11) CCl3F

Trichlorosilane SiHCl3

1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl2FCClF2

Triisobutyl Aluminum (C4H9)AL

Titanium Tetrachloride TiCl4

Trichloro Ethylene C2HCl3

Trimethylamine (CH3)3N

Tungsten Hexafluoride WF6

Uranium Hexafluoride UF6

Vinyl Bromide CH2CHBr

Vinyl Chloride CH2CHCl

Xenon Xe

Index

68
69
70

71
72
73
74
75
76
77
78
79
80
81
82

83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100
101
102
103
104
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125

126
127
128
129
130
131
132
133
134

K-Factor
Relative to N

2

.2421
.1792
1.0106
1.35
1.9
1.000
1.000
.764
.9998
.9987
.7893
.80
.2492
.27
.2951
1.453
.7175
.75
.5843
.4313
.5835
.6299
.68
.5180
.2499
.2126
.3512
.51
1.46
.990
1.000
.737
.4802
.6134
.7128
.176
.9926
.6337
.446
.2554
.2134
.3950
.174
.4438
.759
.36
.3021
.30
.35
.40
.5982
.284
.3482
.69
.2635
.3883
.5096
.3237
.3287
.3278
.2031

.0608
.2691
.32
.2792
.2541
.1961
.4616
.48
1.44

Cp
(Cal/g)

.1834
.3968
3.419
3.419
3.419
.0861
.1912
.3171
.3479
.0545
.1025
.2397
.1108
.3872
.3701
.0593
.5328
.5328
.3274
.3547
.1106
.1926
.3221
.2459
.164
.1373
.387
.4343
.246
.2328
.2485
.1933
.1797
.1632
.2088
.185
.2193
.1917
.195
.38
.398
.1514
.197
.1394
.2374
.1324
.1610
.1250
.399
.366
.3189
.1270
.1691
.1488
.1592
.1543
.127
.182
.1357
.1380
.161

.508
.120
.163
.3710
.0810
.0888
.1241
.12054
.0378

Density
(g/l)

6.157
3.845
.0899
.0899
.0899
3.610
1.627
1.206
.893
5.707
3.613
1.520
9.90
3.593
2.503
3.739
.715
.715
1.429
1.787
4.236
2.253
1.518
2.146
6.669
9.366
2.011
1.386
.900
1.339
1.25
2.052
3.168
2.920
1.964
8.397
1.427
2.406
2.144
2.816
3.219
4.571
8.388
4.418
1.517
6.843
5.620
6.127
1.967
1.877
1.433
7.580
4.643
2.858
6.516
4.562
4.224
4.64
6.129
6.043
8.36

8.848
8.465
5.95
2.639
13.28
15.70
4.772
2.788
5.858

Page 17

Содержание GFM2 Series

Страница 1: ...thin 2 of actual flow Output Signal Linear 0 to 5 VDC 3000 min load impedance and 4 to 20 mA 500 max loop resistance Relay Rating 1 A 24 VDC Max Particulate Size 5 microns Temperature Limits 32 to 122...

Страница 2: ...ass Flow Meter Installation and Operating Instructions Bulletin F GFM2 DWYER INSTRUMENTS INC Phone 219 879 8000 www dwyer inst com P O BOX 373 MICHIGAN CITY INDIANA 46360 U S A Fax 219 872 9057 e mail...

Страница 3: ...7 6 2 Flow Path Cleaning 7 6 2 1 Restrictor Flow Element RFE 7 6 2 2 GFM2 Models 7 7 Calibration Procedures 8 7 1 Flow Calibration 8 7 2 Gas Flow Calibration of GFM2 Mass Flow Meters 8 7 2 1 Connecti...

Страница 4: ...thorough leak test of the entire system All GFM2 s are checked prior to shipment for leakage within stated limits See specifications in this manual 2 2 Electrical Connections GFM2 is supplied with a 2...

Страница 5: ...nterface or optional Profibus DP interface GFM2 flow meters support various functions including programmable flow totalizer low high or range flow alarm automatic zero adjustment activated via local b...

Страница 6: ...peration of the meter above 110 of maximum calibrated flow may increase recovery time 5 3 GFM2 Parameters Settings 5 3 1 Engineering Units Settings The GFM2 Mass Flow Meter is capable of displaying fl...

Страница 7: ...nitrogen for up to 36 gases are stored in the GFM2 see APPENDIX II In addition provision is made for a user defined conversion factor Conversion factors may be applied to any of the ten gas calibrati...

Страница 8: ...to disassemble the sensor If blockage of the sensor tube is not alleviated by flushing through with cleaning fluids please return meter for servicing 6 2 1 Restrictor Flow Element RFE The Restrictor...

Страница 9: ...s the sensor Average reading must be in the range 120 10 counts If it is not perform Auto Zero procedure see section 5 3 10 Zero Calibration 7 2 3 Gas Linearization Table Adjustment Gas flow calibrati...

Страница 10: ...RS 232 SOFTWARE INTERFACE COMMANDS 8 1 General The standard GFM2 comes with an RS 485 interface For the optional RS 232 interface the start character and two hexadecimal characters for the address mu...

Страница 11: ...command can be used only when absolutely no flow thru the meter and no earlier then 6 minutes after power up It can take several minutes to complete Unit will not respond to other commands when this...

Страница 12: ...R read current totalizer volume W warm up delay S setting status D disable sets K 1 I internal K factor U user specified factor S status FS mL sec mL min mL hr L sec L min L hr m3 sec m3 min m3 hr f3...

Страница 13: ...w measurement LCD display reading does correspond to the correct flow range but 0 5 Vdc output signal does not change always the same reading or around zero LCD display reading and 0 to 5 Vdc output v...

Страница 14: ...nsor temperature is too high MCU temperature is too high overload Fatal Error EEPROM or Auto Zero error Solution Flush clean or disassemble to remove impediments or replace the filter screen see secti...

Страница 15: ...rent Gas Table Number 0 9 Current Units of Measure 0 22 Alarm Mode E Enabled D Disabled Low Flow Alarm Setting FS 0 Disabled High Flow Alarm Setting FS 0 Disabled Flow Alarm Action Delay 0 3600 sec 0...

Страница 16: ...Flow in PFS 0 6 70 0 FS A D Value from Sensor counts Actual Flow in PFS 0 7 80 0 FS A D Value from Sensor counts Actual Flow in PFS 0 8 90 0 FS A D Value from Sensor counts Actual Flow in PFS 0 9 100...

Страница 17: ...n 114 C2Cl2F4 Freon 115 C2ClF5 Freon C318 C4F8 Germane GeH4 Germanium Tetrachloride GeCl4 Helium He 50 L min Helium He 1 50 L min Helium He 2 10 50 L min Index 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16...

Страница 18: ...butyl Aluminum C4H9 AL Titanium Tetrachloride TiCl4 Trichloro Ethylene C2HCl3 Trimethylamine CH3 3N Tungsten Hexafluoride WF6 Uranium Hexafluoride UF6 Vinyl Bromide CH2CHBr Vinyl Chloride CH2CHCl Xeno...

Страница 19: ...APPENDIX IV Component Diagram Top Component Side Bottom Component Side Page 18...

Страница 20: ...s required The Series GFM3 is not field serviceable and should be returned if repair is needed Field repair should not be attempted and may void warranty See 1 3 WARRANTY RETURN Refer to Terms and Con...

Страница 21: ...wyer Instruments Inc Printed in U S A 5 13 FR RA 444052 00 DWYER INSTRUMENTS INC Phone 219 879 8000 www dwyer inst com P O BOX 373 MICHIGAN CITY INDIANA 46360 U S A Fax 219 872 9057 e mail info dwyer...

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