Name
GasIndentifier
FullScaleFlow
StdTemp
StdPressure
StdDensity
CalibrationGas
CalibratedBy
CalibratedAt
DateCalibrated
DateCalibrationDue
K_N2
K_F1
K_F1
SensorTbl[0][Sensor Value]
SensorTbl[0][Flow]
SensorTbl[1][Sensor Value]
SensorTbl[1][Flow]
SensorTbl[2][Sensor Value]
SensorTbl[2][Flow]
SensorTbl[3][Sensor Value]
SensorTbl[3][Flow]
SensorTbl[4][Sensor Value]
SensorTbl[4][Flow]
SensorTbl[5][Sensor Value]
SensorTbl[5][Flow]
SensorTbl[6][Sensor Value]
SensorTbl[6][Flow]
SensorTbl[7][Sensor Value]
SensorTbl[7][Flow]
SensorTbl[8][Sensor Value]
SensorTbl[8][Flow]
SensorTbl[9][Sensor Value]
SensorTbl[9][Flow]
SensorTbl[10][Sensor Value]
SensorTbl[10][Flow]
Index
100
101
102
103
104
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125
126
127
128
129
130
131
132
133
134
Data Type
char[20]
float
float
float
float
char[20]
char[20]
char[20]
char[12]
char[12]
float
float
float
uint
float
uint
float
uint
float
uint
float
uint
float
uint
float
uint
float
uint
float
uint
float
uint
float
uint
float
Notes
Name of Gas [If not calibrated = ‘Uncalibrated’]
Full Scale Range in l/min
Standard Temperature
Standard Pressure
Gas Standard Density
Name of Gas used for Calibration
[If not calibrated = ‘Uncalibrated’]
Name of person who performed actual calibration
Name of Calibration Facility
Calibration Date
Date Calibration Due
Gas Parameters: K-factor relative to N2
Reserved
Reserved
Index 0: Must be 120 (zero value) Do not Alter!
Index 0: Must be 0.0 (zero PFS) Do not Alter!
10.0% FS A/D Value from Sensor [counts]
Actual Flow in PFS [0.1]
20.0% FS A/D Value from Sensor [counts]
Actual Flow in PFS [0.2]
30.0% FS A/D Value from Sensor [counts]
Actual Flow in PFS [0.3]
40.0% FS A/D Value from Sensor [counts]
Actual Flow in PFS [0.4]
50.0% FS A/D Value from Sensor [counts]
Actual Flow in PFS [0.5]
60.0% FS A/D Value from Sensor [counts]
Actual Flow in PFS [0.6]
70.0% FS A/D Value from Sensor [counts]
Actual Flow in PFS [0.7]
80.0% FS A/D Value from Sensor [counts]
Actual Flow in PFS [0.8]
90.0% FS A/D Value from Sensor [counts]
Actual Flow in PFS [0.9]
100.0% FS A/D Value from Sensor [counts]
Flow in PFS. Should be 1.0. Do not Alter!
Calibration Table
Gas Dependent Variables
Note:
Values will be available for selected gas only.
APPENDIX II - Internal “K” Factors
Actual Gas
Acetylene C
2
H
2
Air
Allene (Propadiene) C
3
H
4
Ammonia NH
3
Argon Ar
Arsine AsH
3
Boron Trichloride BCl
3
Boron Trifluoride BF
3
Bromine Br
2
Boron Trobromide Br
3
Bromine PentaTrifluoride BrF
5
Bromine Trifluoride BrF
3
Bromotrifluoromethane CBrF
3
1,3 - Butadiene C
4
H
6
Butane C
4
H
10
1 - Butene C
4
H
8
2 - Butene C
4
H
8
CIS
2 - Butene C
4
H
8
TRANS
Carbon Dioxide CO
2
Carbon Disulfide CS
2
Carbon Monoxide C
0
Carbon Tetrachloride CCl
4
Carbon Tetrafluoride (Freon-14) CF
4
Carbonyl Fluoride COF
2
Carbonyl Sulfide COS
Chlorine Cl
2
Chlorine Trifluoride CIF
3
Chlorodifluoromethane (Freon-22) CHCIF
2
Chloroform CHCl
2
Chloropentafluoroethane (Freon-115) C
2
CIF
2
Chlorotrifluromethane (Freon-13) CCIF
3
Cyanogen C
2
N
2
Helium He
Hydrogen H
2
Hydrogen H
2
(> 100 L/min)
Oxygen O
2
Index
0
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
K-Factor
Relative to N
2
.5829
1.0000
.4346
.7310
1.4573
.6735
.4089
.5082
.8083
.38
.26
.3855
.3697
.3224
.2631
.2994
.324
.291
.7382
.6026
1.00
.31
.42
.5428
.6606
.86
.4016
.4589
.3912
.2418
.3834
.61
1.454
1.0106
1.92
.9926
Cp
(Cal/g)
.4036
.240
.352
.492
.1244
.1167
.1279
.1778
.0539
.0674
.1369
.1161
.1113
.3514
.4007
.3648
.336
.374
.2016
.1428
.2488
.1655
.1654
.1710
.1651
.114
.1650
.1544
.1309
.164
.153
.2613
1.241
3.419
3.419
.2193
Density
(g/l)
1.162
1.293
1.787
.760
1.782
3.478
5.227
3.025
7.130
11.18
7.803
6.108
6.644
2.413
2.593
2.503
2.503
2.503
1.964
3.397
1.250
6.860
3.926
2.945
2.680
3.163
4.125
5.326
5.326
6.892
4.660
3.322
.1786
.0899
.0899
1.427
Page 15
K-factors at best are only an approximation. K factors should not be used in applications that require accuracy better than ±5 to 10%.
NOTICE