Dwyer Instruments GFM2 Series Скачать руководство пользователя страница 1

323

Mass Flowmeters/

Controllers

FLOW

GAS MASS FLOW METER

±1% FS, Programmable Relays

The 

SERIES GFM2

 Gas Mass Flow Meters

 

is an ideal choice for the measurement of 

flow rates of a wide variety of gases. Unit can be calibrated for a variety of gases with 

user selectable 0 to 5 VDC or 4 to 20 mA and two relay outputs and programmable 

totalizer that indicates total gas quantity.

FEATURES/BENEFITS

•  Utilizes a straight tube sensor with a restrictor flow element to provide a high ±1% FS 

  accuracy and ±0.25% FS repeatability

•  Gas flow can be displayed in 23 different engineering units on an optional 2x16 

  character LCD display with internal conversion factors for up to 32 gases

•  Digital RS-232 or RS-485 interfaces allow for easy communication and for multi-drop 

  capability of up to 256 units (RS-485 only)

•  User-friendly interface allows for the programming of high and low gas flow alarms, 

  along with two user-programmable electromechanical SPDT relays with latch options

•  Stores calibration information for up to 10 different gases, internal or user-specific 

  K-factors

•  Automatic sensor zero offset adjustment (via digital interface or local push button)

•  NIST traceable certificate included

•  Self-diagnostic tests

APPLICATIONS

•  Gas flow measurement

•  Gas flow control

•  Operating pumps and valves

•  Process equipment

•  Vacuum processes

•  Glass and metal coating

•  Film deposition

PROCESS CONNECTION

[COMPRESSION FITTINGS ATTACHED]

4-29/64

[112.97]

3-5/32 [80.16]

1-1/8

[28.70]

5-5/16 [134.88]

SPECIFICATIONS

Service: 

Clean gases compatible with wetted parts.

Wetted Materials: 

GFM2-X-X-A: Anodized aluminum, brass, 316 SS 

fluoroelastomer O-rings; GFM2-X-X-S: 316 SS, and fluoroelastomer O-rings; 

Buna-N, EPR and PTFE O-rings optional.

Accuracy: 

±1% FS.

Repeatability: 

±0.25% FS.

Response Time: 

2 seconds to within ±2% of actual flow.

Output Signal: 

Linear 0 to 5 VDC (3000 Ω min. load impedance) and 4 to 20 mA 

(500 Ω max. loop resistance).

Relay Rating: 

1 A @ 24 VDC.

Max. Particulate Size: 

5 microns. 

Temperature Limits: 

32 to 122°F (0 to 50°C).

Power Supply: 

11 to 26 VDC. 

Process Connections: 

1/8˝ compression fitting for flow rates ≤ 10 L/min; 1/4˝ for ≤ 

50 L/min; 3/8˝ for ≤ 100 L/min. 

Display: 

2 x 16 character LCD (optional).

Pressure Limits: 

500 psig (34.5 bar).

Leak Integrity: 

1 x 10

-9

 smL/sec of helium. 

Weight: 

1.05 lb (0.48 kg).

FLOW RANGES

ml/min

l/min

10

20

50

100

200

500

1000

2

5

10

20

30

40

50

60

80

100

Note:

 Specify flow 

range at time of order

MAXIMUM FLOW RANGE (l/min)

Body Size AIR AR C

2

H

2

C

3

H

8

C

4

H

10

CH

4

CO

010

050

100

10

50

100

10

50

100

5

20

50

2

10

30

2

5

20

5

30

60

10

50

100

MAXIMUM FLOW RANGE (l/min)

Body Size CO

2

HE H

2

N

2

NH

3

O

2

SO

2

010

050

100

5

30

60

10

50

100

10

50

100

10

50

100

5

30

60

10

50

100

5

30

60

SERIES GFM2

®

DWYER INSTRUMENTS, INC.   |   www.dwyer-inst.com

USA: California Proposition 65

WARNING: Cancer and Reproductive Harm - www.P65Warnings.ca.gov

ACCESSORIES

Model

Description

A-110NA12

110 VAC power supply, 12 VDC with 

communication interface branch

MODEL CHART

Example GFM2 -AIR

-010 -A -V -A -N -A -2 GFM2-AIR-010-A-V-A-N-A-2

Series

GFM2

Gas mass flow meter

Specialty

Gas & 

K-Factor

AIR

AR

C2H2

C3H8

C4H10

CH4

CO

CO2

HF

HE

H2

N2

NH3

O2

SO2

Air 1.0000

Argon 1.4573

Acetylene 0.5829

Propane 0.3500

Butane 0.2631

Methane 0.7175

Carbon monoxide 1.0000

Carbon dioxide 0.7382

Hydrogen fluoride 0.9998

Helium 1.4540

Hydrogen 1.0106

Nitrogen 1.0000

Ammonia 0.7310

Oxygen 0.9926

Sulfur dioxide 0.6900

Body

Size

010

050

100

Low flow

Medium flow

High flow

Body

Material

A

S

Aluminum

Stainless steel:  Body size = 010

 

Body size = 050

 

Body size = 100

Seal

Material

V

B

E

T

Fluoroelastomer

Buna-N

EPR

PTFE

Fittings

A

B

D

1/4˝ compression (low)

1/8˝ compression (medium)

3/8˝ compression (high)

Display

N

L

No display

LED display

Output

Signal

A

B

0 to 5 VDC

4 to 20 mA

Digital 

Interface

2

5

9

RS232

RS485

PROFIBUS

Содержание GFM2 Series

Страница 1: ...thin 2 of actual flow Output Signal Linear 0 to 5 VDC 3000 min load impedance and 4 to 20 mA 500 max loop resistance Relay Rating 1 A 24 VDC Max Particulate Size 5 microns Temperature Limits 32 to 122...

Страница 2: ...ass Flow Meter Installation and Operating Instructions Bulletin F GFM2 DWYER INSTRUMENTS INC Phone 219 879 8000 www dwyer inst com P O BOX 373 MICHIGAN CITY INDIANA 46360 U S A Fax 219 872 9057 e mail...

Страница 3: ...7 6 2 Flow Path Cleaning 7 6 2 1 Restrictor Flow Element RFE 7 6 2 2 GFM2 Models 7 7 Calibration Procedures 8 7 1 Flow Calibration 8 7 2 Gas Flow Calibration of GFM2 Mass Flow Meters 8 7 2 1 Connecti...

Страница 4: ...thorough leak test of the entire system All GFM2 s are checked prior to shipment for leakage within stated limits See specifications in this manual 2 2 Electrical Connections GFM2 is supplied with a 2...

Страница 5: ...nterface or optional Profibus DP interface GFM2 flow meters support various functions including programmable flow totalizer low high or range flow alarm automatic zero adjustment activated via local b...

Страница 6: ...peration of the meter above 110 of maximum calibrated flow may increase recovery time 5 3 GFM2 Parameters Settings 5 3 1 Engineering Units Settings The GFM2 Mass Flow Meter is capable of displaying fl...

Страница 7: ...nitrogen for up to 36 gases are stored in the GFM2 see APPENDIX II In addition provision is made for a user defined conversion factor Conversion factors may be applied to any of the ten gas calibrati...

Страница 8: ...to disassemble the sensor If blockage of the sensor tube is not alleviated by flushing through with cleaning fluids please return meter for servicing 6 2 1 Restrictor Flow Element RFE The Restrictor...

Страница 9: ...s the sensor Average reading must be in the range 120 10 counts If it is not perform Auto Zero procedure see section 5 3 10 Zero Calibration 7 2 3 Gas Linearization Table Adjustment Gas flow calibrati...

Страница 10: ...RS 232 SOFTWARE INTERFACE COMMANDS 8 1 General The standard GFM2 comes with an RS 485 interface For the optional RS 232 interface the start character and two hexadecimal characters for the address mu...

Страница 11: ...command can be used only when absolutely no flow thru the meter and no earlier then 6 minutes after power up It can take several minutes to complete Unit will not respond to other commands when this...

Страница 12: ...R read current totalizer volume W warm up delay S setting status D disable sets K 1 I internal K factor U user specified factor S status FS mL sec mL min mL hr L sec L min L hr m3 sec m3 min m3 hr f3...

Страница 13: ...w measurement LCD display reading does correspond to the correct flow range but 0 5 Vdc output signal does not change always the same reading or around zero LCD display reading and 0 to 5 Vdc output v...

Страница 14: ...nsor temperature is too high MCU temperature is too high overload Fatal Error EEPROM or Auto Zero error Solution Flush clean or disassemble to remove impediments or replace the filter screen see secti...

Страница 15: ...rent Gas Table Number 0 9 Current Units of Measure 0 22 Alarm Mode E Enabled D Disabled Low Flow Alarm Setting FS 0 Disabled High Flow Alarm Setting FS 0 Disabled Flow Alarm Action Delay 0 3600 sec 0...

Страница 16: ...Flow in PFS 0 6 70 0 FS A D Value from Sensor counts Actual Flow in PFS 0 7 80 0 FS A D Value from Sensor counts Actual Flow in PFS 0 8 90 0 FS A D Value from Sensor counts Actual Flow in PFS 0 9 100...

Страница 17: ...n 114 C2Cl2F4 Freon 115 C2ClF5 Freon C318 C4F8 Germane GeH4 Germanium Tetrachloride GeCl4 Helium He 50 L min Helium He 1 50 L min Helium He 2 10 50 L min Index 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16...

Страница 18: ...butyl Aluminum C4H9 AL Titanium Tetrachloride TiCl4 Trichloro Ethylene C2HCl3 Trimethylamine CH3 3N Tungsten Hexafluoride WF6 Uranium Hexafluoride UF6 Vinyl Bromide CH2CHBr Vinyl Chloride CH2CHCl Xeno...

Страница 19: ...APPENDIX IV Component Diagram Top Component Side Bottom Component Side Page 18...

Страница 20: ...s required The Series GFM3 is not field serviceable and should be returned if repair is needed Field repair should not be attempted and may void warranty See 1 3 WARRANTY RETURN Refer to Terms and Con...

Страница 21: ...wyer Instruments Inc Printed in U S A 5 13 FR RA 444052 00 DWYER INSTRUMENTS INC Phone 219 879 8000 www dwyer inst com P O BOX 373 MICHIGAN CITY INDIANA 46360 U S A Fax 219 872 9057 e mail info dwyer...

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