BESTEM – D01R
⑤
REC exe button
Carry out chip recognition trace position. Check if the parameters are correct.
Others Command
⑥
OriFlat exe button
Execute orientation flat checking. Check if the parameters are correct.
※
Wafer table has to move to orientation flat position.
⑦
Angle exe button
Check the slanting angle for wafer. Does not has any parameter needs to be set.
Additional Function --- When press Super User button, the following display will appear.
※
Other recognition edit screen have the same function.
※
Password is the same as main operation super mode
。
①
Numeral key
…
Input password.
②
BS key
…
Clear last digit.
③
Cancel key
…
Quit super user mode, return to normal user recognition edit.
④
Enter key
…
If password is correct, enter into super user recognition edit display.
P
.
3
Содержание BESTEM-D01/R
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