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CANON Machinery Corporation

Head Office & Factory

：

85 Minami-Yamadacho, Kusatsu-shi, Shiga 525-8511, Japan.

TEL (077)565-0755

Fax, (077)565-0755

Shanghai Office

：

#903 Shanghai Kerry Centre, 1515 Nanjing Road West, Shanghai 200040, China

TEL86-21-5298-5101~2

Taipei Office

：

5f-3,No.390,Fu Hsing South Road, Sec.1,Taipei 16847778,Taiwan

TEL886-2-2709-5122

URL http://www.canon-machinery.co.jp/

●

This manual uses eco-mark approved recycled paper.

Содержание BESTEM-D01/R

Страница 1: ...Die Bonder Die Bonder R Re ec co og gn ni it ti io on n S Se et tt ti in ng g Recognition Setting...

Страница 2: ......

Страница 3: ...ing of dies on top of supplied lead frame islands until lead frames storage operation For a long lasting machine we would appreciate it very much if this operation manual is carefully read through bef...

Страница 4: ...ions Contents of warrantee specified in the Sale and Purchase Agreement are the sole responsibility of the company Contents in this manual or other documentations may be one part of the Agreement and...

Страница 5: ...ord i Before Using ii Contents iii Recognition Setting 1 Recognition Screen Start up 1 2 Chip Recognition 2 3 Island Recognition 10 4 Pf Recognition 18 5 DBI Pf Inspection 20 6 DBI Chip Inspection 26...

Страница 6: ......

Страница 7: ...ed from the Inspection menu buttons Chip REC button It will change to chip recognition setting screen DBI chip Inspection button It will change to DBI chip inspection setting screen Island REC button...

Страница 8: ...ton will end super user setting and the screen will change to the normal screen Change accordingly if super user parameter is necessary Digital Zoom Set the image display magnification 100 200 5000 wi...

Страница 9: ...tton Check the slanting angle for wafer Does not has any parameter needs to be set Additional Function When press Super User button the following display will appear Other recognition edit screen have...

Страница 10: ...ation Not used Chip size Chip pitch size Click Setting button and the window as on the right will be displayed Refer to the below diagram and set each position and size accordingly then double click C...

Страница 11: ...Camera pixel resolution is set Exposure time Camera exposure time is set Focus monitor The focus of the camera is adjusted There is a set part of the focus monitor also in a base tab of the super use...

Страница 12: ...n pixel Selects Use Not Use When Use is selected then Setting button is clicked mask area will be set Once the above setting is completed after select the template type Rectangle Standard Rectangle Ar...

Страница 13: ...on and range size can be set 3 level scale setting Sets the 3 threshold level to obtain NG mark recognition pattern When the scroll bar is scrolled the image will display the detection in green color...

Страница 14: ...tection position during chip recognition Y X Detection window Chip Chipping detect size pixel When Setting button is clicked chipping detection range size is set Range size is the same at all chip 4 c...

Страница 15: ...fer 3 level scale setting Sets 3 level setting to extract the orientation flat When the scroll bar is scrolled the image will display the detection in green color The level is set when the orientation...

Страница 16: ...screen and basic operation is as chip recognition Tab items Set each Island base Pf base for Pf recognition Template NG mark detect item Setting procedure for each item is at the following page Apply...

Страница 17: ...ton Unit pixel Note 2 Please teach to the first island center position Note 1 Eventhough the zoom setting can be done in REC EDIT screen during island recognition and DBI chip inspection in main scree...

Страница 18: ...utton in command and change Chip base tab Exposure time in super user mode Spare illumination Not used Island size W H um Click Setting button and island size The island size display window is blue be...

Страница 19: ...land selection When islands in the odd and even column are the same shape select 1 island When the shape for odd column island and even column island are different select 2 island If 1 island is selec...

Страница 20: ...h setting button Template offset is set to shift the template origin mount reference point when it is not at island center Also can be use to correct mounted chip position in XY direction Template 1 i...

Страница 21: ...ease set the mask prohibition region Mask prohibition region No 1 2 Press the UP DOWN button to set the Mask prohibition region No 1 2 However regarding to Box Round shape when No 2 No 1 change is nee...

Страница 22: ...hibition region setting teach the first mask prohibition region for the first round shape pattern By mask prohibition region setting set the second mask prohibition region for the second round shape p...

Страница 23: ...nition NG mark detect position XY size pixel Set NG mark detection position and range size 3 level setting Sets the 3 threshold level to obtain NG mark recognition pattern When the scroll bar is scrol...

Страница 24: ...m is 4 chips But When AgP paste and chip are of the same color It cannot differentiate between chip and AgP paste 1st chip existence detect parameter setting 1st chip existence detect Set 1st chip det...

Страница 25: ...ip 1st chip detection window Image view during setting 1st chip detection Image view during island recognition template setting Island During 1st chip detection setting the size of the image view when...

Страница 26: ...he change of Normal user Super user SuperUser button With SuperUser button DBI Pf inspection parameter setting tab can be change between Normal user and super user When DBI Pf inspection setting tab i...

Страница 27: ...ed to the setting island position as in auto run mode Please specified the island no that wish to be moved by pressing the UP DOWN button Image move button Unit pixel Note 1 The template center set in...

Страница 28: ...s function button cannot be used 2 Super user Pf Base tab items Carry out DBI Island REC execute SW setting in SuperUser Pf Base tab Setting step In DBI recognition if re execute island recognition th...

Страница 29: ...o teach the window size During recognition execution those detection windows with check mark only will be check Then press Input button to key in the value for standard paste quantity for every detect...

Страница 30: ...lume Sets AgP dispense volume detection warning volume unit Lower limit 0 100 Upper limit 100 200 Pf dispense detection tolerance range setting is common for both Even Odd rows Can confirm with Rec ex...

Страница 31: ...is valid Odd row and even row detect windows are same Even row detect windows is when Island selection is set to 1 island then Odd row standard tab setting detect windows is valid Even row Odd row Is...

Страница 32: ...em change by the change of Normal user Super user Setting step Each item setting procedure will be elaborate from next page SuperUser button With SuperUser button DBI chip inspection parameter setting...

Страница 33: ...that wish to be moved by pressing the UP DOWN button Image move button Unit pixel Note 1 The template center set in island recognition edit is reflected at the view image center For setting please do...

Страница 34: ...image and carry out chip size teaching In DBI Island base parameter setting input the chip thickness in unit m Other items are same as island recognition island base setting If modification is requir...

Страница 35: ...ease adjust the contrast in chip template tab at super user and set the template again Search pos size X Y W H pixel with Setting button set the position and size of the position set matching search r...

Страница 36: ...the chip becomes possible For instance when the template that inclines by 45 is set the angle equipped with the chip is set to 45 0 Moreover when the angle equipped with the chip on the even number r...

Страница 37: ...below 3 dot x 3 dot 90 m 90 m cannot be detected 2 The paste protrude size cannot be detected 3 Paste protrude shape detection function is not available 4 When protrude is detected by DBI function the...

Страница 38: ...Upper side low volume warning The setting for chip upper side detection window detected low volume warning limit The protrude quantity below this limit will be given warning 0 999999 pixel 2 Right sid...

Страница 39: ...be given warning pixel 0 999999 Left side low volume limit The setting for chip left side detection window detected volume minimum limit pixel 2 0 999999 The protrude quantity below this limit is judg...

Страница 40: ...nd judged to be an error in the next automated cruise BD position specification functions A dummy BD position is specified on the island judged to be an error and the position specified in the next au...

Страница 41: ...enters the state of a small window with the cancellation button when skip information and BD position and specification information are registered When you press the end button with skip or BD positio...

Страница 42: ...en Mouse cursor A cross mark that centers on the position with the mouse cursor is displayed When mouse s left button is clicked the position of the mouse cursor being indicated now is specified for a...

Страница 43: ...Die Bonder BESTEM D01R Operation Manual Recognition setting Initial Issuance August 2003 Issued By CANON Machinery Corporation Production Division Research Development...

Страница 44: ...5 0755 Fax 077 565 0755 Shanghai Office 903 Shanghai Kerry Centre 1515 Nanjing Road West Shanghai 200040 China TEL86 21 5298 5101 2 Taipei Office 5f 3 No 390 Fu Hsing South Road Sec 1 Taipei 16847778...

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