FT651-059
6
6
Connecting to External Instruments
(1)
Remote I/O Connector Pin Layout and Function
Table 4 D-Sub Connector Pin Layout
Pin No.
Function
Remarks
1
DC Input (22 to 26 VDC)
2
DC Input common (Note 1)
3
Control signal Vcc IN (24V DC)
Control signal power supply input (Note 2)
4
Control signal Vcc common
5
Filament ON/OFF input
See Section 6 (2) for the control method.
6
Degas ON/OFF input
7
Crystal gauge ATM input
8
Crystal gauge zero input
9
Not in use (NC)
10
Not in use (NC)
11
Analog output
See Section 6 (3) for details
12 Analog
GND
13
Not in use (NC)
14
Not in use (NC)
15
Not in use (NC)
Note 1: Connected to the controller case or the chamber by the gauge head.
Note 2: Control signal power supplies
The control signal Vcc IN can be connected in parallel to the controller power supply.
However, if the control signal voltage differs from the controller drive voltage, or if the
control signal power supplies are to be insulated from the controller drive power supply, or
if the effects of noise are to be considered, connect the control signal Vcc IN to a separate
power supply.
(2)
Remote Control Input
①
Function
Table 5 Remote Control Input Functions
Signal Name
Pin No.
Function
B-A filament inhibit input
5
Prohibits the filament switching ON. (The filament can be forcible switched
OFF.)
B-A degas ON/OFF input
6
Switches the B-A gauge degas ON/OFF. However, this function is only
enabled when the B-A filament is ON.
Crystal gauge ATM set input
7
Adjusts the crystal gauge ATM. Pay attention that this is set to the pressure
value adjusted by VR for ATM adjustment.
Crystal gauge zero set input
8
Sets the crystal gauge zero point.
* Sets the zero point by switching OFF
→
ON
→
OFF (switching ON for
0.5 to 1 second). (This is the same operation as switching the zero point set
switch.)
②
Input Electrical Specifications
Input type: Contact input
Current: Approx. 6 mA (when Ext Vcc = 24 V)