FT651-059
10
9 Troubleshooting
For the methods of troubleshooting, see Table 6 below.
Table 6 Troubleshooting
LED Display
Course
of
Action
LED OFF
Check the power is supplied to the crystal gauge. If not restored even if the power is
supplied, contact Canon Anelva.
Red illuminated
Contact Canon Anelva
Red flashing 1
Note 1
Check the gauge head is properly connected to the controller. If there is no connection
error, the crystal oscillator may have stopped oscillating inside the gauge head due to
broken wiring, etc. Replace the gauge head.
Crystal
Red flashing 2
Note 2
Error when adjusting zero:
Adjust the zero at a pressure of 10
-2
Pa or below.
If there is no improvement, replace the gauge head.
Error when adjusting ATM:
Adjust the ATM pressure in the adjustment range.
If there is no improvement, replace the gauge head.
Red illuminated
The B-A gauge filament may be broken. Replace the gauge head.
B-A
Red flashing
The measurement may have exceeded the B-A gauge measurement range. Check the
pressure.
Red flashing 1
(sensor error)
Red flashing 2
(zero adjustment error)
(Note 1)
(Note 2)
Figure 3 Crystal LED Error Flashing
