Brooks SLA5850, Инструкция по установке и эксплуатации

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Brooks ® Digital MFC's & MFM's
Contents
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Paragraph Page
Number Number
Section 1 Introduction
1-1 Scope ......................................................................................................................................... 1-1
1-2 Purpose ...................................................................................................................................... 1-1
1-3 Description ................................................................................................................................. 1-1
1-4 Specifications ............................................................................................................................. 1-2
Section 2 Installation
2-1 General ...................................................................................................................................... 2-1
2-2 Receipt of Equipment ................................................................................................................. 2-1
2-3 Recommended Storage Practice ............................................................................................... 2-1
2-4 Return Shipment ........................................................................................................................ 2-1
2-5 Transit Precautions .................................................................................................................... 2-2
2-6 Removal from Storage ............................................................................................................... 2-2
2-7 Gas Connections ........................................................................................................................ 2-2
2-8 In-Line Filter ............................................................................................................................... 2-2
2-9 Installation .................................................................................................................................. 2-3
2-10 Electrical Interface ...................................................................................................................... 2-5
2-11 Operation Check Procedure (Analog I/O) .................................................................................. 2-9
2-12 Operation Check Procedure (Digital I/O) ................................................................................... 2-10
2-13 Bus/Network (DeviceNet, Profibus, Foundation Fieldbus, EtherCAT) ....................................... 2-10
Section 3 Operation
3-1 Overview .................................................................................................................................... 3-1
3-2 Theory of Operation for Flow Measurement .............................................................................. 3-1
3-3 Features ..................................................................................................................................... 3-3
3-4 Analog I/O Mode of Operation .................................................................................................... 3-4
3-5 Communications Features ......................................................................................................... 3-5
3-5-1 RS485 Communications Features (Analog versions only) ......................................................... 3-5
3-5-2 DeviceNet Communications Features ........................................................................................ 3-6
3-5-3 Profibus Communications Features ........................................................................................... 3-6
3-5-4 EtherCAT Communications Features ......................................................................................... 3-6
3-6
Alarms (Analog versions only) .................................................................................................... 3-7
3-6-1 Alarms (Analog versions only) Configuration Attributes ............................................................. 3-8
3-6-2 Diagnostic Alarms (Analog versions only) .................................................................................. 3-9
3-6-3 General Alarms (Analog versions only) ...................................................................................... 3-9
3-7
Calibration/Configuration Sets ................................................................................................... 3-10
3-8 Special Features ....................................................................................................................... 3-10
3-8-1 Setpoint Ramping ...................................................................................................................... 3-11
3-8-2 Low Setpoint Command Cutoff ................................................................................................. 3-11
3-8-3 Low Flow Output Cutoff ............................................................................................................. 3-11
3-8-4 Adaptive Control ........................................................................................................................ 3-11
3-8-5 Flow Totalizer ............................................................................................................................ 3-11
3-9
PC-based Support Tools ........................................................................................................... 3-11