Brooks SLA5850, Инструкция по установке и эксплуатации

Страница: 9 / 74

1-3
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Table 1-1 SLA5800 Series Specifications
SLA5850/60 SLA5850/60 SLA5850/60 SLA5850/60 SLA5850/60 SLA5851/61 SLA5851/61 SLA5851/61 SLA5851/61 SLA5851/61 SLA5853/63 SLA5853/63 SLA5853/63 SLA5853/63 SLA5853/63
* Response time can be improved upon request
Flow Ranges and Pr Flow Ranges and Pr
Flow Ranges and Pr Flow Ranges and Pr
Flow Ranges and Pressur essur
essur essur
essure Ratings: e Ratings:
e Ratings: e Ratings:
e Ratings:
Mass Flow Mass Flow Mass Flow Mass Flow Mass Flow Mass Flow Mass Flow Mass Flow Mass Flow Mass Flow Flow Ranges Flow Ranges Flow Ranges Flow Ranges Flow Ranges Pressure Unit Pressure Unit Pressure Unit Pressure Unit Pressure Unit PED Module H PED Module H PED Module H PED Module H PED Module H
Controller Controller
Controller Controller Controller
Meter Meter
Meter Meter Meter
N2 Eq. Ratings N2 Eq. Ratings
N2 Eq. Ratings N2 Eq. Ratings N2 Eq. Ratings
psi/bar psi/bar
psi/bar psi/bar psi/bar
Category Category
Category Category Category
Model Model
Model Model
Model Model Model
Model Model
Model Min. F.S. Min. F.S.
Min. F.S. Min. F.S.
Min. F.S. Max. F.S. Max. F.S.
Max. F.S. Max. F.S.
Max. F.S. Standard Standard
Standard Standard
Standard Optional Optional
Optional Optional
Optional
SLA5850 SLA5860 0.003 50 lpm 1500 psi/103 bar 4500 psi/310 bar SEP
SLA5851 SLA5861 15 200 lpm* 1500 psi/103 bar NA** SEP
SLA5853 SLA5863 100 2500 lpm 1000 psi/70 bar NA 1 for all 150 lb flanges
2 for all other connections
* 600 lpm of H2 possible with decreased accuracy ** 4500 psi/310 bar available as a special on the SLA5861 only
> 40 psig inlet required for flows greater than 100 lpm.
* Alarm modes are dependent on the communications interface. These are described in the corresponding digital communication interface manual.
** Hazardous area certifications have a temperature range limitation of 0-65°C.
Performance Performance Performance Performance Performance
Flow Accuracy Flow Accuracy Flow Accuracy Flow Accuracy Flow Accuracy +0.9% of S.P. (20-100% F.S.), ±0.9% of S.P. (20-100% F.S.),
+0.18% of F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm) ±0.18% of F.S. (2-20% F.S.) up to 1100 lpm
±1.0% of F.S. from 1100 lpm
up to 2500 lpm
Control Range Control Range
Control Range Control Range Control Range 100:1 for F.S. from 1-50 lpm (50:1 for all other F.S. flows)
Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility 0.20% S.P.
Linearity Linearity Linearity Linearity Linearity Included in accuracy
Response Time ( Response Time ( Response Time ( Response Time ( Response Time (Settling Time within Settling Time within Settling Time within Settling Time within Settling Time within < 1 second < 3 seconds
±2% F.S. for 0-100% command step)* ±2% F.S. for 0-100% command step)* ±2% F.S. for 0-100% command step)* ±2% F.S. for 0-100% command step)* ±2% F.S. for 0-100% command step)*
Zero Stability Zero Stability Zero Stability Zero Stability Zero Stability < + 0.2% F.S. per year
Temperature Coefficient Temperature Coefficient
Temperature Coefficient Temperature Coefficient
Temperature Coefficient Zero: <0.05% of F.S. per °C. Span: <0.1% of S.P. per °C
Pressure Coefficient Pressure Coefficient
Pressure Coefficient Pressure Coefficient Pressure Coefficient ±0.03% per psi (0-200 psi N2)
Attitude Sensitivity Attitude Sensitivity Attitude Sensitivity Attitude Sensitivity Attitude Sensitivity <0.2% F.S. maximum deviation from specified accuracy after re-zeroing
Ratings Ratings Ratings Ratings Ratings
Operating Temperature Range Operating Temperature Range Operating Temperature Range Operating Temperature Range Operating Temperature Range -14 to 65 o C (7 to 149 o F)**
Minimum Pressure Differential Minimum Pressure Differential Minimum Pressure Differential Minimum Pressure Differential Minimum Pressure Differential 5 psi/0.35 bar 10 psi/0.69 bar Min.: 7.5 psi/0.52 bar at 500 lpm
(Controllers) (Controllers) (Controllers) (Controllers) (Controllers) Min.: 14.5 psi/1.00 bar at 1000 lpm
Min.: 35.0 psi/2.41 bar at 2500 lpm
Maximum Pressure Differential Maximum Pressure Differential Maximum Pressure Differential Maximum Pressure Differential Maximum Pressure Differential Application specific up to 50 psi/3.45 bar 300 psi/20.0 bar
(Controllers) (Controllers) (Controllers) (Controllers) (Controllers) 1500 psi/103.4 bar
Leak Integrity (external) Leak Integrity (external) Leak Integrity (external) Leak Integrity (external) Leak Integrity (external) 1x10 -9 atm. cc/sec He
Mechanical Mechanical Mechanical Mechanical Mechanical
Valve Type Valve Type Valve Type Valve Type Valve Type Normally Closed, Normally Open, Meter
Primary Wetted Materials Primary Wetted Materials Primary Wetted Materials Primary Wetted Materials Primary Wetted Materials 316L Stainless Steel, High Alloy Stainless Steel, Viton
®
fluoroelastomers, Buna-N, Kalrez
®
, Teflon
®
/Kalrez
®
, and EPDM
Diagnostics Diagnostics Diagnostics Diagnostics Diagnostics
Status Lights Status Lights
Status Lights Status Lights Status Lights MFC Health, Network Status
Alarms* Alarms* Alarms* Alarms* Alarms* Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
Diagnostic/Service Port Diagnostic/Service Port Diagnostic/Service Port Diagnostic/Service Port Diagnostic/Service Port RS485 via 2.5mm jack