78
MANUAL P/N 316005 REV: B
Series 316
Granville-Phillips
®
Series 316 Convectron
®
®
Vacuum Measurement Controller
Customer Service/Support
For customer service within the USA, 8 AM to 5 PM
Mountain Time Zone, weekdays excluding holidays:
Granville-Phillips
6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone:
+1-800-776-6543
Phone:
+1-303-652-4400
FAX:
+1-303-652-2844
Email:
Brooks Automation, Inc.
15 Elizabeth Drive
Chelmsford, MA 01824 USA
Phone: +1-978-262-2400
For customer service, 24 hours per day, 7 days per week,
every day of the year including holidays within the USA:
Phone +1–800–367–4887
World Wide Web:
www.brooks.com
Instruction Manual
Instruction manual part number 316005
Revision B - December 2012
Содержание Granville-Phillips Convectron 316 Series
Страница 11: ...12 MANUAL P N 316005 REV B Figure 1 3 Mounting Configurations...
Страница 26: ...MANUAL P N 316005 REV B 27 Figure 2 3 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 100 mTorr...
Страница 27: ...28 MANUAL P N 316005 REV B Figure 2 4 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 Torr...
Страница 28: ...MANUAL P N 316005 REV B 29 Figure 2 5 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 Torr...
Страница 29: ...30 MANUAL P N 316005 REV B Figure 2 6 Convectron Gauge Indicated vs True Pressure Curve 10 4 to 0 1 mbar...
Страница 30: ...MANUAL P N 316005 REV B 31 Figure 2 7 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 mbar...
Страница 31: ...32 MANUAL P N 316005 REV B Figure 2 8 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 mbar...
Страница 75: ...76 MANUAL P N 316005 REV B...
