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MANUAL P/N 316005 REV: B
Figure 2-1 Convectron Modules, Top View
(Controller Cover Removed)
2.3 Convectron Gauge Tube Installation
The following precautions in the use and installation of the Convectron Gauge tube must be
observed.
x
Observe the precautions at the front of this chapter regarding tube mounting position and high
pressure operation.
x
The gauge tube should be installed with the port oriented vertically downward to ensure that no
system condensates or other liquids collect in the gauge tube.
x
Keep the gauge tube clean. Do not remove the mounting port cover until you are ready to install
the gauge tube.
x
Do not
mount the gauge tube in a manner such that deposition of process vapors upon the
internal surfaces of the tube can occur through line-of-sight access to the interior of the gauge
tube.
x
Do not
install the gauge tube where high amplitudes of vibration are present. Excessive vibration
will cause forced convection at high pressure giving erroneous readings.
x
Do not
bake the tube to temperatures above 150
o
C.
x
Do not
install the gauge tubes where they will be exposed to corrosive gases such as mercury
vapor, chlorine, or fluorine, which will attack the gold plated sensor.
x
For greatest accuracy and repeatability the gauge tube should be located in a stable room
temperature environment.
Содержание Granville-Phillips Convectron 316 Series
Страница 11: ...12 MANUAL P N 316005 REV B Figure 1 3 Mounting Configurations...
Страница 26: ...MANUAL P N 316005 REV B 27 Figure 2 3 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 100 mTorr...
Страница 27: ...28 MANUAL P N 316005 REV B Figure 2 4 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 Torr...
Страница 28: ...MANUAL P N 316005 REV B 29 Figure 2 5 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 Torr...
Страница 29: ...30 MANUAL P N 316005 REV B Figure 2 6 Convectron Gauge Indicated vs True Pressure Curve 10 4 to 0 1 mbar...
Страница 30: ...MANUAL P N 316005 REV B 31 Figure 2 7 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 mbar...
Страница 31: ...32 MANUAL P N 316005 REV B Figure 2 8 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 mbar...
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