Section 3 - Message Protocol Details
Installation and Operation Manual
Brooks RS485 L-Protocol MFCs
3.17. Query for Sensor Reference Zero
X-DPT-RS485-GF100-Series-MFC-eng
Part Number: 541B183AAG
March, 2020
Master controller will use this message to query the sensor reference zero
offset.
Request message from Master controller to a digital MFC controller
MAC ID (Targeted MFC controller address)
STX(0x02)
Command Code(0x80 for read)
Packet Length(0x03)
Class ID(0x68)
Instance ID(0x01)
Attribute ID(0xAA)
Pad(0x00)
Checksum (0x98)
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