Brooks GF100 Series, Инструкция по установке и эксплуатации

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Contents
Installation and Operation Manual
Brooks RS485 L-Protocol MFCs
X-DPT-RS485-GF100-Series-MFC-eng
Part Number: 541B183AAG
March, 2020
4.2. Abnormal Transaction Scenarios .................................................................................................. 46
4.2.1. Read Transaction Scenario ............................................................................................... 46
4.2.1.1. Packet Error ............................................................................................................ 46
4.2.1.2. Read Error............................................................................................................... 47
4.2.2. Write Transaction Scenario ......................................................................................................... 48
4.2.2.1. Packet Error ............................................................................................................ 48
4.2.2.2. Write Error ............................................................................................................... 48
4.3. Protocol Timing ............................................................................................................................. 49
4.4. Message Sequence between Master Controller and a MFC Slave Controller .............................. 50
4.5. MFC New Setpoint Conversion ..................................................................................................... 51
4.6. Sensor Zero Filter ......................................................................................................................... 51
4.6.1. Requested Zero ................................................................................................................. 52
4.6.2. Auto Zero ........................................................................................................................... 52
4.7. Calibration Instances .................................................................................................................... 53
4.8. Analog / Digital Mode .................................................................................................................... 53
5. Advanced Diagnostics (GF135 Only) ................................................................................................... 55
5.1. New Communication Protocol Overview ...................................................................................... 55
5.1.1. Objectives and Problem Statement ................................................................................... 55
5.1.2. Protocol Description ........................................................................................................... 55
5.2. Specific Requirements .................................................................................................................. 56
5.2.1. Introduction ........................................................................................................................ 56
5.2.2. Advanced Protocol ............................................................................................................. 56
5.2.3. New Attributes .................................................................................................................... 56
5.3. Tool
– Device Communication ...................................................................................................... 59
6. Appendix: Tool - Device Communication ........................................................................................... 61
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