Section 3 - Message Protocol Details
Installation and Operation Manual
Brooks RS485 L-Protocol MFCs
3.4. Freeze Follow
X-DPT-RS485-GF100-Series-MFC-eng
Part Number: 541B183AAG
March, 2020
Master controller will use this message to configure a MFC controller to act
upon, or ignore, a new set point when received.
MAC ID (Targeted MFC controller address)
STX(0x02)
Command Code(0x81 for write)
Packet Length(0x04)
Class ID(0x69)
Instance ID(0x01)
Attribute ID(0x05)
FreezeFollow(1
–Act on new set point immediately-(default))
(0-Ignore change in set point)
Pad(0x00)
Checksum
12