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Maintenance Procedures

8200 Compressor



Helium Circuit Decontamination

Installation, Operation, and Service Instructions

8040353

Brooks Automation

5-10

Revision AA

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Содержание 8032549G001

Страница 1: ...8200 Compressor Installation Operation and Service Instructions 8040353 Revision AA...

Страница 2: ...k Marathon Marathon 2 Marathon Express Micro Ion MiniConvectron On Board Polycold Razor Simplicity Solutions the Simplicity Solutions logo Stabil Ion TrueBlue TurboPlus Vision Zaris and the Brooks Aut...

Страница 3: ...Servicing Instructions 1 3 Safety Introduction 2 2 Signal Word Descriptions 2 3 Safety Shape Descriptions 2 4 References 2 4 Inspection The Compressor 3 2 Installation Compressor Installation 4 2 Pre...

Страница 4: ...pendix A Customer Brooks Automation Technical Support Information 6 2 Appendix B Troubleshooting Procedures 6 3 Appendix C Electrical Schematics for 8200 Compressor 6 7 Appendix D Components in the El...

Страница 5: ...sor Installation 4 10 5 1 Adjusting the Self Sealing Connectors 5 3 5 2 Disconnecting Connecting the Adsorber Self Sealing Coupling 5 3 5 3 Removing the Adsorber from the Compressor 5 4 6 1 8200 Compr...

Страница 6: ...Figures 8200 Compressor Installation Operation and Service Instructions 8040353 Brooks Automation vi Revision AA This Page Intentionally Left Blank...

Страница 7: ...53 Revision AA vii Tables 1 1 Power Requirements Steady State Conditions 1 5 1 2 General Specifications 1 5 2 1 Safety Signal Words 2 3 2 2 Safety Shapes 2 4 4 1 Cooling Water Specifications 4 6 6 1 C...

Страница 8: ...Tables 8200 Compressor Installation Operation and Service Instructions 8040353 Brooks Automation viii Revision AA This Page Intentionally Left Blank...

Страница 9: ...vice Instructions Brooks Automation 8040353 Revision AA 1 1 1 Introduction Overview This chapter describes this manual and the compressor including specifications Chapter Contents General 1 2 Installa...

Страница 10: ...and servicing the 8200 Compressor This compressor is available in two versions air cooled part number 8032549G001 G002 and water cooled part number 803255G001 G002 If you are installing or operating...

Страница 11: ...Instructions Installation Operation and Servicing Instructions for your 8200 Compressor provide easily accessible information All personnel with installation operation and servicing responsibilities...

Страница 12: ...iew Water Cooled Rear View Air Cooled Front View Air and Water Cooled 1 Compressor Input Power Block 2 Cold Head Power Receptacle 3 On Board Power Receptacle 4 Helium Gas Fitting and Charge Valve 5 He...

Страница 13: ...12 30A See the nameplate on the back of the compressor for more details Table 1 2 General Specifications Specification Description Weight 150 lbs 68 kg max Weight shipping 155 lbs 70 kg max Power con...

Страница 14: ...er terminal block enclosure Mates with input power cable fabricated by customer or avail able from BROOKS Cryogenics Gas supply connector 1 2 inch self sealing coupling Gas return connector 1 2 inch s...

Страница 15: ...r maintenance of the product must be familiar with the safety precautions outlined in this section NOTE These safety recommendations are basic guidelines If the facility where the Prod uct is installe...

Страница 16: ...ing installation normal operation and when servic ing BROOKS Cryogenics products This chapter explains the safety conventions used throughout this manual BROOKS Cryogenics uses a specific format for c...

Страница 17: ...mple Definition CAUTION A signal word that indicates a situa tion or unsafe practice which if not avoided may result in equipment damage A CAUTION is highlighted in yellow CAUTION A signal word accomp...

Страница 18: ...safety standards see the following documents ISO 7010 2003 E Graphic symbols Safety colours and safety signs Safety signs used in workplaces and public areas ISO 3864 1 2002 E Graphic symbols Safety c...

Страница 19: ...ection Overview This chapter details unpacking the compressor A High Vacuum Pump or Refrigerator System is packaged in separate cartons for each major component An Installation Operation and Servicing...

Страница 20: ...idence of damage as follows c Inspect the compressor overall exterior for damage d Report damage to the shipper at once e Retain shipping cartons for storage or return shipment When installing your sy...

Страница 21: ...ks Automation Product Chapter Contents Compressor Installation 4 2 Preparing the Compressor Input Power Cable 4 2 Cooling Water Requirements Water Cooled Compressors Only 4 4 Cooling Water General Con...

Страница 22: ...al and thick ness to the earth and unearth branch circuit supply conductors except that it is green with or without one or more yellow stripes is to be installed as part of the branch cir cuit which s...

Страница 23: ...the two power leads to terminals X and Y DO NOT USE TERMINAL Z 6 Tighten all terminals to 18 22 in lbs torque 7 Tighten down screws on strain relief 8 Remount the terminal enclosure cover and secure...

Страница 24: ...ace Figure 4 2 Assembly of Conductors to Terminal Block Cooling Water Requirements Water Cooled Compressors Only If flexible water hose connections are used install the barbed fittings supplied with t...

Страница 25: ...oling water when the compressor is not running NOTE If cooling water below 45 F 7 C runs through the compressor while the compres sor is not operating the compressor oil will change viscosity and thic...

Страница 26: ...temperatures Table 4 1 Cooling Water Specifications Parameter Value Maximum Inlet Temperature 90 F 32 C Minimum Inlet Temperature 50 F 10 C Flow Rate 1 0 0 5 gpm 3 8 1 9 lpm Pressure Drop inlet to ou...

Страница 27: ...ture Rise Heat load to facility water is approximately 5000 Btu hr or 1500 Watts With a 1 0 GPM water flow this translates to an approximate water temperature rise of 10 F 5 6 C 0 25 0 50 0 75 1 00 1...

Страница 28: ...ter cooled compressor 3 Set the compressor ON OFF switch 3 to OFF Connect the input power cable to the power source Refer to Table 1 1 on page 1 5 for electrical power require ments 4 Turn the compres...

Страница 29: ...line identification decals BROOKS Cryogenics supplied to their respective connecting piping ends 5 Verify proper helium supply static pressure by confirming that the helium pressure gauge reads 245 2...

Страница 30: ...cold head b Connect the compressor input power cable to the power source c Turn on compressor d Your system is now ready for operation Figure 4 5 Typical 8200 Compressor Installation High Voltage Hig...

Страница 31: ...oks Automation 8040353 Revision AA 5 1 5 Maintenance Procedures Overview This chapter provides complete maintenance procedures for the Brooks Automation Product Chapter Contents Scheduled Maintenance...

Страница 32: ...in place 5 Use the two wrenches supplied to avoid loosening the body of the coupling from its adapter 6 Unscrew the two self sealing coupling halves quickly to minimize gas leakage as shown in Figure...

Страница 33: ...H HOLD WITH 1 1 8 INCH WRENCH HOLD WITH 1 1 8 INCH WRENCH TURN WITH 1 3 16 INCH WRENCH To Disconnect The Coupling This 1 3 16 in wrench is used to loosen the self sealing coupling connector Note the d...

Страница 34: ...ompressor Adsorber 1 Install the replacement adsorber as follows a Remove the dust caps from the self sealing coupling halves at each end of the replacement adsorber b Write installation date on the a...

Страница 35: ...5 1 on page 5 3 for proper coupling of the self sealing connection 3 Replace the cover and the front and rear grilles and secure them 4 Ensure that the pressure gauge reads 245 250 psig 1690 1725 kPa...

Страница 36: ...8032040G004 Available from stock consult the factory or your sales representative Adding Helium Gas Use only 99 999 pure helium gas If the compressor helium pressure gauge reads 0 decontamination is...

Страница 37: ...m stops flowing c Connect the charge line to the helium pressure regulator d Remove the flare cap of the gas charge fitting on the rear of the compres sor Loosely connect the charge line to the charge...

Страница 38: ...pressure gauge rises to 245 255 psig 1688 1757 kPa tightly close the charge valve 3 Ensure that the helium charge valve on the compressor is tightly closed Shut off the helium pressure regulator on t...

Страница 39: ...ructions Helium Circuit Decontamination Brooks Automation 8040353 Revision AA 5 9 Helium Circuit Decontamination Refer to Section 4 Maintenance of the appropriate On Board Cryopump Installation Operat...

Страница 40: ...Maintenance Procedures 8200 Compressor Helium Circuit Decontamination Installation Operation and Service Instructions 8040353 Brooks Automation 5 10 Revision AA This Page Intentionally Left Blank...

Страница 41: ...ted to the Brooks Automation Product Contents Appendix A Customer Brooks Automation Technical Support Information 6 3 Appendix B Troubleshooting Procedures 6 4 Appendix C Electrical Schematics for 820...

Страница 42: ...Appendices 8200 Compressor Installation Operation and Service Instructions 8040353 Brooks Automation 6 2 Revision AA...

Страница 43: ...cription of the events relating to the error Time that the equipment has been in operation Work that was done on the equipment prior to the error Functions that the equipment was performing when the e...

Страница 44: ...ompressor Table 6 1 Compressor Troubleshooting Procedures Problem Possible Cause Corrective Action 1 System power ON OFF switch CB1 and compressor switch S1 remains in the ON position when switched on...

Страница 45: ...on but the com pressor will not run 2a No power coming from the power source 2a Check service fuses circuit breakers and wiring associ ated with power source and repair as needed 2b Incorrect or disco...

Страница 46: ...hour minimum 3c Very cold cooling water is circulating through the com pressor The resulting low oil temperature causes a restric tion of oil flow through the metering orifice during startup 3c Rechec...

Страница 47: ...220V 50 Hz and restore if necessary 5 Compressor oper ates but cold head motor does not run 5a Loose or defective cable 5a Check cold head cable 6 Cooling water leav ing the compressor exceeds 100 F 6...

Страница 48: ...nd Ser 8040353 Brooks Automation 6 8 Revision AA Appendix C Electrical Schematics for 8200 Compressor The following electrical schematics for the 8200 Compressor are in this appendix 8200 Compressor E...

Страница 49: ...W YEL W VIO WHT WHT WHT RED 4 4 3 3 2 2 1 1 7 1 5 GRA NOTES 1 VOLTAGE SELECTION FREQUENCY LINE VOLTS S1 S2 180 212 50 Hz 208V 50 Hz 213 220 220V 50 Hz 60 Hz 198 212 213 250 220V 208V 60 Hz 60 Hz CH VO...

Страница 50: ...00 Compressor Appendix C Electrical Schematics for 8200 Compressor Installation Operation and Ser 8040353 Brooks Automation 6 10 Revision AA Figure 6 2 8200 Compressor Electrical Schematic part number...

Страница 51: ...is page Components in the Electrical Control Chassis of the 8200 Compressor Sin gle Phase RC Configuration Figure 6 3 Components in the Electrical Control Chassis of the 8200 Compressor Three Phase Sc...

Страница 52: ...gle Phase RC Configuration 1 Coldhead Phase Shifting ResistorR3 2 Overtemperature Resistor R1 3 Run Capacitor 35 f C1 4 Start Capacitor 119 f C2 5 Transformer T2 6 Run Capacitor 2 f C4 7 Run Capacitor...

Страница 53: ...ereby overcoming helium low specific head and inability to carry heat produced during compression Helium is then compressed and passed through a heat exchanger for removal of compression caused heat T...

Страница 54: ...dices 8200 Compressor Appendix E Flow Diagrams for 8200 Air Cooled and Water Cooled CompressorsInstalla 8040353 Brooks Automation 6 14 Revision AA Figure 6 5 Flow Diagram of the 8200 Air Cooled Compre...

Страница 55: ...ompressor Appendices Installation Operation and Service Instructions Appendix E Flow Diagrams for 8200 Brooks Automation 8040353 Revision AA 6 15 Figure 6 6 Flow Diagram of the 8200 Water Cooled Compr...

Страница 56: ...ters Water Constituent Unit Acceptable Limits Saturation Index SI delta pH value 0 2 0 0 2 Total hardness dH 6 15 Conductivity mg l 10 500 Filtered substances mg l 30 Chlorides mg l 500 Free chlorine...

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