Contents
8200 Compressor
Installation, Operation, and Service Instructions
8040353
Brooks Automation
iv
Revision AA
Unscheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
Helium Circuit Decontamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
Appendices
Appendix A: Customer Brooks Automation Technical Support Information. . .6-2
Appendix B: Troubleshooting Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
Appendix C: Electrical Schematics for 8200 Compressor . . . . . . . . . . . . . . . . . . . .6-7
Appendix D: Components in the Electrical Control Module of the 8200 Compressor
6-10
Appendix E: Flow Diagrams for 8200 Air-Cooled and Water-Cooled Compressors6-
12
Appendix F: Additional Cooling Water Quality Parameters . . . . . . . . . . . . . . . . .6-15
