1-3
Brooks
®
Model 5850i
Section 1 Introduction
Installation and Operation Manual
X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
November, 2008
1-3 Specifications
Standard Ranges
3 sccm to slpm* (nitrogen equivalent)
Accuracy
±1% full scale including linearity at calibrated conditions
±1.5% full scale including linearity for flow ranges greater than 20 slpm.
Repeatability
0.25% of rate
Response Time
Less than 6 seconds to within 2% of full scale final value with a 0 to 100%
command step.
Power Requirements
+15 to +28 Vdc — 245 mA @ +15 Vdc to 370 mA @ +28 Vdc
Ambient Temperature Limits
Operating: 5 to 65°C (40 to 150°F)
Non-Operating: -25 to 100°C (-13 to +212°F)
Working Pressure
1500 psi (10.342 MPa) maximum
Allowable Differential Pressure
5 psi minimum, 50 psi maximum. Higher differential pressures are allow-
able depending on gas and range. Consult factory for details.
Output Signal
0-5 Vdc into 2,000 ohms or greater. Maximum ripple 3 mV.
Jumper selectable 4-20 mAdc or 0-20 mAdc.
Refer to Fig. 2-3 for maximum total loop resistance.
5 Volt Reference Output
5 Volts ±0.2%. Maximum load 1k ohms.
