Brooks
®
Model 5850i
4-14
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
November, 2008
Table 4-3 Conversion Factors (Nitrogen Base) Continued.
GAS NAME
FORMULA
SENSOR
ORIFICE
DENSITY
FACTOR
FACTOR
(kg/m
3
)
Hydrogen
H
2
1.008
0.269
0.090
Hydrogen Bromide
HBr
0.987
1.695
3.645
Hydrogen Chloride
HCL
0.983
1.141
1.639
Hydrogen Cyanide
HCN
0.744
0.973
1.179
Hydrogen Fluoride
HF
0.998
0.845
0.893
Hydrogen Iodide
HI
0.953
2.144
5.789
Hydrogen Selenide
H
2
Se
0.837
1.695
3.613
Hydrogen Sulfide
H
2
S
0.850
1.108
1.539
Iodine Pentafluoride
IF
5
0.283
2.819
9.907
Isobutane
C
4
H
10
0.260
1.440
2.593
Isobutene
C
4
H
8
0.289
1.435
2.503
Isopentane
C
5
H
12
0.211
1.605
3.222
Krypton
Kr
1.382
1.729
3.708
Methane
CH
4
0.763
0.763
0.717
Methylacetylene
C
3
H
4
0.473
1.196
1.782
Methyl Bromide
CH
3
Br
0.646
1.834
4.236
3-Methyl-1-butene
C
5
H
10
0.252
1.584
3.127
Methyl Chloride
CH
3
CL
0.687
1.347
2.308
Methyl Fluoride
CH
3
F
0.761
1.102
1.518
Methyl Mercaptan
CH
4
S
0.588
1.313
2.146
Methyl Silane
CH
6
Si
0.393
1.283
2.061
Methyl Trichlorosilane (MTS)
CH
3
Cl
3
Si
0.267
2.310
6.675
Methyl Vinyl Ether
C
3
H
6
O
0.377
1.435
2.567
Monoethanolamine
C
2
H
7
NO
0.305
1.477
2.728
Monoethylamine
C
2
HH
5
NH
2
0.359
1.269
2.013
Monomethylamine
CH
3
NH
2
0.565
1.067
1.420
Neon
Ne
1.398
0.847
0.902
Nickel Carbonyl
Ni(CO)
4
0.212
2.371
7.008
Nitric Oxide
NO
0.995
1.030
1.339
Nitrogen
N
2
1.000
1.000
1.251
Nitrogen Dioxide
NO
2
0.758
1.713
2.052
Nitrogen Trifluoride
NF
3
0.501
1.598
3.168
Nitrogen Trioxide
N
2
O
3
0.443
1.649
3.389
Nitrosyl Chloride
NOCL
0.644
1.529
2.913
Nitrous Oxide
N
2
O
0.752
1.259
1.964
Octofluorocyclobutane
C
4
F
8
0.169
2.672
8.933
Oxygen
O
2
0.988
1.067
1.429
Oxygen Difluoride
OF
2
0.672
1.388
2.402
Ozone
O
3
0.738
1.310
2.138
Pentafluorethane f-125
C
2
HF
5
0.287
2.070
5.360
Pentane (n-Pentane)
C
5
H
12
0.212
1.605
3.222
Perchloryl Fluoride
CLO
3
F
0.448
1.905
4.571
Perfluorobutane
C
4
F
10
0.738
2.918
10.61
Perfluoro-2-Butene
C
4
F
8
0.268
2.672
8.933
Perfluoromethyl-vinylether
PMVE
0.296
2.029
5.131
Perfluoropropane
C
3
F
8
0.179
2.591
8.396
Pentane (n-Pentane)
C
5
H
12
0.212
1.605
3.222
Phosgene
COCL
2
0.504
1.881
4.418
Phosphine
PH
3
0.783
1.100
1.517
Phosphorous Pentafluoride
PF
5
0.346
2.109
5.620
Phosphorous Trifluoride
PF
3
0.495
1.770
3.906
Propane (same as CH
3
CH
2
CH
3
)
C
3
H
8
0.343
1.274
2.008
Propylene (Propene)
C
3
H
6
0.401
1.234
1.875
Rhenium Hexafluoride
ReF
6
0.230
3.279
13.41
Silane
SiH
4
0.625
1.070
1.440
Silicon Tetrachloride
SiCL
4
0.310
2.465
7.579
Silicon Tetrafluoride
SiF
4
0.395
1.931
4.648
Sulfur Dioxide
SO
2
0.728
1.529
2.858
Sulfur Hexafluoride
SF
6
0.270
2.348
6.516
Sulfur Tetrafluoride
SF
4
0.353
1.957
4.776
Sulfur Trioxide
SO
3
0.535
1.691
3.575
Sulfuryl Fluoride
SO
2
F
2
0.423
1.931
4.648
Tetrachloromethane
CCL
4
0.344
2.345
6.858
Tetrafluoroethylene (TFE)
C
2
F
4
0.361
1.905
4.526
Tetrafluorohydrazine
N
2
F
4
0.367
1.926
4.624
Trichlorofluoromethane f-11
CCL
3
F
0.374
2.244
6.281
Trichlorosilane
SiHCL
3
0.329
2.201
6.038
Trimethyloxyborane (TMB)
B(OCH
3
)
3
0.300
1.929
4.638
1,1,2-Trichloro-1,1,2-Triflouroet f-113
C
2
CL
3
F
3
0.231
2.520
7.920
Trimethylamine
(CH
3
)
3
N
0.316
1.467
2.639
Tungsten Hexafluoride
WF
6
0.227
3.264
13.28
Uranimum Hexafluoride
UF
6
0.220
3.548
15.70
Vinyl Bromide
C
2
H
3
Br
0.524
1.985
4.772
Vinyl Chloride
C
2
H
3
CL
0.542
1.492
2.788
Vinyl Fluoride
C
2
H
3
F
0.576
1.281
2.046
Water Vapor
H
2
O
0.861
0.802
0.804
Xenon
Xe
1.383
2.180
5.851