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3-7

Brooks

®

Model 5850i

Section 3 Operation

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
November, 2008

Figure 3-5 PC Board Jumper Location & Function

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Содержание 5850i

Страница 1: ...Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 Brooks Model 5850i Model 5850i Mass Flow Controller ...

Страница 2: ...ubstitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock and personal injury Pressure Equipment Directive PED All pressure equipment with an internal pressure greater than 0 5 bar g and a size larger than 25mm or 1...

Страница 3: ... and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of depend...

Страница 4: ...Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 Brooks Model 5850i THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Страница 5: ...stallation 2 3 2 6 In Line Filter 2 4 2 7 Electrical Interfacing 2 5 2 8 Configuring the PC Board 2 7 Section 3 Operation 3 1 Theory of Operation 3 1 3 2 Operating Procedure 3 2 3 3 Zero Adjustment 3 3 3 4 Calibration Procedure 3 4 3 5 Response 3 8 Section 4 Maintenance 4 1 General 4 1 4 2 Troubleshooting 4 1 4 3 Sensor Tube 4 6 4 4 Disassembly and Assembly 4 6 4 5 Use of the Conversion Tables 4 1...

Страница 6: ...iometer Location 3 6 3 5 PC Board Jumper Location Function 3 7 3 6 Fast Response Adjustment 3 9 4 1 Torque Sequence for the Valve Retainer Plate 4 3 4 2a Valve Adjusting Spacer Locations Normally Closed Valve N C 4 5 4 2b Valve Adjusting Spacer Locations Normally Open Valve N O 4 6 4 3 Voltmeter Connections for Valve Adjustment 4 8 4 4 Example Nomograph 4 18 5 1 Model 5850i Parts Drawing 5 1 Table...

Страница 7: ...ntrol valve and an integral electronic control system This combination produces a stable gas flow which eliminates the need to continuously monitor and readjust gas pressures Standard features include Fast Response Control permits rapid gas settling times with little or no over undershoot Refer to Figure 1 1 Soft Start provides a flow ramping function which slows down the introduction of the proce...

Страница 8: ...el 5850i Section 1 Introduction Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 Figure 1 1 Command Steps Soft Start Disabled Figure 1 2 0 100 Command Step Soft Start Enabled ...

Страница 9: ...cale final value with a 0 to 100 command step Power Requirements 15 to 28 Vdc 245 mA 15 Vdc to 370 mA 28 Vdc Ambient Temperature Limits Operating 5 to 65 C 40 to 150 F Non Operating 25 to 100 C 13 to 212 F Working Pressure 1500 psi 10 342 MPa maximum Allowable Differential Pressure 5 psi minimum 50 psi maximum Higher differential pressures are allow able depending on gas and range Consult factory ...

Страница 10: ...le 0 5 Vdc Input resistance 200k ohm or 4 20 mAdc Input resistance 75 ohm Leak Integrity 1 x 10 9 Atm scc sec Helium Control Range 50 to 1 Mechanical Connection Interchangeable with most popular massflow controllers Refer to Figure 2 1 Electrical Connections D type 15 pin connector DA 15P Mating connector supplied Standard temperature and pressure in accordance with SEMI Semiconductor Equipment an...

Страница 11: ... com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 318 549 309 E mail BrooksEu BrooksInstrument com 2 2 Recommended Storage Practice If intermediate or long term storage is required for...

Страница 12: ...okyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 318 549 309 E mail BrooksEu BrooksInstrument com Also completion of Form RPR003 1 Brooks Instrument Decontamination Statement as well as a Material Safety Data Sheet MSDS for the fluid s used in the meter is required before any Brooks P...

Страница 13: ... Flow Controller can be installed in any position However mounting orientations other than the original factory calibration see data sheet will result in a 0 5 maximum full scale shift after re zeroing e When installing controllers with full scale flow rates of 10 slpm or greater be aware that sharp abrupt angles in the system piping directly upstream of the controller may cause a small shift in a...

Страница 14: ... the flow sensor or control valve The filtering element should be replaced periodically or ultrasonically cleaned Maximum Flow Rate Recommended Filter Size 100 sccm 1 micron 500 sccm 2 microns 1 to 5 slpm 7 microns 10 to 30 slpm 15 microns Figure 2 2 D Type Connector Pin Arrangement 1 SETPOINT RETURN 9 SUPPLY COMMON 2 VOLTAGE SIGNAL OUTPUT 10 SIGNAL OUTPUT RETURN 3 NOT USED 11 5V REFERENCE OUTPUT ...

Страница 15: ...setpoint To use the current setpoint connect the setpoint signal to pin 7 and the setpoint return signal to pin 1 of the D connector and configure the PC Board per Section 2 7 To use the voltage setpoint connect the setpoint signal to pin 8 and the voltage setpoint return to pin 1 of the D connector and configure the PC Board per Section 2 7 Signal Output The flow signal output can be measured as ...

Страница 16: ...ed to pin 5 22 5 to 28 Vdc and pin 9 supply common of the D connector Refer to Section 1 3 for the power requirements NOTE The length of wire for the power supply connections pins 5 9 must be kept as short as possible to insure the minimum voltage 15 is available at the mass flow controller Chassis Ground Connect earth ground to pin 14 of the D connector Figure 2 4 Common Electrical Hook Ups ...

Страница 17: ...p jack post of the D connector Remove the can The can must be replaced before returning the unit to service Refer to Section 2 6 for the proper electrical hook up Refer to Figure 3 5 for pc board jumper locations and functions Setpoint Command Input The mass flow controller can be configured for voltage or current setpoint command input Jumper J7 green must be in the right hand position for 0 5 Vd...

Страница 18: ...2 8 Brooks Model 5850i Section 2 Installation Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Страница 19: ...y proportional to the gas mass flow rate The flow restrictor shown in Figure 3 1 performs a ranging function similar to a shunt resistor in an electrical ammeter The restrictor provides a pressure drop that is linear with flow rate The sensor tube has the same linear pressure drop flow relationship The ratio of the restrictor flow to the sensor tube flow remains constant over the range of the mete...

Страница 20: ... 2k ohm potentiometer with an integral turns counter is recommended This will permit repeatable adjustments of setpoint to 1 part in 1 000 Valve Override allows full opening and closing of the control valve indepen dent of the command setting Refer to Section 2 6 3 2 Operating Procedure a Apply power to the controller and allow approximately 45 minutes for the instrument to warm up and stabilize i...

Страница 21: ...tion The zero flow reading can also be affected to a small degree by changes in line pressure and mounting attitude To check zero always mount the controller in its final configuration and allow a minimum of twenty minutes for the temperature of the controller and its environment to stabilize Using a suitable voltmeter or current meter check the controller output signal If it differs from the fact...

Страница 22: ...tion is not a normal operating mode it will cause the control valve to abnormally heat up A meter with an abnormally warm valve will be difficult to calibrate This situation can be prevented by the valve override closed when there is no gas flow or setting the setpoint to less than 1 Also avoid unnecessary periods with the valve over ride open b Adjust the anticipate potentiometer fully clockwise ...

Страница 23: ... stays between 2 0 and 9 0 volts for proper operation If the recommended voltage range exceeds that desired accuracy and or signal stability may not be achieved If one of the limits is reached check the orifice and restrictor sizing procedures Refer to Sections 4 6 and 4 7 respectively g Adjust the setpoint for 0 flow Connect the DVM positive lead to 0 5V signal output Pin 2 and the negative lead ...

Страница 24: ... 5850i 3 6 Section 3 Operation Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 Figure 3 3 Model 5850i Calibration Connections Figure 3 4 Adjustment Potentiometer Location ...

Страница 25: ...3 7 Brooks Model 5850i Section 3 Operation Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 Figure 3 5 PC Board Jumper Location Function ...

Страница 26: ... adjusting the step response of the 5850i mass flow controllers can be used Method Number 1 describes a procedure that will get the step response close to optimum quickly and without any flow measuring equipment This method should be used when the response time of the flow controller is not critical to overall system performance Method Number 2 describes a procedure that will allow adjustment of y...

Страница 27: ...n less than six seconds after setpoint change requires the use of a fast response flowmeter 500 millisecond response to be within 0 2 of final value or better in series with the 5850i and a storage oscilloscope or recorder a Allow the flow controller to stabilize at 0 setpoint for at least thirty seconds Make a step in setpoint to the controller from 0 100 of full scale flow and record the output ...

Страница 28: ...Brooks Model 5850i 3 10 Section 3 Operation Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Страница 29: ...nections and that the correct power supply voltage and signals are reaching and leaving the controller The breakout board P N S 273 Z 668 AAA listed in Section 5 will make this job much easier 2 Verify that the process gas connections have been correctly termi nated and leak checked 3 If the mass flow controller appears to be functioning but cannot achieve setpoint verify that sufficient inlet pre...

Страница 30: ... 4 4 Valve guide spring failure Controller oscillates see below Controller grossly out of calibration Partially clogged sensor Clean sensor refer to the cleaning procedure Flow is higher than desired Controller grossly out of calibration Partially clogged restrictor Replace restrictor Refer to Section 4 4 Flow is lower than desired Controller oscillates Pressure drop or inlet pressure excessive Ad...

Страница 31: ... disassemble the controller 3 Use a hemostat or tweezers to push a 0 007 diameter piano wire through the flow sensor tube to remove any contamination For best results push the wire into the downstream opening of the sensor tube end closest to the control valve The sensor tube can be flushed with a non residuous solvent Freon TF recommended A hypodermic needle filled with solvent is a convenient me...

Страница 32: ... removed by soaking the internal parts in a solution of 5 parts hydrofluoric acid HF and 95 parts water H2 O followed by Freon TF 6 Restrictor elements can be cleaned in an ultrasonic bath Refer to Section 4 7 for the correct restrictor to use 7 Blow all parts dry with dry nitrogen and reassemble Refer to Section 4 4b assembly 8 Purge the assembled controller with dry nitrogen 9 Perform the calibr...

Страница 33: ...5 Brooks Model 5850i Section 4 Maintenance Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 Figure 4 2a Valve Adjusting Spacer Locations Normally Closed Valve N C ...

Страница 34: ...rooks Model 5850i 4 6 Section 4 Maintenance Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 Figure 4 2b Valve Adjusting Spacer Locations Normally Open Valve N O ...

Страница 35: ...hows the location and function of valve adjustment spacers for normally closed and normally open valves Valve adjustment is not required for normal installation and operation of the mass flow controller If adjustment is required consult the factory for information Figure labeled 5 1 shows an exploded view of the controller and specific parts to the normally closed NC and normally open NO valve Not...

Страница 36: ... Remove the preload spacer spring 33 NO Valve 7 Unscrew the orifice 12 from the flow controller body 14 8 Carefully unscrew the valve seat 11 from the plunger assembly 7 NC Valve or the plunger assembly 31 32 35 NO Valve Note the position and number of spacers 9 that are stacked on the threaded end of the valve seat 9 Remove the three screws 20 attaching the electronics cover Remove the electronic...

Страница 37: ...t all O rings be replaced during controller assembly All O rings should be lightly lubricated with Halocarbon lubricant part of O ring kit Section 5 prior to their installation 1 Examine all parts for signs of wear or damage replace as necessary 2 Place the restrictor O ring 22 on the restrictor assembly Screw the restrictor assembly 21 into the inlet side of the flow controller body using the res...

Страница 38: ...the connector from the valve coil into the PC Board through the hole in the electronics cover 12 Prior to installation leak and pressure test to any applicable pressure vessel codes C Adjusting the Control Valve The 5850i control valve has been factory adjusted to insure proper operation Readjustment is only required if any of the following parts have been replaced orifice 12 valve stem 6 plunger ...

Страница 39: ...v ing a 0 005 inch small preload spacer or by adding a 0 005 inch large preload spacer Refer to Figure 4 2 e Reassemblethevalve following the assembly procedure in Section 4 4a f Adjust setpoint for zero percent flow apply normal operating pressure and check for valve leak through by observing the output signal g If the valve leaks through increase the preload by 0 005 and go to Step h If the valv...

Страница 40: ...ller is calibrated for Nitrogen The desired gas is Carbon Dioxide The output reading is 75 sccm when Carbon Dioxide is flowing Then 75 x 0 78 58 50 sccm In order to calculate the conversion factor for a gas mixture the following formula should be used Where P1 percentage of gas 1 by volume P2 percentage of gas 2 by volume Pn percentage of gas n by volume Example The desired gas is 20 Helium He and...

Страница 41: ...0 430 1 985 4 912 Cyanogen CN 2 0 498 1 366 2 322 Cyanogen Chloride CLCN 0 618 1 480 2 730 Cyclobutane C4 H8 0 387 1 413 2 491 Cyclopropane C3 H6 0 505 1 224 1 877 Deuterium D2 0 995 0 379 0 177 Diborane B2 H6 0 448 1 000 1 235 Diboromodifluoromethane f 12B2 CBr2 F2 0 363 2 652 8 768 1 2 Dibromotetrafluoroethane f 114B2 C2 Br2 F4 0 215 2 905 10 53 Dichlorodifluoromethane f 12 CCL2 F2 0 390 2 099 5...

Страница 42: ...0 752 1 259 1 964 Octofluorocyclobutane C4 F8 0 169 2 672 8 933 Oxygen O2 0 988 1 067 1 429 Oxygen Difluoride OF2 0 672 1 388 2 402 Ozone O3 0 738 1 310 2 138 Pentafluorethane f 125 C2 HF5 0 287 2 070 5 360 Pentane n Pentane C5 H12 0 212 1 605 3 222 Perchloryl Fluoride CLO3 F 0 448 1 905 4 571 Perfluorobutane C4 F10 0 738 2 918 10 61 Perfluoro 2 Butene C4 F8 0 268 2 672 8 933 Perfluoromethyl vinyl...

Страница 43: ...e inlet and outlet flow range The flow controller s orifice is factory sized to a preselected gas operating pressure and flow range Note that the orifice is marked with its size in thousandths of an inch When changing the aforementioned factors calculate the new orifice size by following the procedure and example outlined below Example Determine the orifice size for the following conditions Gas Hy...

Страница 44: ...ge by volume of gas n Example Find the Air equivalent flow for 20 slpm of a 20 Helium and 80 Chlorine gas mixture QAIR Qgas orifice conversion factor 20 x 1 417 28 34 slpm air 2 If inlet and outlet pressures are given in gauge pressure psig add14 7 to convert to absolute pressure psia Outlet Pressure 30 psig 14 7 44 7 psia Inlet Pressure 50 psig 14 7 64 7 psia 3 Determine Critical Pressure Drop Cr...

Страница 45: ...4 17 Brooks Model 5850i Section 4 Maintenance Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 Table 4 4 Model 5850i Orifice Sizing Nomograph ...

Страница 46: ...t A 4 Using the nomograph locate the pressure drop psi on the vertical line marked Dp Point A 5 Locate the Nitrogen equivalent flow rate sccm Nitrogen on the vertical line marked QNitrogen Point B 6 Draw a line connecting Dp and QNitrogen and extend it to the baseline Mark this point Point C 7 Locate inlet pressure psia on the vertical line marked Pin Point D 8 Draw a line connection Pin Point D a...

Страница 47: ...aracteristics will be altered and it must be cleaned or replaced It may also be necessary to replace the restrictor assembly when the mass flow controller is to be calibrated to a new flow rate Restrictor assembly replacement should be performed only by trained personnel The tools required for the removal replacement procedure are as follows Appropriate size wrench for the removal of the inlet pro...

Страница 48: ...om Table 4 3 Air equivalent flow 200 0 68 294 1 sccm air In the example above a size P restrictor would be selected NOTE If the calculated flow rate is such that two different size restrictors could be used always select the larger size If a mixture of two or more gases are being used the restrictor selection must be based on the air equivalent flow rate of the mixture Example The desired gas is 2...

Страница 49: ...ed 316 Stainless Steel wire mesh only NOTE For flow rates less than 8 sccm use the low flow plug P N 618K019BMT in place of a restrictor assembly and install a low flow filler ring P N 724Z363BMT in the valve cavity after the orifice is installed Sensor conversion factor for the mixture is Air equivalent flow 20 903 22 15 slpm air In this example a size 4 wire mesh assembly would be selected ...

Страница 50: ...Brooks Model 5850i 4 22 Section 4 Maintenance Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Страница 51: ...tion Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 5 1 General When ordering parts please specify Brooks Serial Number Model Number Part Description Part Number Quantity Refer to Figure 5 1 and Tables 5 1 and 5 2 Figure 5 1 Model 5850i Parts Drawing ...

Страница 52: ...er 0 010 Thick 810A361BMA 33 1 Preload Spacer Spring Normally Open valve 810A388BMT Valve Seat with Viton Insert S715Z051AAG 11 1 Valve Seat with Buna Insert S715Z050AAG Valve seat w Kalrez insert or 200 psig S715Z297AAG Valve Seat with Kalrez Insert 200 psig S715Z163AAA Valve Seat Solid 316 Stainless Steel 715Z181BNT Stainless ID 0 0013 577Z375BMT ID 0 002 577Z376BMT ID 0 003 577Z377BMT ID 0 004 ...

Страница 53: ...105AAO QTA Viton SUA Buna TTA Kalrez AR As required NS Not Shown 5850 5851 Series Service Tool Kit 5851 Header Removal Tool P N S778D017AAA P N S817Z036AAA Permits the complete disassembly of the 5850i for servicing 0550 5851 Orifice Removal Tool P N S908Z049AAA Contains 1 O Ring Removal Tool 5850 5851 Series Calibration Cover D Connector 1 Potentiometer Adjustment Tool P N 909Z017EAD 1 Ball Point...

Страница 54: ...Brooks Model 5850i 5 4 Section 5 Parts List Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Страница 55: ...venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung für Massedurchflußgeräte Datum Januar 1996 Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Geräte elektrische elektronische Komponenten das CE Zeichen Bei der ...

Страница 56: ...se refer to the enclosed Instruction Manual Español Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificación CE de los Equipos de Caudal Másico Fecha Enero 1996 Los equipos de Brooks eléctricos electrónicos en relación con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Elect...

Страница 57: ...s presse étoupes et des connecteurs Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE Si vous approvisionnez vous même ce câble vous devez utiliser un câble blindé à 100 Les connecteurs D ou de type circulaire doivent être reliés à la terre Si des presse étoupes sont nécessaires ceux ci doivent être métalliques avec mise à la terre Le blindage doit être...

Страница 58: ...n bedekkingsgraad van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Italiano Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Oggetto Addendum al manuale di istruzioni Riferimento Certificazione CE dei misuratori termici di portata in massa Data Gennaio 1...

Страница 59: ...på riktig pinne i pluggen for å møte CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se håndboken som hører til utstyret Vennlig hilsen Português Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Assunto Adenda ao Manual de Instruções Referência Certificação CE do Equipamento de Fluxo de Massa Data Janeiro de 1996 O equipamento eléctrico electrónico Brooks com a marca...

Страница 60: ...oitettu Nastojen liittäminen katso liitteenä oleva manuaali Ystävällisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 Brooks elektriska elektronik utrustning som är CE märkt har testats och godkänts enligt gällande regler för elektromagnetisk kompabilitet EM...

Страница 61: ...Brooks Model 5850i Installation and Operation Manual X TMF 5850i MFC eng Part Number 541B108AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Страница 62: ... ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair...

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