Brooks Instrument SLAMf Series, Руководство по установке и эксплуатации

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Section 1 Introduction
SLAMf Series
Biotech
SLAMf50/60 SLAMf51/61 SLAMf53/63
Available Flow Ranges (N2, Eq)
Gasses Supported
Air , CO
2,
Nitrogen & Oxygen
Performance
Flow Accuracy (accuracy includes
linearity and calibration system
uncertainty)
Repeatability & Reproducibility
0.20% S.P.
Turndown (control range)
250:1 250:1 150:1
Response Time
< 1 Second < 1 Second < 3 Seconds
Zero Stability
< + 0.2% F.S. per year
Temperature Coefficient <0.05% F.S. per °C
Valve Shut Down (leak-by)
0.005 sccm 15.6 sccm
1 Maximum flow depends on pressure conditions; consult applications engineering for details
2 Calibration on CO
2
available as an option on SLAMf50/60 & SLAMf51/61
3 Accuracy at Calibration Conditions
4 Available Range defines the minimum full scale flow and maximum Full Scale flow available for each body size
SLAMf50/60 SLAMf51/61 SLAMf53/63
Inlet Pressure Range:
Outlet pressure range:
5 psig to 60 psig 10 psig to 60 psig 8 psig to 60 psig
Atmospheric
Ratings
Maximum Pressure
Same as standard
Differential Pressure (Controller Only)
60 psig
Valve Configuration
Standard SLA with Special Factory Tuning/Normally Closed
Ambient Temperature Range
-14
˚
C - 50
˚
C
Sensor Design
Enhanced construction to meet industry standards for cleanliness
5 Performance at minimum inlet pressure will be gas and flow range dependent. Consult Applications Engineering for details.
6 Maximum pressure drop. Actual pressure drop will be gas and flow dependent. Consult Applications Engineering for details.
Atmospheric Atmospheric
S Performance Package
T Premium Package
U Performance Package with CO2 Calibration
V Premium Package with CO2 Calibration
Code Description Code Option Option Description
Biotech Options Packages
A Performance Package must be ordered for basic Biotech model features;
B Premium Package includes Performance Package features.
C Not available on SLAMf53 or SLAMf63
A
B
²
³
±0.9% of S.P. (20-100% F.S.)
±0.18% of S.P. (0.67-20% F.S.)
>1100 slpm F.S.
±1.0% of F.S.
±0.9% of S.P. (20-100% F.S.)
±0.18% of F.S. (20% F.S.)
₅
⁶
C
C
Min. F.S. Max. F.S. Min. F.S. Max. F.S. Min. F.S. Max F.S.
5 sccm 50 lpm 15 lpm 150 lpm 100 lpm 2500 lpm
¹
Table 1-3 SLAMf Specifications
4
4