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Contents

Section 1 Introduction

Scope ............................................................................................................................................1

Purpose .........................................................................................................................................1

Specifications

.............................................................................................................................. 1-4

Biotech Option.............................................................................................................................5-19

Section 2 Installation

General.........................................................................................................................................20

Receipt of Equipment ...................................................................................................................20

Recommended Storage Practice .................................................................................................20

Return Shipment ..........................................................................................................................20

Transit Precautions ......................................................................................................................21

Removal from Storage .................................................................................................................21

Gas Connections ..........................................................................................................................21

In-Line Filter .............................................................................................................................. 21-24

Electrical Interface ..................................................................................................................... 24-27

Operation Check Procedure: Analog I/O ......................................................................................28

Operation Check Procedure: Digital I/O .......................................................................................29

Digital Configuration

.....................................................................................................................29

Section 3 Operation

Operating Procedure ....................................................................................................................30

Features .......................................................................................................................................30

Biotech Option...............................................................................................................................31

Analog I/O Mode of Operation................................................................................................... 31-32

Communications Features ...........................................................................................................33

RS485 Communications Features (Analog versions only) ...........................................................33

DeviceNet Communications Features ....................................................................................... 33-34

Profibus Communications Features

.............................................................................................34

EtherNet/IP Communications Features ........................................................................................35

Alarms (Analog versions only)......................................................................................................35

Alarms (Analog versions only) - Configuration Attributes

.......................................................... 35-36

Diagnostic Alarms (Analog versions only) ....................................................................................37

General Alarms (Analog versions only) ..................................................................................... 38-39

Calibration/Configuration Sets

......................................................................................................39

Special Features ..........................................................................................................................40

Setpoint Ramping .........................................................................................................................40

Low Setpoint Command Cutoff ....................................................................................................40

Low Flow Output Cutoff ................................................................................................................40

Adaptive Control ...........................................................................................................................40

Flow Totalizer ...............................................................................................................................41

PC-based Support Tools ..............................................................................................................41

Содержание SLAMf Series

Страница 1: ...X TMF SLAMf Series RevB MFC eng Part Number 541B188AAG September 2019 SLAMf Series Elastomer Sealed Thermal Mass Flow Meters and Controllers Installation Operation Manual Model SLAMf50...

Страница 2: ...system Open process valves slowly to avoid flow surges 2 Check for leaks around the flow meter inlet and outlet connections If no leaks are present bring the system up to the operating pressure Pleas...

Страница 3: ...ng Procedure 30 Features 30 Biotech Option 31 Analog I O Mode of Operation 31 32 Communications Features 33 RS485 Communications Features Analog versions only 33 DeviceNet Communications Features 33 3...

Страница 4: ...13 1 11 Model SLAMf50 Analog RS485 13 1 12 Model SLAMf60 Analog RS485 14 1 13 Model SLAMf51 DeviceNet 14 1 14 Model SLAMf61 Analog RS485 15 1 15 Model SLAMf60 Profibus 15 1 16 Model SLAMf53 Profibus 1...

Страница 5: ...ications 3 1 3 SLAMf Series Specifications for Biotech Option 4 1 4 SLAMf Series Agency Certifications 5 2 1 Recommended Filter Size 21 3 1 Typical Resistor Values for Calibration Selection 3 5 4 1 Be...

Страница 6: ...ruction manual is intended to provide the user with all the information necessary to install operate and maintain the Brooks MFC and MFM This manual is organized into the following sections Section 1...

Страница 7: ...ing Time within 1 second 3 seconds N A 2 F S for 0 100 command step Zero Stability 0 2 F S per year Temperature Coefficient Zero 0 05 of F S per C Span 0 1 of S P per C Pressure Coefficient 0 03 per p...

Страница 8: ...r 0 10 Vdc Full Range 1 11 Vdc Min Load Resistance 2 kOhms Nominal Range 0 20 mA or 4 20 mA Full Range 0 22 mA 0 20 mA 3 8 22 mA 4 20 mA Max Load 380 Ohms for supply voltage 16 Vdc Type Open Collector...

Страница 9: ...Pressure Same as standard Differential Pressure Controller Only 60 psig Valve Configuration Standard SLA with Special Factory Tuning Normally Closed Ambient Temperature Range 14 C 50 C Sensor Design E...

Страница 10: ...al measured temperature values 2 Provisions shall be made to prevent the rated voltage from being exceeded by transient disturbances of more than 40 3 The equipment shall only be used in an area of no...

Страница 11: ...eference STP Standard Temperature and Pressure for gases Further note that temperature and pressure values for standard or normal reference conditions vary in countries and industries worldwide For ex...

Страница 12: ...digital signal See communications protocol for your digital coms Analog devices can be switched via voltage signals to Pin 11 8 on Firmware Version 1 18 newer Selectable Soft Start Processes requiring...

Страница 13: ...Section 1 Introduction Figure 1 2 Response Performance of Brooks Digital MFC Figure 1 3 Linear Ramp up or Ramp up down from 200 Per Second Down to 0 5 Per Second Setpoint Change 8...

Страница 14: ...access to many of the SLA enhanced digital functions for control and monitor opera tions including Accurate setpoint adjustment and flow output measurement including units of measure selection Valve O...

Страница 15: ...address number ranging from 0 to 126 This can provide fast device replacement without complex network configurations The Profibus DP piggyback board is equipped with a zero command pushbut ton allowin...

Страница 16: ...it is a multi drop connection that allows a maximum of 64 devices to be connected on the same network Baud rate selections for DeviceNet products are 125K 250K and 500K and can be selected via rate sw...

Страница 17: ...EtherNet IP communications interface Please refer to the supplemental EtherNet IP manual for more description of the benefits of Brooks implementation of the communications platform The available phy...

Страница 18: ...Section 1 Introduction Figure 1 11 Model SLAMf50 Analog RS485 Note Aux Input is used for Remote Transducer Pressure Controllers only 13 Figure 1 10 Model SLAMf50 EtherNet IP...

Страница 19: ...n Figure 1 13 Model SLAMf51 DeviceNet Note Aux Input is used for Remote Transducer Pressure Controllers only Figure 1 12 Model SLAMf60 Analog RS485 Note Aux Input is used for Remote Transducer Pressur...

Страница 20: ...n Figure 1 14 Model SLAMf61 Analog RS485 Note Aux Input is used for Remote Transducer Pressure Controllers only 15 Figure 1 15 Model SLAMf60 Profibus Note Aux Input is used for Remote Transducer Press...

Страница 21: ...ion 16 Figure 1 16 Model SLAMf53 Profibus Note Aux Input is used for Remote Transducer Pressure Controllers only Figure 1 17 Model SLAMf63 DeviceNet Note Aux Input is used for Remote Transducer Pressu...

Страница 22: ...Model SLAMf64 Analog RS485 1 1 2 or 2 FNPT Note Aux Input is used for Remote Transducer Pressure Controllers only Figure 1 19 Model SLAMf64 DeviceNet 1 1 2 or 2 FNPT Note Aux Input is used for Remote...

Страница 23: ...0 Model SLAMf64 Profibus 1 1 2 or 2 FNPT Note Aux Input is used for Remote Transducer Pressure Controllers only Figure 1 21 Model SLAMf64 DeviceNet 3 to 8 RF Flange Note Aux Input is used for Remote T...

Страница 24: ...Section 1 Introduction Figure 1 22 Model SLAMf64 Analog RS485 1 1 2 or 2 150 lb RF Flange Note Aux Input is used for Remote Transducer Pres sure Controllers only 19...

Страница 25: ...t for damaged or missing parts Recommended Storage Practice If intermediate or long term storage of equipment is required it is recommend ed that the equipment be stored in accordance with the followi...

Страница 26: ...nstall piping in such a manner that permits easy access to the instrument if removal becomes necessary In Line Filter It is recommended that an in line filter be installed upstream from the mass flow...

Страница 27: ...can be installed in any position How ever mounting in orientations other than the original factory calibration see calibration data sheet supplied with the instrument can result in a 0 2 maximum full...

Страница 28: ...it is recom mended that process line startups are handled with care The bellows spring is offered in two levels A low force for low differential pres sures delta P 30 psig and a high force delta P 30...

Страница 29: ...mmonly available sanitary clamps Brooks does not supply sanitary clamps with the products Customers shall select the appropriate sanitary clamps and follow the manufacturers installation instructions...

Страница 30: ...Section 2 Installation Figure 2 1 Analog I O Pin Connections Top View Uncovered Note Aux Input is used for Remote Trans ducer Pressure Controllers only 25...

Страница 31: ...on 2 Installation Figure 2 2 Recommended I O Wiring Configuration for Current Signals Non Isolated Power Supply Figure 2 3 Recommended I O Wiring Configuration for Current Signals Isolated Power Suppl...

Страница 32: ...and PC 27 Protective Earth Connections DeviceNet The shield of the cable does not directly short to the device chassis In order to achieve proper EMC compliance the device conductive chassis shall be...

Страница 33: ...dc output 1 000 Vdc 10 mV 1 5 Vdc output 0 000 mA 40 A 0 20 mA output 4 000 mA 40 A 4 20 mA output f Turn on the gas supply A positive flow signal may be present due to slight valve leak thru MFC only...

Страница 34: ...0 seconds after setpoint change f If flow output signal does not match the setpoint and pressure set tings are correct this could indicate a problem in the MFC A second ary issue could be the gas type...

Страница 35: ...and valve control The analog interface matches that of Brooks popu lar analog MFCs so it can be retrofitted into tools using analog MFCs Other versions of the SLAMf Series can provide a variety of di...

Страница 36: ...al Pages section of the Installation and Operations manual for BEST also available at Brooksinsturment com The DeviceNet Profibus EtherNet IP and RS485 supplemental manuals describe further details on...

Страница 37: ...ce should be full of process gas with no pressure differential 3 Wait at least 30 seconds for the flow signal to drop to zero 4 Using the device s Zero pushbutton zero the device press the pushbutton...

Страница 38: ...S485 SLA5800 SLAMf Series RevB MFC PC RT eng Part Number 541B189AAG DeviceNet Communications Features The Brooks SLAMf Digital Series is also available with DeviceNetTM communi cation capability Devic...

Страница 39: ...tection ranging from 9600 baud to 12 Mbaud thus making the need for any hardware baud rate selection methods not required For selecting the device address which must be unique on the network two rotar...

Страница 40: ...l X DPT EtherNetIP SLA58xx SLAMFxx Series RevB MFC eng Part Number 541B227AAG Alarms Analog versions only Configuration Attributes Alarms are a user configurable feature This feature may be adjusted v...

Страница 41: ...state condi tion of the device High Limit The value of the monitored value above which is considered an alarm condition This attribute not valid for alarms that monitor a state condi tion of the devic...

Страница 42: ...y Byte by byte test of Non Volatile Memory detects bad memory location Diagnostic Alarms Analog versions only A Diagnostic Alarm will be indicated when any of the diagnostics below detect a failure pr...

Страница 43: ...ts the alarm when the difference exceeds the specified limits for more than the specified delay period The user specifies a minimum and maximum limit in percent of Setpoint This alarm is disabled if t...

Страница 44: ...a voltage signals to pins 11 8 on firmware vesrion 1 18 newer On non remote transducer units the RT input shall support selection of 6 cali bration pages using the below listed voltage input levels In...

Страница 45: ...he Low Setpoint Command Cutoff parameter sets the minimum valid value of Setpoint If the Setpoint value reported by the analog input is below the Low Setpoint Command Cutoff parameter value then the S...

Страница 46: ...pport Tools Brooks Instrument offers PC based process control and service tools to meet the needs of our customers which may be used with any unit supporting RS485 in a multidrop configuration thus al...

Страница 47: ...equired on the Brooks SLAMf Digital MFC s and MFM s If an in line filter is used the filtering elements should be periodically replaced or cleaned This section contains suggestions to help diagnose si...

Страница 48: ...ere System Checks The Brooks SLAMf Series Flowmeters and Controllers are generally used as a component in gas handling systems which can be complex in nature It can therefore be very difficult to isol...

Страница 49: ...rsist subject all wetted1 components to ultrasonic cleaning Following this purge the device thoroughly with dry nitrogen gas once again 3 If the sensor is contaminated remove the sensor and use a hemo...

Страница 50: ...stream 2 Temperature Sensor Su Downstream 3 Temperature Sensor Sd 4 Sensor Common 5 Heater Common 6 Thermistor 7 Thermistor Table 4 2 Sensor Troubleshooting Calibration Procedure The calibration of Br...

Страница 51: ...oard Contact Brooks Instrument Output signal follows Setpoint Control valve leaks or is stuck Return the device at higher Setpoints but will not open to the factory go below 2 Output signal follows Se...

Страница 52: ...sion relative et dont la taille d passe 25 mm ou un pouce entrent dans le cadre de la directive PED La section Sp cifications de ce manuel contient les instructions relatives la directive PED Les appa...

Страница 53: ...egen elektrostatische Spannungen zu transportieren oder zu lagern Platinen d rfen erst kurz vor dem Einbau aus der Schutzh lle entfernt werden Ausgebaute Platinen m ssen umgehend in Schutzbeh lter zum...

Страница 54: ...El blindaje debe conectarse a tierra Para obtener instrucciones adicionales sobre las conexiones a tierra PE consulte la Secci n 2 Interfaz el ctrica p gina 27 Los conectores que pertenecen a las tarj...

Страница 55: ...VICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is manda...

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