Brooks Instrument SLA5840, Инструкция по установке и эксплуатации

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4-7
Brooks
®
Model SLA5840
Section 4 Maintenance
& Troubleshooting
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
October, 2017
GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m
3
)
FACTOR FACTOR @0°C, 1 atm
Perfluoropropane C
3
F
8
0.179 2.591 8.396
Pentane (n-Pentane) C
5
H
12
0.212 1.605 3.222
Phosgene COCL
2
0.504 1.881 4.418
Phosphine PH
3
0.783 1.100 1.517
Phosphorous Pentafluoride PF
5
0.346 2.109 5.620
Phosphorous Trifluoride PF
3
0.495 1.770 3.906
Propane (same as CH
3
CH
2
CH
3
) C
3
H
8
0.343 1.274 2.008
Propylene (Propene) C
3
H
6
0.401 1.234 1.875
Rhenium Hexafluoride ReF
6
0.230 3.279 13.41
Silane SiH
4
0.625 1.070 1.440
Silicon Tetrachloride SiCL
4
0.310 2.465 7.579
Silicon Tetrafluoride SiF
4
0.395 1.931 4.648
Sulfur Dioxide SO
2
0.728 1.529 2.858
Sulfur Hexafluoride SF
6
0.270 2.348 6.516
Sulfur Tetrafluoride SF
4
0.353 1.957 4.776
Sulfur Trioxide SO
3
0.535 1.691 3.575
Sulfuryl Fluoride SO
2
F
2
0.423 1.931 4.648
Tetrachloromethane CCL
4
0.344 2.345 6.858
Tetrafluoroethylene (TFE) C
2
F
4
0.361 1.905 4.526
Tetrafluorohydrazine N
2
F
4
0.367 1.926 4.624
Trichlorofluoromethane f-11 CCL
3
F 0.374 2.244 6.281
Trichlorosilane SiHCL
3
0.329 2.201 6.038
Trimethyloxyborane (TMB) B(OCH
3
)
3
0.300 1.929 4.638
1,1,2-Trichloro-1,1,2-Triflouroet f-113 C
2
CL
3
F
3
0.231 2.520 7.920
Trimethylamine (CH
3
)
3
N 0.316 1.467 2.639
Tungsten Hexafluoride WF
6
0.227 3.264 13.28
Uranimum Hexafluoride UF
6
0.220 3.548 15.70
Vinyl Bromide C
2
H
3
Br 0.524 1.985 4.772
Vinyl Chloride C
2
H
3
CL 0.542 1.492 2.788
Vinyl Fluoride C
2
H
3
F 0.576 1.281 2.046
Water Vapor H
2
O 0.861 0.802 0.804
Xenon Xe 1.383 2.180 5.851
Table 4-1 Conversion Factors (Nitrogen Base) Continued.